Title:
MICRO-LED TRANSFER DEVICE AND MICRO-LED TRANSFER METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2021/241909
Kind Code:
A1
Abstract:
An LED transfer device is disclosed. The LED transfer device comprises: a laser device for emitting a laser beam; a first stage on which a first substrate having a plurality of LEDs arranged thereon is separably mounted and which is disposed below the laser device; a second stage on which a second substrate having a TFT layer formed thereon is separably mounted and which is disposed below the first stage; a first and a second driving device for moving the first and the second stage, respectively; an emitting device disposed above the first stage and emitting a laser beam toward the first substrate so that the LEDs of the first substrate are transferred to the second substrate; a position detection device for detecting positions of the first stage and the second stage during an LED transfer process; and a processor for determining the position data of the first stage and the second stage, which are delivered from the position detection device, and controlling the first and the second driving device so as to correct the positions of the first and the second stage.
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Inventors:
KWAG DOYOUNG (KR)
KIM BYUNGCHUL (KR)
PARK SANGMOO (KR)
CHOI WONSIK (KR)
KIM BYUNGCHUL (KR)
PARK SANGMOO (KR)
CHOI WONSIK (KR)
Application Number:
PCT/KR2021/005792
Publication Date:
December 02, 2021
Filing Date:
May 10, 2021
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD (KR)
International Classes:
H01L21/67; H01L21/52
Foreign References:
| KR20190057054A | 2019-05-27 | |||
| KR20190109078A | 2019-09-25 | |||
| KR20120042211A | 2012-05-03 | |||
| KR20200006263A | 2020-01-20 | |||
| KR20190000058A | 2019-01-02 |
Attorney, Agent or Firm:
KIM, Tae-hun et al. (KR)
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