Title:
A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2024/002399
Kind Code:
A1
Abstract:
The present invention relates to a multi-mode low-voltage electron microscope operative in the accelerating voltage range of 3-50 kV and comprising in the following order based on the direction of a primary electron beam (12): an electron beam source (1) to generate the primary electron beam (12), a first magnetostatic condenser lens means (3), a second magnetostatic condenser lens means (4), a condenser aperture (5), a sample holder (6), a magnetostatic objective lens means (7), an objective aperture (8), a first electrostatic projective lens means (9), and an end detection system (18) comprising a detection screen (11) and at least one detector selected from a STEM detector (23) configured to detect a signal of transmitted electrons, a TEM detector configured to detect a signal of transmitted electrons and/or an ED detector configured to detect a signal of diffracted electrons. The second magnetostatic condenser lens means (4) and the magnetostatic objective lens means (7) together comprise a first objective polepiece (13) and a second objective polepiece (14) with the sample holder (6) arranged therebetween. An EDS detector (15) configured to detect a signal of energy-dispersed X-ray radiation is arranged between the first objective polepiece (13) and the second objective polepiece (14), essentially co-planarly and laterally with respect to the sample holder (6). The EDS detector (15) comprises a collimator (16) attached to the second objective polepiece (14). The present invention further relates to an arrangement of an electron microscope and an EDS detector (15) for detecting a signal of energy-dispersed X-ray radiation in the electron microscope comprising an objective polepiece (14). The EDS detector (15) comprises a collimator (16) attached to the objective polepiece (14).
More Like This:
| JPS62186453 | STROBOSCOPE ELECTRON BEAM DEVICE |
| JP4891736 | Ronchigram-centered determination method |
| JP6293956 | Electron beam processing system |
Inventors:
BEJDÁK TOMÁŠ (CZ)
COUFALOVÁ EVA (CZ)
ŠTĚPÁN PETR (CZ)
COUFALOVÁ EVA (CZ)
ŠTĚPÁN PETR (CZ)
Application Number:
PCT/CZ2022/050061
Publication Date:
January 04, 2024
Filing Date:
June 29, 2022
Export Citation:
Assignee:
DELONG INSTR A S (CZ)
International Classes:
H01J37/04; H01J37/244; H01J37/26
Foreign References:
| US20140077080A1 | 2014-03-20 | |||
| JP2722889B2 | 1998-03-09 | |||
| US6573502B2 | 2003-06-03 | |||
| US6875984B2 | 2005-04-05 |
Other References:
"Biological Field Emission Scanning Electron Microscopy", 6 February 2019, WILEY, ISBN: 978-1-118-66326-4, article MICHAEL F HAYLES: "Akashi Seisakusho Ltd - SEM Development 1972-1986", pages: 7 - 23, XP055643273, DOI: 10.1002/9781118663233.ch2
Attorney, Agent or Firm:
KENDEREŠKI, Dušan (CZ)
Download PDF: