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WO/2009/076134A1 |
An electrokinetic pump and fluid delivery system is provided that may include any of a number of features. One feature of the fluid delivery system is that it can deliver a fixed volume of fluid with each stroke of the electrokinetic pum...
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WO/2009/070965A1 |
A vehicle vibration energy generating conversion device includes an energy input device(C) and a main machine device (D). The energy input device(C) includes a fork-shaped hinged collecting device(1) located at or near both ends of a veh...
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WO/2009/068180A1 |
The invention relates to a multi-level membrane suction pump having at least two pump chambers, comprising each a fluid inlet with at least one inlet valve and a fluid outlet with at least one outlet valve, and having a suction line conn...
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WO/2009/029961A2 |
A device, system and method for measuring the real-time performance of any pump assembly but especially for vacuum pumps, including a spool adapted to receive electronic sensors for measuring temperature (in Celsius), pressure (in Bar) a...
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WO/2009/028450A1 |
Provided is a cryopump system which can reduce the entire system cost and the least power consumption. The system includes: a plurality of cryo pumps (7a to 7e) each having a freezer; and a plurality of compressors for supplying a gas to...
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WO/2009/018239A1 |
The subject matter disclosed herein relates to apparatus and methods for vehicle-based mobile vacuum systems.
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WO/2009/013807A1 |
[PROBLEMS] To provide a cryopump that attains an enhancement of regeneration efficiency, and that despite the adsorption or congelation of water molecules together with non-water molecules at the time of vacuum generation, attains a shor...
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WO/2008/143067A1 |
A cryotrap (1) is placed in a vacuum container (3) and has an exhaust panel (7) for cooling gas to condense it and exhausting the condensed gas, and also has a cooling stage (5) connected to a refrigeration machine (2) and cooled. The cr...
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WO/2008/122175A1 |
A stepped compressing method and system of a reciprocating piston compressor has four-stage compressing output. Every stage has individual input and output tube line. Valves control the compressing stage, and a programmable logic control...
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WO/2008/115615A1 |
A sorption pumping system includes a conductive inner vessel having a sorbent material therein to adsorb gas molecules. An outer vessel is positioned about the inner vessel and includes a heat transfer flange connected thereto. A gas cha...
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WO/2008/111335A1 |
[PROBLEMS] A vibration-proof structure for a vacuum pump, the structure being suitable to reduce microvibration of a vacuum device caused by operation of a vacuum pump. [MEANS FOR SOLVING PROBLEMS] A vibration-proof structure for a vacuu...
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WO/2008/088794A2 |
A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid ...
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WO/2008/047168A1 |
A vibration isolator is described for inhibiting transfer of vibration to an apparatus during evacuation thereof by a pump. The isolator comprising a bellows for isolating from the ambient atmosphere fluid drawn from the apparatus by the...
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WO/2008/038611A1 |
A technique capable of highly accurately conveying even a slight amount of gas and highly reliable. A gas conveying pump (10) has a flow channel and a heater (20). The flow channel is composed of a chamber (12), an entrance side channel ...
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WO/2008/031929A1 |
Simple reciprocating pump intended to raise a non-lubricating liquid (petrol, alcohol, liquefied gas, etc.) to a very high pressure, of up to several thousand bar. The pump is made up of a casing (1), the interior of which is separated i...
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WO/2008/014780A1 |
The present invention relates to a device for controlling a gas flow between at least two receivers separated from each other. The invention encompasses a receiver-connecting element with at least one opening for the gas flow between the...
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WO/2008/003724A2 |
The invention relates to a highly efficient getter pump with low maintenance requirements and to a vacuum coating installation, in the vacuum chamber of which an ultra-high vacuum can be generated, thus allowing the substrate to be coate...
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WO/2007/104399A1 |
The invention relates to a compressor (1) for cryogenic media comprising at least one compressor cylinder (4), which contains a compressor piston (5), the compressor piston (5) interacting with a crankshaft (3) by means of a connecting r...
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WO/2007/104400A1 |
The invention relates to a compressor assembly (1) for cryogenic media comprising a compressor (2), which interacts with a drive device (3), in particular an electric motor that produces the drive. The compressor (2) delivers the compres...
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WO/2007/068081A1 |
A system and method pumps process fluid from a cryogenic storage vessel to a vaporizer, and delivers the fluid as a pressurized gas. The method includes measuring process fluid temperature after the process fluid exits the vaporizer, tem...
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WO/2007/068969A1 |
Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor u...
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WO/2007/066852A1 |
A cryopump has a dual-stage construction and includes a first stage for capturing water vapor; a cooling panel having adsorptive charcoal so that argon or nitrogen gas can condense and adsorb; a second stage on which the cooling panel is...
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WO/2007/014466A1 |
A high-pressure gas compressor comprises a single-acting cam driven piston with a pressure compensation chamber disposed between the piston and the cam. A roller tappet assembly transmits reciprocating motion from the cam to the piston. ...
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WO/2007/013274A1 |
[PROBLEMS] To reduce the size of a vacuum pump device while eliminating vibration by efficiently removing the heat of a control circuit substrate incorporated in a controller without relying upon conventional forced air-cooling system an...
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WO/2007/012384A1 |
The invention relates to a compressor (1), in particular a piston compressor, for compressing a gaseous medium, having a low pressure stage (5) for compressing the medium from an inlet pressure to an intermediate pressure, and having a h...
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WO/2007/010851A1 |
Provided is a vacuum system wherein the rotating speed of a vacuum pump can be suitably adjusted at the time of performing prescribed process in a vacuum chamber to contribute to energy saving. A vacuum pump controller (33) in a semicond...
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WO/2007/010170A2 |
The invention concerns a device for vacuum pumping comprising at least one main pump (1) and one auxiliary pump (2) connected in series, respectively driven by a first electric motor (1b) and a second electric motor (2b) themselves power...
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WO/2006/133813A1 |
The invention relates to a compressor, especially a compressor for cryogenic media, preferably for liquid hydrogen, comprising a compressor chamber which is surrounded by a cylinder wall and in which a compressor piston is displaced in a...
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WO/2006/128392A1 |
In standard piston pumps, the continuous up and down movement of the piston is generated by means of a crank mechanism. This is disadvantageous, however, when trying to obtain a final pressure which is as low as possible, as the time int...
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WO/2006/106302A1 |
A method of controlling the temperature of an electronic circuit or other moisture sensitive component of a vacuum pump is described. The method comprises the steps of flowing a cooling fluid through a component cooling circuit to cool t...
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WO/2006/097054A1 |
The invention relates to a piston pump having the first-stage dead space (20) defined by the inner wall of the first-stage cylinder (6), the first-stage head (8) including the exhaust valve (10) and the first-stage piston (4) in the posi...
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WO/2006/091743A2 |
Disclosed is a micro-pump having at least one channel on a substrate where the channel has an inlet and an outlet. The micro-pump includes a first and second electrode coupled to the substrate, wherein the electrodes deliver a current th...
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WO/2006/069681A1 |
The invention relates to a fuel supply device for a motor vehicle that can be operated by hydrogen, the hydrogen extraction device thereof provided with a container, especially a cryogenic tank, comprising a pressure increasing device fo...
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WO/2006/068014A1 |
A structure for connecting end parts to each other capable of reducing vibration by a simple apparatus, capable of isolating electrical noise, and having the degree of freedom in mounting attitude and a vacuum system to which the structu...
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WO/2006/060275A2 |
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The ga...
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WO/2006/060713A1 |
A cryogenic pumping system for pumping a cryogenic fluid generally includes a rotor having a plurality of slots. The rotor includes at least one endring defining a plurality of openings. Each opening is aligned with a different one of th...
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WO/2006/041113A1 |
A damper in which vibration in a specific frequency band can be reduced while keeping the degree of freedom of the fixing posture of a vacuum pump. A bellows (44) and an elastic member (45) are arranged at an interval large enough to pre...
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WO/2006/034926A1 |
The invention relates to a vacuum device comprising a cooling device for generating cryogenic temperatures. The cooling device is located in a housing (40). The latter (40) is connected to a heat exchanger (32), which dissipates the heat...
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WO/2006/036257A1 |
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stag...
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WO/2006/027848A1 |
[PROBLEMS] To provide a multistage piston type vacuum pump simply and compactly formed, capable of developing a high performance, and consuming less power. [MEANS FOR SOLVING PROBLEMS] This multistage piston type vacuum pump comprises at...
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WO/2006/026541A2 |
Ion pumping modules without ion pump magnets are disposed within evacuated spaces located within the fringing fields of cryostatic housed high field magnets. Improved vacuum conditions are obtainable both within superconducting magnet cr...
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WO/2006/025910A1 |
A cryogenic adsorption pump, system and method including adsorbent material contained in a first container, wherein the first container is cooled inside of a second container. The second container is filled with a cryogenic liquid to eff...
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WO/2006/018639A1 |
A system for evacuating an enclosure is provided. The system comprises first pumping means having an inlet selectively connectable to an outlet from the enclosure. Second pumping means are also provided together with conduit means for co...
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WO/2006/010179A1 |
The invention relates to a container for an NEG, for introducing getter layers into a closed system. Said container comprises a housing (1) which is provided with at least one opening (2, 3) closed in a vacuum-tight manner and optionally...
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WO/2006/010679A1 |
The invention concerns a vacuum pumping circuit comprising: an upper chamber (34) and a lower chamber (36) communicating via a connecting orifice (38), and comprising a valve (40) provided with a rod slidably guided along a vertical axis...
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WO/2005/123212A2 |
This invention is a cryopump for enhanced removal of hydrogen from a vacuum environment. This is achieved through the use of a second stage made readily available to the gases being removed from the vacuum chamber. A plate that is part o...
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WO/2005/119060A1 |
To improve the rate at which vibrations propagating from a vacuum pump to a vacuum device are cut off. A turbo molecular pump (1) is connected to a main vacuum chamber (2) through a vacuum seal structure (4). Further, an auxiliary vacuum...
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WO/2005/116448A1 |
Radiation heat from a vacuum pump propagated to the vacuum device side is efficiently reduced by a simple construction. A radiation heat reduction structure is provided on the upstream of a gas transfer mechanism of a turbo molecule pump...
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WO/2005/107552A2 |
This impeller-free vacuum cleaner is based on a rotary piston. Vacuum suction of 300 inches of water or better can be delivered. Quietness of below 70 db can be delivered. Tongued rotary piston assemblies may be strategically placed, suc...
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WO/2005/095798A1 |
The vacuum system consists of a vacuum chamber (10) and of a unit (11) that are connected by a flange connection (20). In order to prevent the transmission of vibrations from the unit (11) to the vacuum chamber (10), an elastomeric dampi...
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