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Patent Searching and Data


Matches 301 - 350 out of 5,215

Document Document Title
WO/2007/104399A1
The invention relates to a compressor (1) for cryogenic media comprising at least one compressor cylinder (4), which contains a compressor piston (5), the compressor piston (5) interacting with a crankshaft (3) by means of a connecting r...  
WO/2007/104400A1
The invention relates to a compressor assembly (1) for cryogenic media comprising a compressor (2), which interacts with a drive device (3), in particular an electric motor that produces the drive. The compressor (2) delivers the compres...  
WO/2007/071017A1
An apparatus and method are provided for pumping a cryogenic fluid from a storage vessel. The cryogenic fluid is pumped from the storage vessel to a heat exchanger and then to a delivery conduit. A pressure sensor measures fluid pressure...  
WO/2007/068081A1
A system and method pumps process fluid from a cryogenic storage vessel to a vaporizer, and delivers the fluid as a pressurized gas. The method includes measuring process fluid temperature after the process fluid exits the vaporizer, tem...  
WO/2007/068969A1
Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor u...  
WO/2007/066852A1
A cryopump has a dual-stage construction and includes a first stage for capturing water vapor; a cooling panel having adsorptive charcoal so that argon or nitrogen gas can condense and adsorb; a second stage on which the cooling panel is...  
WO/2006/073824A3
Provided are methods for conditioning a getter material, comprising subjecting the getter material to microwave radiation. Electronic devices uses the conditioned getter materials and methods of making such electronic devices are also pr...  
WO/2005/107552A3
This impeller-free vacuum cleaner is based on a rotary piston. Vacuum suction of 300 inches of water or better can be delivered. Quietness of below 70 db can be delivered. Tongued rotary piston assemblies may be strategically placed, suc...  
WO/2007/010170A3
The invention concerns a device for vacuum pumping comprising at least one main pump (1) and one auxiliary pump (2) connected in series, respectively driven by a first electric motor (1b) and a second electric motor (2b) themselves power...  
WO/2007/003862A3
The invention concerns a vacuum line for pumping gases in a process chamber, comprising at least: a pumping unit including a pump housing and a motor, a system for discharging the gases, first means for measuring a functional parameter c...  
WO/2007/014466A1
A high-pressure gas compressor comprises a single-acting cam driven piston with a pressure compensation chamber disposed between the piston and the cam. A roller tappet assembly transmits reciprocating motion from the cam to the piston. ...  
WO/2007/013274A1
[PROBLEMS] To reduce the size of a vacuum pump device while eliminating vibration by efficiently removing the heat of a control circuit substrate incorporated in a controller without relying upon conventional forced air-cooling system an...  
WO/2007/012384A1
The invention relates to a compressor (1), in particular a piston compressor, for compressing a gaseous medium, having a low pressure stage (5) for compressing the medium from an inlet pressure to an intermediate pressure, and having a h...  
WO/2007/010851A1
Provided is a vacuum system wherein the rotating speed of a vacuum pump can be suitably adjusted at the time of performing prescribed process in a vacuum chamber to contribute to energy saving. A vacuum pump controller (33) in a semicond...  
WO/2007/010170A2
The invention concerns a device for vacuum pumping comprising at least one main pump (1) and one auxiliary pump (2) connected in series, respectively driven by a first electric motor (1b) and a second electric motor (2b) themselves power...  
WO/2007/003862A2
The invention concerns a vacuum line for pumping gases in a process chamber, comprising at least: a pumping unit including a pump housing and a motor, a system for discharging the gases, first means for measuring a functional parameter c...  
WO/2006/133813A1
The invention relates to a compressor, especially a compressor for cryogenic media, preferably for liquid hydrogen, comprising a compressor chamber which is surrounded by a cylinder wall and in which a compressor piston is displaced in a...  
WO/2006/128392A1
In standard piston pumps, the continuous up and down movement of the piston is generated by means of a crank mechanism. This is disadvantageous, however, when trying to obtain a final pressure which is as low as possible, as the time int...  
WO2005123212A3
This invention is a cryopump for enhanced removal of hydrogen from a vacuum environment. This is achieved through the use of a second stage made readily available to the gases being removed from the vacuum chamber. A plate that is part o...  
WO/2006/106302A1
A method of controlling the temperature of an electronic circuit or other moisture sensitive component of a vacuum pump is described. The method comprises the steps of flowing a cooling fluid through a component cooling circuit to cool t...  
WO/2006/097054A1
The invention relates to a piston pump having the first-stage dead space (20) defined by the inner wall of the first-stage cylinder (6), the first-stage head (8) including the exhaust valve (10) and the first-stage piston (4) in the posi...  
WO/2006/091743A2
Disclosed is a micro-pump having at least one channel on a substrate where the channel has an inlet and an outlet. The micro-pump includes a first and second electrode coupled to the substrate, wherein the electrodes deliver a current th...  
WO2006060275A3
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The ga...  
WO/2006/069681A1
The invention relates to a fuel supply device for a motor vehicle that can be operated by hydrogen, the hydrogen extraction device thereof provided with a container, especially a cryogenic tank, comprising a pressure increasing device fo...  
WO/2006/068014A1
A structure for connecting end parts to each other capable of reducing vibration by a simple apparatus, capable of isolating electrical noise, and having the degree of freedom in mounting attitude and a vacuum system to which the structu...  
WO/2006/060275A2
The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The ga...  
WO/2006/060713A1
A cryogenic pumping system for pumping a cryogenic fluid generally includes a rotor having a plurality of slots. The rotor includes at least one endring defining a plurality of openings. Each opening is aligned with a different one of th...  
WO/2006/041113A1
A damper in which vibration in a specific frequency band can be reduced while keeping the degree of freedom of the fixing posture of a vacuum pump. A bellows (44) and an elastic member (45) are arranged at an interval large enough to pre...  
WO/2006/034926A1
The invention relates to a vacuum device comprising a cooling device for generating cryogenic temperatures. The cooling device is located in a housing (40). The latter (40) is connected to a heat exchanger (32), which dissipates the heat...  
WO/2006/036257A1
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stag...  
WO/2006/027848A1
[PROBLEMS] To provide a multistage piston type vacuum pump simply and compactly formed, capable of developing a high performance, and consuming less power. [MEANS FOR SOLVING PROBLEMS] This multistage piston type vacuum pump comprises at...  
WO/2006/026541A2
Ion pumping modules without ion pump magnets are disposed within evacuated spaces located within the fringing fields of cryostatic housed high field magnets. Improved vacuum conditions are obtainable both within superconducting magnet cr...  
WO/2006/025910A1
A cryogenic adsorption pump, system and method including adsorbent material contained in a first container, wherein the first container is cooled inside of a second container. The second container is filled with a cryogenic liquid to eff...  
WO/2006/018639A1
A system for evacuating an enclosure is provided. The system comprises first pumping means having an inlet selectively connectable to an outlet from the enclosure. Second pumping means are also provided together with conduit means for co...  
WO/2006/010179A1
The invention relates to a container for an NEG, for introducing getter layers into a closed system. Said container comprises a housing (1) which is provided with at least one opening (2, 3) closed in a vacuum-tight manner and optionally...  
WO/2006/010679A1
The invention concerns a vacuum pumping circuit comprising: an upper chamber (34) and a lower chamber (36) communicating via a connecting orifice (38), and comprising a valve (40) provided with a rod slidably guided along a vertical axis...  
WO/2005/123212A2
This invention is a cryopump for enhanced removal of hydrogen from a vacuum environment. This is achieved through the use of a second stage made readily available to the gases being removed from the vacuum chamber. A plate that is part o...  
WO/2005/119060A1
To improve the rate at which vibrations propagating from a vacuum pump to a vacuum device are cut off. A turbo molecular pump (1) is connected to a main vacuum chamber (2) through a vacuum seal structure (4). Further, an auxiliary vacuum...  
WO/2005/116448A1
Radiation heat from a vacuum pump propagated to the vacuum device side is efficiently reduced by a simple construction. A radiation heat reduction structure is provided on the upstream of a gas transfer mechanism of a turbo molecule pump...  
WO/2005/107552A2
This impeller-free vacuum cleaner is based on a rotary piston. Vacuum suction of 300 inches of water or better can be delivered. Quietness of below 70 db can be delivered. Tongued rotary piston assemblies may be strategically placed, suc...  
WO/2005/095798A1
The vacuum system consists of a vacuum chamber (10) and of a unit (11) that are connected by a flange connection (20). In order to prevent the transmission of vibrations from the unit (11) to the vacuum chamber (10), an elastomeric dampi...  
WO/2005/090795A1
A pump device and a pump unit of the pump device. The pump device comprises a low temperature flat plate group (low temperature part) (C) having a plurality of flat plates (5) as low temperature objects arranged parallel with each other ...  
WO/2005/090788A1
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a...  
WO/2005/078281A1
A vacuum device used in the field of semiconductor production and capable suppressing power consumption. The vacuum device comprises vacuum containers (10), (11), (12), (13), (14), and (15) having gas inlets and gas outlets, vacuum pumps...  
WO2004065290A3
An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A...  
WO/2005/075826A1
The invention relates to a cryogenic vacuum pump for producing a high vacuum, especially in a vacuum chamber (72), said pump comprising at least one cooling stage (14) that can be cooled, during a normal operation of the pump (10), to a ...  
WO/2005/075827A1
The present invention provides a pumping system (60) comprising: a pumping mechanism (64); a motor (51) for driving the pumping mechanism; a drive control (50) for controlling the motor; and means (52) for monitoring at least one state w...  
WO/2005/068968A1
A pump for a gas sampling or analyzing system includes a pump body having walls impervious to the gas and an electrical coil within body. The pump is coupled in series with a gas sensor and a gas volume containing the gas to be sampled o...  
WO/2005/066493A1
Disclosed herein is a vacuum ejector device, connected to a suction pad, thus sucking and conveying the article. The device includes a valve unit (10), an ejector unit (30), and a plate-shaped cover. The valve unit includes a body having...  
WO2004073825A3
This invention relates to a method for reducing the partial pressure of undesired gases in a small vacuum vessel. The method comprises using a getter pump with a sufficient sorption capacity to eliminate the need for a bakeout step.  

Matches 301 - 350 out of 5,215