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JPH09184799A |
To early detect that a filter is closed by clogging, by installing a detecting part which detects foreign matter, and a differential pressure detecting part which detects the difference between the atmospheric pressure in a detection spa...
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JPH09178596A |
To obtain a highly reliable pressure sensor by making an atmosphere introduction hole through the body with the outer open end thereof being located on the opposite side to a mounting board with respect to the body thereby preventing a f...
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JP2539622Y2 |
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JPH09159561A |
To remove a foreign material, improve sensor accuracy, ensure long- term reliability and reduce cost by providing a filter part having a water repellent property and gas permeability, and introducing measured gases to a diaphragm via the...
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JPH09145518A |
To improve a responsivity and a temperature characteristic. A diaphragm 15 in touch with a liquid and a diaphragm 35 for preventing and overloed are arranged symmetrically at both side faces of a detector body 17 of a pressure detector 3...
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JP2615532B2 |
PURPOSE: To obtain a zero point correcting method which is effective to correct not only the movement of a zero point resulting from the temperature change, but the movement of the zero point due to the pressure applied in common to both...
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JPH09126923A |
To relax the stress at the time of static pressure change and at the time of temperature change, to decrease the amount of zero shift furthermore, and to perform highly accurate differential pressure measurement in high sensitivity by pr...
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JPH09126931A |
To obtain an inexpensive differential pressure converter for measuring the difference of pressure levels, both of which are not required to be the atmospheric pressure level, by forming a chamber and the like in a plastic molded housing....
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JP2532867Y2 |
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JPH09101222A |
To provide a pressure transmitter in which the machining and assembling work is facilitated at the coupling part, especially the coupling part to be sealed hermetically. The pressure transmitter for sealing means comprises a pressure rec...
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JP2530880Y2 |
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JP2595829B2 |
A multi-function differential pressure sensor includes a semiconductor chip, a stationary base having a joining portion joined to a thick wall portion of the semiconductor chip, and a housing joined to the stationary base. The semiconduc...
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JP2597042B2 |
The differential pressure measuring apparatus comprises a single chamber differential pressure sensor having two resilient sensor diaphragms which enclose a volume filled with a fluid. In the single chamber differential pressure sensor t...
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JP2595756B2 |
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JP2595749B2 |
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JP2591319B2 |
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JPH09502809A |
A media-isolated differential pressure sensor apparatus and corresponding method combines a first signal (207, 209) provided by a first pressure sensor (101), indicative of a difference between a first pressure and second pressure applie...
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JPH0972767A |
To detect flow rate with high accuracy for a long term using a vibration sensor for fluid which can sustain the detection characteristics for a long term without requiring any adjustment. The flexure detecting section 6 of a flexure dete...
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JP2587274B2 |
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JPH0954007A |
To reduce the cost of a differential pressure measuring apparatus by installing a high pressure side and a low pressure side diaphragm seals on both side faces of a diaphragm seal body and housing a high pressure side and a low pressure ...
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JP2582362B2 |
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JP2582284B2 |
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JPH0943082A |
To suppress a change in zero point of an overload protecting diaphragm especially due to high pressure and a change in zero point due to deformation of a pressure receiving member. Chambers 17, 18 for receiving pressure of measured fluid...
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JPH0943083A |
To provide a capacitance-type pressure sensor wherein linearity in input/output characteristics is good, the sensor is compact but highly sensitive, and a measurement range is wide. A periphery of a diaphragm 2 is supported by a base 1, ...
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JPH0933373A |
To effectively remove a high frequency component from a reference side area pressure inputted to a differential pressure measuring part. In the differential pressure measuring device having a reference pressure input part (a) for inputti...
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JP2579143B2 |
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JP2523478Y2 |
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JPH095195A |
PURPOSE: To prevent measurement accuracy for decreasing, which may be generated in the case when the pressure of one side of a measurement differential pressure is extremely high. CONSTITUTION: A septum unit 27 and a sub-body 25 are inse...
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JP2570420B2 |
A pressure detector for measuring the pressure of a pressurized fluid by means of electrostatic capacitance comprising a diaphragm displaceable in response to the pressure, and a pair of fixed electrodes, one of each of the fixed electro...
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JPH08338779A |
PURPOSE: To obtain a fall preventive method in which an amplifier cover can be removed without entangling a chain or the like used to prevent a fall by forming a groove on the amplifier cover and using a support ring or the like which ca...
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JP2564961B2 |
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JPH08320269A |
PURPOSE: To reduce the error caused by the change of dielectric constant of insulating liquid sealed in a capacitor part by static pressure in a pressure detecting device for converting the displacement of a detecting diaphragm by pressu...
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JP2518809Y2 |
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JPH08297064A |
PURPOSE: To provide a pressure sensor which can detect a pressure with high accuracy and can maintain the accuracy even under severe despite of having a simple constitution, being easily manufactured, and being low in cost usage surround...
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JP2515707Y2 |
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JP2546012B2 |
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JP2546013B2 |
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JP2544435B2 |
Multi-functional sensor comprises a support base made from borosilicate, a diaphragm with a E-shaped section secured to the base, the diaphragm being made from single crystalline silicon, principal plane thereof being oriented to be a cr...
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JPH08261856A |
PURPOSE: To provide a differential pressure detection device which enhances the accuracy of a temperature correction by a method wherein a differential pressure detection part and a temperature detection part are brought close to each ot...
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JP2540970B2 |
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JPH08247878A |
To eliminate temperature drift error by placing a counter electrode under tensile stress higher than that of a detection diaphragm (intermediate electrode) and providing the detection diaphragm) with a pressure port through formation of ...
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JPH08240502A |
PURPOSE: To provide a capacitive pressure sensor designed to improve the linearity of output characteristics while the pressure sensitivity is set high in a required state. CONSTITUTION: A silicon substrate 10 with a diaphragm 13 and a f...
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JPH081383U |
A restrictor element (4) serves for measuring the amount of a flowing medium flowing through an advance pipe (1), the pressure differential occurring in the process being measured by a differential pressure sensor (8). The differential p...
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JPH08233673A |
To determine the pressure difference between first and second conduits easily providing a solenoid valve to be coupled with a conduit and determining the pressure difference based on a predetermined pressure gradient, a signal characteri...
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JPH08233675A |
PURPOSE: To accurately and easily perform positioning of a support member having two pressure introducing holes and a plate-like member which is joined to one end surface of this support member and in which places corresponding to the ho...
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JPH08219919A |
PURPOSE: To stabilize the differential pressure signal by a structure wherein the protective part is not subjected to the influence of compressive force of a cover tightening bolt from each part for receiving the differential pressure to...
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JPH08219917A |
PURPOSE: To simplify the structure by interposing an insulation member having a through hole for lead between a differential pressure detecting part and a dielectric sealing part for passing the lead provided at the outer circumferential...
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JPH08219918A |
PURPOSE: To enhance the reliability of protective function by providing a shallow columnar space cut in right angle from the inner circumference at the planar ring part of a flange, and a conical inner space for encapsulating a pressure ...
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JPH08193904A |
PURPOSE: To prevent a measuring diaphragm and a fixed electrode disposed oppositely thereto from being seized in the center thereof upon reception of an undue differential pressure. CONSTITUTION: Cylindrical recesses 9a are distributed a...
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JP2517467B2 |
In a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A first sacrificial layer is embedded in the first groove. First insu...
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