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JP5755553B2 |
An air compressor with enhanced air compressing effect comprises a mounting chassis (2) with a coupling aperture, a piston (5) having a piston rod with a crankpin linking bore (510) and a piston head (52) with an air acting face, a cylin...
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JP5752879B2 |
A highly reliable combined bearing (10) capable of achieving equal and sufficient lubrication of a plurality of rolling bearings with a simple and compact structure is provided. The combined bearing includes a first rolling bearing (11) ...
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JP2015520315A |
To greatly improve the stability of an assembly. A pump or rotary compressor comprises a casing (1) formed by two housings in which two diametrically opposed cylinders (2) are connected to which a piston (3) slides. The piston is attache...
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JP5748682B2 |
A cold trap includes two individually controllable cooling units. The cold trap is provided in an evacuation path for connecting a vacuum chamber to a turbomolecular pump, The first cooling unit includes a first panel unit provided in th...
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JP2015110214A |
To provide a non-evaporation type getter material having an improved gas adsorption rate, and a non-evaporation type getter pump having an improved exhaust rate with a reduced manufacturing cost and a reduced repair cost.A non-evaporatio...
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JP5733994B2 |
To provide a piston capable of improving a durability life of a seal member, and to provide a vacuum pump provided with the piston.The piston 5 includes a piston body 51, the seal member 52, a seal member fixing sheet 53 and a clamping p...
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JP5732404B2 |
A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber.
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JP2015102139A |
To provide a check valve capable of ensuring easy assembly work and preventing detachment of valve constituent components.A check valve 10 includes: a valve casing 12 that is cylindrical, an interior of which constitutes a channel 14, th...
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JP5726526B2 |
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JP2015098844A |
To improve the energy saving performance of a cryopump system.In a cryopump system 100, a cryopump 10 comprises: a refrigerator 12 that comprises a low-temperature cooling stage and a high-temperature cooling stage; a low-temperature cry...
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JP2015515248A |
The electromechanical flywheel device has a flywheel mass and an external degassing train contained within a vacuum exhaustable housing.
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JP5711898B2 |
To provide an extremely high vacuum hydrogen pump etc. maintaining high hydrogen exhaust velocity even if exhaust operation enters an extremely high vacuum region, hardly releasing hydrogen from a wall part of a vacuum container, and eff...
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JP5695690B2 |
The pumping system comprises turbomolecular pump (3,4) and two fore-vacuum pumps (5,6). A connection conduit (8) is extended between the two fore-vacuum pumps. A cross-section constriction portion (9) is provided for reducing and regulat...
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JP5691857B2 |
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JP2015509569A |
The present invention relates to a pump device (IP) comprising at least one first positive displacement machine (10) and one second positive displacement machine (20) and a control module (MC). In this pumping device (IP), the gas (G) is...
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JP5679218B2 |
A cryopump 10 includes: a first cryopanel including a radiation shield 18 having a shield opening 20 and a louver 23 arranged in the shield opening 20; a second cryopanel 24 surrounded by the first cryopanel; and a refrigerator 14 config...
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JP5679910B2 |
A cryopump control apparatus controls an evacuation process of a cryopump that includes a cryopanel which cools and thus condenses or adsorbs gas, and a pump housing which contains the cryopanel. The cryopump control apparatus includes a...
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JP5679913B2 |
A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optiona...
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JP2015040525A |
To reduce mechanical loss and eliminate unnecessary pump operation.A vacuum pump (76) suctions air in an engine case (41) by power from an engine (12) to create a low pressure in the engine case. The power from the engine is transmitted ...
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JP5669893B2 |
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JP5669895B2 |
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JP5669659B2 |
A cryopump includes a refrigerator which cools a cryopanel and a controller which receives a control signal representing an operation mode from a beam irradiating apparatus and controls the refrigerator based on the control signal. The o...
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JP5666438B2 |
Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieve...
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JP5669658B2 |
A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerato...
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JP2015021888A |
To provide a getter attachment structure that can achieve further space saving, and a sensor device including the getter attachment structure.A getter attachment structure 10 includes a package 20 where a sealed space S is formed, and a ...
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JP5660979B2 |
A refrigerator includes two displacers which are longitudinally adjacent to each other and the high temperature displacer includes a main compartment and an auxiliary compartment for a regenerator material. A direct passage for operating...
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JP5657839B2 |
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JP2014240637A |
To propose a small reciprocation type compressor which is suitable for achieving long life and various usage with low pressure and high pressure.A piston 20 of a reciprocation type compressor 1 is connected with a connecting rod 14 so as...
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JP2014240609A |
To provide a vacuum pump system that can reduce cost for cooling of cooling water and can reduce cost for operation of vacuum pumps.A vacuum pump system comprises: vacuum pumps 3 and 3'; cooling pipes 4 and 4' for cooling the vacuum pump...
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JP2014238020A |
To provide a vacuum pump capable of surely preventing dew condensation on a surface of a cooling tube or in the vicinity thereof and effectively reducing trouble such as electronic equipment is broken by water droplets caused by dew cond...
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JP5640089B2 |
The invention provides a vacuum system (12) comprising a plurality of vacuum chambers (14, 16, 18, 20) connected in series and a vacuum pumping arrangement (10) for differential pumping the chambers. The vacuum pumping arrangement compri...
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JP5636042B2 |
A multi stage vacuum pump for pumping corrosive fluid with a first flow section of material less resistant to corrosion than the material of a second flow section downstream of the first flow section.
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JP5634323B2 |
A cryopump system includes: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the ro...
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JP5632241B2 |
A refrigerator includes a displacer coupling structure, wherein one of two coupled displacers protrudes into the other of the two coupled displacers to the extent that an end of a regenerator built in the one of the two coupled displacer...
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JP5631539B2 |
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JP5619654B2 |
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JP2014199808A |
To solve such a problem that there is an inconvenience that impurities are introduced when an anode 102 is assembled by spot welding.Vacuum fired and brazed (VFB) anode array elements (700, 800, 900, 902, 1100) are used for an ion pump. ...
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JP5608685B2 |
A pump comprises: a pump body 10 which sucks in air from an inlet 7 and discharges the air; a hydraulic pump which pressure-feeds a lubricating oil to the pump body 10 in accordance with the driving of the pump body 10; a non-return valv...
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JP2014185584A |
To provide a method for preventing coagulation and accumulation of by-product powder and nitrogen gas temperature rising device that can also be applied to a dry vacuum pump that has already been installed and being operated at present.T...
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JP5600664B2 |
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JP5598774B2 |
In a structure for mounting an electric vacuum pump 1 to a vehicle body frame 3 via a bracket 2, the bracket 2 includes a wobble suppression portion 2F that is formed so as to surround a portion of the electric vacuum pump 1 at a positio...
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JP2014169657A |
To provide a rotary type cylinder device that can reduce exhaust noises even when omitting a pipeline and that can be made small ang light, and an oxygen concentration device that can reduce noises and restrain pulsation using the same a...
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JP3192974U |
To provide a vacuum storage facility having a liquid storage device capable of automatically maintaining a high vacuum and saving an operation time. A vacuum storage facility 1 includes a base 11, a support member 12 installed on the bas...
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JP2014159779A |
To provide an evacuation unit that has a simple structure and can keep a degree of vacuum constant in a vacuum chamber without controlling a vacuum pump.An evacuation unit 10 comprises: a first vacuum pump 20 that evacuates the inside of...
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JP2014152650A |
To provide a dry vacuum pump device that can continuously operate a pump control unit when a power failure such as a blackout occurs.A dry vacuum pump device comprises: a pump 2; a motor 3 for rotating the pump 2; a motor driver 6 for co...
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JP5570550B2 |
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JP5557786B2 |
A storage method of a cryopump is provided, the storage method including: closing, with a pump cover, a pump inlet in the cryopump for receiving gases to be pumped by the cryopump; and reducing a pressure in the cryopump through a fluid ...
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JP5552693B2 |
A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attach...
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JP5553638B2 |
A cold trap includes a refrigerator and a cold panel that is thermally connected with the refrigerator to be cooled. A rough surface is formed on the cold panel. The cold trap is arranged, for example, in an evacuation channel for connec...
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JP5545858B2 |
A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryop...
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