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JP5544529B2 |
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JP2014122602A |
To provide a vacuum device that comprises a transfer type main pump for exhausting a vacuum chamber and a transfer type roughing pump connected to its exhaust side and that can improve energy efficiency, thereby reducing operation costs....
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JP2014118940A |
To provide a getter pump that can improve the degree of freedom for the installation place of the getter pump by reducing the length of a flange in the thickness direction.The getter pump comprises a vacuum flange 10 including a non-thro...
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JP5529274B2 |
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JP5524691B2 |
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JP5527110B2 |
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JP5520113B2 |
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JP2014101754A |
To provide a power supply device for a vacuum pump that can prevent an excessive reaction to an increase in humidity caused by release of hygroscopic moisture while preventing condensation from forming in the power supply.A power supply ...
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JP5512106B2 |
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JP5512913B2 |
The housing has a ring (21) arranged concentrically with a cylindrical section (20), where the ring and the cylindrical section are connected with each other by a weld seam (30). The ring is formed of a harder material e.g. stainless ste...
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JP5504353B2 |
In the present invention, when a failure occurs in a first vacuum pump (53), a control means (66) controls the opening and closing of a gate valve (58), an on-off valve (59), a first inlet on-off valve (61), and a second inlet on-off val...
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JP2014512488A |
The invention relates to a pump system comprising a positive-displacement pump module, preferably a screw pump, a drive module which can be exchanged separately from the positive-displacement pump module, said drive module comprises an e...
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JP5499129B2 |
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JP5491053B2 |
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JP5492184B2 |
A cryogenic refrigerator includes a regenerative heat exchanger material in thermal contact with a working gas including a tin-antimony (Sn—Sb) alloy or a tin-gallium (Sn—Ga) alloy in at least one cooling stage. The regenerative heat...
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JP2014084837A |
To provide an electrically-driven vacuum performing soundproofing measures by a simple structure, and capable of minimizing operation sound.An electrically-driven vacuum pump 18 includes: a resinous case 130 having an inner space; a moto...
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JP5481019B2 |
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JP5473400B2 |
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JP5466235B2 |
A depressurization system includes a plurality of depressurization devices, each of which includes a cooling; and a compression device. The compression device includes a compression unit, which is provided with an AC electric motor, and ...
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JP5460644B2 |
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JP5456674B2 |
The vacuum pump comprises a casing (10) closed by a vacuum cover (20). Between an end wall (14) of the casing (10) and the vacuum cover (20), a circuit board (16) is arranged for current feedthrough. The circuit board (16) is sealed by t...
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JP5444545B2 |
A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attach...
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JP5438279B2 |
A multistage vacuum pump unit can save a power requirement and prevent the gas discharged outside of the unit from flowing-back inside the pump unit. A plurality of vacuum pumps are connected in series to form the multistage vacuum pump ...
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JP5439161B2 |
To inhibit hydrogen gas from stagnating in the inside of a soundproof cover even when the hydrogen gas leaks out from a compressor into the inside of the soundproof cover and ensure the safety by stopping the operation of a hydrogen comp...
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JP5433702B2 |
Provided is a cryopump which can prevent a condensate from being detached from a panel surface to maintain a stable exhaust operation. A cryopump (30) has a cryopanel (31) to be cooled by a refrigerating machine (32). A condensation plan...
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JP5424550B2 |
The pump (1) has a motor (8) for driving pump-active elements of two pump stages (2, 3). A transmission unit (7) transmits driving power from the motor to the pump-active elements, and a motor control (9) controls a rotational speed of t...
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JP5420543B2 |
A method of operating a multistage gas compressor system including providing a plurality of compressor stages connected in series, receiving a gas flow having contaminants within a gas passage, and supplying solvent to the gas passage at...
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JP2014029115A |
To provide a connecting structure of vacuum evacuation devices capable of suppressing pressure loss due to piping and saving space and reducing costs.The plurality of vacuum evacuation devices (1A, 1B, 1C) include pump chambers (21C, 22C...
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JP5404702B2 |
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JP5400144B2 |
The evacuated solar panel (1) comprises a frame (2) containing a plurality of spacers (3) carrying a transparent wall (4). The transparent wall (4) with the frame (2) defines a closed chamber (6) containing the spacers (3), the light abs...
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JP5398780B2 |
A cryopump includes an array of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the cryosorption p...
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JP5393577B2 |
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JP2014011120A |
To make compact an electrical feedthrough used in a vacuum device while reducing the cost.An electrical feedthrough 33 transfers an electric signal while vacuum sealing between the vacuum side and the atmosphere side of a vacuum device. ...
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JP5385826B2 |
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JP5383917B2 |
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JP2013256937A |
To rationally configure a vacuum pump for inhibiting the intake of outside air into a drive chamber when a piston is actuated in the air exhaust direction.A vacuum pump includes a piston 2 that partitions a cylinder 1 into a negative pre...
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JP5377666B2 |
Disclosed is a vacuum exhaust method wherein, when an operation (standby operation) in which the existing vacuum state is maintained, is performed, one vacuum pump (12a) exhausts air from the volume chambers in the final stages of the ot...
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JP5379101B2 |
A cryopump includes: a cryopump housing arranged to define an inner space of the cryopump from an outer environment; an exhaust duct arranged to connect with the cryopump housing so as to exhaust fluid from the inner space of the cryopum...
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JP5372239B2 |
A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion ...
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JP5373691B2 |
To provide a dry vacuum pump device enabling miniaturization of the entire device by cooling with a high efficiency cooling means with a cooling liquid large current circuit component parts of a large self heat generation amount represen...
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JP5364451B2 |
To provide a vacuum preservation device capable of setting the inside of a vessel at predetermined internal pressure, efficiently performing suction operation, and preventing liquid from being erroneously sucked. The vacuum preservation ...
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JP5352322B2 |
To provide a hydrogen compressor preventing fretting fatigue caused by repeated stress in a high-temperature and high-pressure environment and hydrogen embrittlement caused by working hydrogen gas; and besides preventing leakage of high-...
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JP5344609B2 |
To provide an ionization sputtering vacuum pump in which a reduction of evacuation speed in an ultrahigh vacuum region is minimized by introducing thermal electrons from an extra-ultrahigh vacuum region. In the ionization sputtering vacu...
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JP5342367B2 |
To provide an evacuation device and a method for using the evacuation device improving exhaust performance, shortening regeneration time and arranging a simple driving system of a valve. The evacuation device 102 includes a main pump 11 ...
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JP5313237B2 |
A cryocooler in which two independently moving flexure systems are split across a single magnetic structure, decreasing package size and increasing resistance to cantilevered mass sag due to external forces. A series of concentrically or...
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JP5303114B2 |
The pump (1) has a drive device (11) comprising electronic circuits (16) for controlling a drive motor (9), which are arranged in an internal space (8), where low pressure prevails in the internal space. A separating unit has a printed c...
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JP5303249B2 |
To provide a dry vacuum pump unit having a cooling fan for cooling air which can attenuate noise leaking to the outside through an air discharge port and air introduction port with an effective and compact structure. The unit consists of...
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JP5302386B2 |
A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacu...
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JP5307785B2 |
A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in a low-press...
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JP5296811B2 |
A cryopump includes: a vent valve provided with a cryopump housing to discharge a gas pumped on a cryopanel to the outside of the cryopump housing; and a control unit configured to determine, based on the pressure measured by a pressure ...
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