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JP5065267B2 |
An apparatus and method for compressing a gas is disclosed. A compressor, in particular a piston compressor, has a low pressure stage for compressing the medium from an inlet pressure to an intermediate pressure, and has a high pressure ...
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JP5049775B2 |
The present invention provides a getter material configured by a pressed powder mixture comprising Ba-Al alloy powder and Ni powder, wherein when the pressed powder mixture is heated in a vacuum atmosphere or an inert gas atmosphere, a t...
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JP5053269B2 |
The line has a pump (4) with motor (5), a gas exhaust system, and measurement units measuring the functional parameters relating to the motor and exhaust system. A prediction unit calculates the duration of use of the vacuum line before ...
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JP5052155B2 |
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JP5046647B2 |
To provide a damper capable of reducing vibrations in a particular frequency band while holding the degree of freedom of installation posture of a vacuum pump. A bellows 44 and an elastic member 45 are arranged with a clearance sufficien...
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JP3178736U |
To provide a rotary pump capable of efficiently draining water accumulated at the bottom by providing a viewing window for checking the amount of water accumulated in the rotary pump. A viewing window attached to a rotary pump 1 is made ...
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JP5034994B2 |
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JP5028142B2 |
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JP5031548B2 |
A cryopump includes: a cryopump chamber having an inlet port through which a gas to be pumped is introduced; a refrigerator provided with a second cooling stage provided in the cryopump chamber; an intermediate member thermally coupled t...
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JP5023716B2 |
To provide an evaporation type getter material capable of adsorbing gas by evaporating even at low temperatures; a getter pump, a decompression structure and a reaction device using it; and a power generation device and an electronic app...
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JP5025492B2 |
A cryopump cooled by a GM type refrigerator is disclosed in which the cold (second stage) cryopanel(s) are in planes that are pitched parallel to the axis of the expander cylinder; the cold end of the first stage expansion space is close...
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JP5020281B2 |
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JP2012159058A |
To provide a negative pressure pump that can suppress the entry of water and a foreign matter into the pump from an air outlet.A female screw vertical passage 132 is extended toward a fixed part 41 from one end of an exhaust passage 104,...
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JP5002845B2 |
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JP4987660B2 |
To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing a...
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JP4980179B2 |
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JP4980181B2 |
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JP4980180B2 |
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JP4979763B2 |
A vacuum pumping system comprises a primary foreline for receiving a gas stream from an outlet of a chamber, a first vacuum pump for evacuating the chamber, a second vacuum pump for evacuating the chamber, a first secondary foreline for ...
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JP4979433B2 |
To provide a gas-water separation device excellent in muffling effect while miniaturizing the device. This gas-water separation device is provided with a gas-water separation part 6 connected to a delivery piping of a vacuum pump and sep...
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JP4979883B2 |
The component has a unit (1) engageable with an external component, and another unit (3) engageable with a connection component provided on a pump housing. The units are slidable relative to each other during connection of the external c...
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JP4967594B2 |
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JP2012117491A |
To provide an evacuation equipment control method and an evacuation equipment control apparatus capable of wide-range pressure control even when the flow rate of gas is changed in a wide range.A method for controlling a plurality of evac...
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JP4955088B2 |
A pump apparatus comprises a low-temperature flat plate group (a low-temperature portion) C having flat plates 5 as a plurality of low-temperature bodies arranged parallel with each other with intervals in a direction crossing a passage ...
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JP4932911B2 |
A cryogenic refrigerator of a cryopump generates cryogenic cooling in an expansion volume by reciprocally moving a displacer in a cylinder. A cryopanel and a cup-shaped shield are received in a vacuum chamber of the cryopump and are cool...
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JP4920193B2 |
A vacuum line damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1), comprises a tubular duct wall in the form of a bellows flexible at both ends (6c, 6d) and surrounded by a damping sleeve ...
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JP4912438B2 |
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JP4909260B2 |
A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a...
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JP4899891B2 |
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JP4894056B1 |
To provide a negative pressure acting device which can be manufactured in a relatively small size and can continuously perform a negative pressure treatment of an object. A negative pressure acting unit 12 that internally processes an ob...
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JP4886207B2 |
A load-lock and dry vacuum pump assembly includes a load-lock having a load-lock housing, the load-lock housing includes a mating system having a flange-like cylinder and a cylinder concentrically located relative to said flange-like cyl...
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JP4881260B2 |
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JP4869248B2 |
There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the o...
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JPWO2010029750A1 |
A vacuum exhaust device comprising a main pump; an auxiliary pump connected in series with the main pump; an inter-pump pipe connecting between an exhaust port of the main pump and an intake port of the auxiliary pump; The main pump incl...
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JP3172822U |
To provide a vacuum pump capable of reducing the cost of a sealed structure between a control unit and a pump main body. An opening provided in a base portion 4 is hermetically sealed by using a hermetic circuit board 20. The hermetic ci...
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JP4839741B2 |
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JP4825608B2 |
A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G 2 in a process chamber 21 into which a process gas G 1 is introduced and in which a process reaction is performed, to form a vacuum in said ...
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JP4820304B2 |
To provide a vacuum pump unit capable of changing performances of a vacuum pump unit, continuing to function as a vacuum pump unit even if 1-2 units of booster pump fails, coping with a failure of the pump by changing only the failed pum...
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JP4820996B2 |
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JP2011226368A |
To provide an exhaust unit provided inexpensively with a small number of parts, enabling miniaturization and silencing the noise, and a dry vacuum pump device comprising the exhaust unit.In the exhaust unit 50 to be mounted in a multiple...
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JP4796795B2 |
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JP4796688B2 |
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JP4791520B2 |
A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the dete...
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JP4792492B2 |
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JP4779819B2 |
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JP2011174376A |
To provide a cryopump/trap system capable of grasping and displaying the power consumption of each cryopump/trap, and a vacuum treatment device comprising the system.As the flow rate of a helium gas supplied from a compressor to each cry...
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JP2011163150A |
To provide a hydrogen gas exhaust method capable of improving hydrogen gas exhausting efficiency, and a vacuum pump device.In this vacuum pump device S, a main pump 10, a second booster pump 27, and a first booster pump 55 are serially c...
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JP4755374B2 |
A membrane pump (104) with an operating membrane (1) delimiting a conveying space (2), and a supplemental membrane (3) arranged on the side of the operating membrane (1) facing away from the conveying space (2), with a membrane interspac...
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JP4751405B2 |
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JP4751377B2 |
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