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JP5279582B2 |
To provide a negative pressure pump enabling the water intruded therein to be easily discharged. A plurality of final discharge ports 81L, 81R for discharging air to the outside are provided to a negative pressure pump 10. When the negat...
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JP5280545B2 |
A dry vacuum pump is provided with pump chambers (10A - 10E) through which gas passes, an oil chamber (20) which is provided adjacent to the pump chamber (10E) and in which oil is present, rotating shafts (30) which penetrate through the...
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JP5260047B2 |
To solve a problem that approximately 53% of machine efficiency is a limit since one piston is made corresponding to one compression chamber in a publicly known oil free compressor. The swing type oil free compressor has similar function...
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JP5254993B2 |
A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid ...
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JP2013148063A |
To provide a negative pressure pump capable of canceling any resonance sound with a cover body.Holes 75 are formed in a flange part 73 of a cover body 70, and collars 76 are inserted in these holes 75. A metal ring 30 is abutted on the f...
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JP5253770B2 |
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JP5242916B2 |
A vacuum pumping system comprises a first gas supply for supplying a first gas, such as xenon, to a vacuum chamber. A pump receives the gas output from the chamber. A second gas supply supplies a purge gas, such as nitrogen or helium, fo...
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JP5226457B2 |
An air stream (100) is compressed in multiple stages (3a, 3b, 3c) using refrigeration derived from a refrigerant (166, 168) comprising natural gas for inter-stage cooling (4b, 4c). The possibility of natural gas leaking into the air stre...
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JP5226878B2 |
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JP2013124659A |
To provide a vacuum exhauster having high exhaust capacity and performing vacuuming to a high-vacuum state at an expected level while maintaining a state that impurities do not enter a sealed body connected to a vacuum chamber by using a...
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JP5207417B2 |
Provided are a vacuum pumping device, a vacuum processing device, and a vacuum pumping method capable of preventing accumulation of ozone in a cryopump. A vacuum processing device (1) pertaining to an embodiment of the invention is equip...
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JP5196226B2 |
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JP2013090469A |
To inexpensively provide a canned motor capable of sufficiently cooling a core of a stator and a coil end with a simple constitution.A canned motor 1 according to the present invention has: a casing 2; a can 5 with an airtight structure ...
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JP5193762B2 |
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JP5193786B2 |
A cryopump includes a second-stage cryopanel, a radiation shield that surrounds the second-stage cryopanel and has a shield opening, and a first-stage cryopanel provided in the shield opening. The first-stage cryopanel includes a first p...
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JP5187717B2 |
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JP5184995B2 |
A cryopump includes a radiation shield provided with a main inlet at one end thereof and a sub-inlet in a side thereof; and a cryopanel assembly cooled to a temperature lower than that of the radiation shield. The cryopanel assembly incl...
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JP2013060853A |
To provide a vacuum processing device and a vacuum processing method capable of preventing the deterioration of a device operation rate caused by the regeneration of a vacuum pump.In this vacuum processing device or this vacuum processin...
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JPWO2011052675A1 |
This pump unit controls the pump mechanism unit (21,31,41), the motor unit (22,32,42), the inverter unit (23), the inverter unit (23), and the motor unit (22). , 32, 42) includes a control unit (24) for monitoring the power value and a s...
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JP5160054B2 |
A vacuum pumping system and method in conjunction with a sputter reactor having a vacuum-pumped magnetron chamber sealed to the target backing plate. A main sputter chamber is vacuum sealed to the target front and cryo pumped. A bypass c...
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JP5150685B2 |
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JP5142960B2 |
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JP5139244B2 |
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JP2013501880A |
A vacuum pump system comprises two vacuum pumps which are connected to each other. In order to create vacuum pump system of a more compact size, the connection between the two vacuum pumps is performed via connection elements directly at...
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JP5123103B2 |
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JP5114059B2 |
The present invention provides a pumping system (60) comprising: a pumping mechanism (64); a motor (51) for driving the pumping mechanism; a drive control (50) for controlling the motor; and means (52) for monitoring at least one state w...
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JP5114602B1 |
To provide a decompression device and a decompression method in which the power required for decompression is reduced. A decompression device 50 is connected to decompression tanks 13a and 13b capable of storing a low salt concentration ...
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JP5107594B2 |
The seal, for a piston vacuum pump, is a ring-shaped and L-shaped component (25) with a three-legged cross section. One leg (28) is a holder section at the piston. A second leg (26) is the seal with a maximum diameter (D) and the third l...
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JP2012251501A |
To constitute a vacuum pump for inhibiting the intake of outer air into a driving chamber when a piston is actuated in an air exhausting direction.An exhaust path E, to which air is fed from a negative pressure chamber A when the piston ...
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JP5104288B2 |
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JP5101141B2 |
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JP5103229B2 |
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JP5104364B2 |
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JP5102068B2 |
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JP5104334B2 |
A condensation sensor is provided within a power supply device that is provided integratedly with a vacuum pump main unit. When the condensation sensor detects condensation within the power supply device, a CPU closes a cooling water val...
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JP5099573B1 |
To configure a vacuum pump system for reducing electric power when operating a plurality of vacuum devices. A plurality of primary side vacuum pumps are installed in parallel on a lower floor surface of a frame body, and each intake port...
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JP5095825B2 |
A gas adsorption medium and an adsorption pump apparatus having the same are provided. The gas adsorption medium includes a multi-layered structure of which the layers formed of a material are spaced apart from each other, wherein an ion...
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JP5090200B2 |
A cryopanel used for a cryopump, the cryopump including a vacuum chamber having a gas flow-in opening; a stage provided in the vacuum chamber; and a cryocooler configured to cool the stage, the cryopump being configured to solidify or ab...
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JP5088814B2 |
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JP5088767B2 |
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JP5084593B2 |
To provide a vacuum preservation device to be positioned in a vessel and to stand itself on a predetermined decompressive position to decompress easily rapidly the inside of the vessel. The vacuum preservation device comprises: a vacuum ...
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JP5086771B2 |
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JP5084794B2 |
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JP5075521B2 |
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JP2012225337A |
To provide a non-evaporating type getter pump that facilitates heating without a current introduction terminal for a heating electric power to be supplied into a container from outside.The non-evaporating type getter pump includes: the c...
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JP2012527559A |
The invention relates to a positive displacement pump, constructed in microsystem technology, which is preferably used as a vacuum pump.
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JP5065899B2 |
A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stag...
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JP5069964B2 |
A reciprocating pressure intensifier that compresses compression-targeted fluid into 20MPa to 400MPa by reciprocation of a piston plunger 3. In the reciprocating pressure intensifier, lubricating oil for axial sealing is injected by a lu...
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JP5068477B2 |
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JP5064832B2 |
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