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Patent Searching and Data


Title:
GETTER DEVICE FOR FIELD-EMISSION TYPE DEVICE
Document Type and Number:
Japanese Patent JPH11213920
Kind Code:
A
Abstract:

To increase the degree of vacuum of a field-emission type device.

A vacuum container comprises a cathode-side substrate 2 having field-emission elements formed thereon an anode-side substrate 1 disposed at a fixed distance therefrom in the direction of electron emission, and a getter chamber 3 having a hole communicating with an exhaust pipe. An evaporation- type getter 4 and a getter substrate 10 confronting the evaporation-type getter 4 are housed in a suspended state in the getter chamber 3, and a getter mirror surface 10 m is formed on a surface of the getter substrate 10 by heating the evaporation-type getter 4. Accordingly, even if high-temperature baking is conducted, temperature rise of the getter mirror surface is decreased and an adsorbing function of residual gas by the getter mirror is not deteriorated.


Inventors:
TONEGAWA TAKESHI
TANAKA GENTARO
UCHIDA YUJI
KOGURE YUICHI
Application Number:
JP1437498A
Publication Date:
August 06, 1999
Filing Date:
January 27, 1998
Export Citation:
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Assignee:
FUTABA DENSHI KOGYO KK
International Classes:
H01J31/12; H01J7/18; H01J29/94; (IPC1-7): H01J31/12
Attorney, Agent or Firm:
Atsuo Waki (2 people outside)