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Title:
熱処理装置、熱処理方法および基板処理装置
Document Type and Number:
Japanese Patent JP4137750
Kind Code:
B2
Abstract:
In a thermal processing unit, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.

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Inventors:
Fukumoto Yasuhiro
Masuhiro Masuda
Toru Azuma
Application Number:
JP2003325113A
Publication Date:
August 20, 2008
Filing Date:
September 17, 2003
Export Citation:
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Assignee:
Sokudo corporation
International Classes:
H01L21/027; H01L21/677; F27B17/00; F27D3/00; F27D5/00; F27D11/00; H01L21/00; H01L21/68
Domestic Patent References:
JP2003068726A
JP2003086651A
JP4278561A
JP11008175A
JP2001230201A
JP1022189A
Attorney, Agent or Firm:
Yoshito Fukushima



 
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