マイクロ波プラズマトーチ装置 - Mitsubishi Electric Corporation

Title:

マイクロ波プラズマトーチ装置

Document Type and Number:

Japanese Patent JP4127660

Kind Code:

B2

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Inventors:

Yasutaka Inaei
Kiyohiko Yoshida
Hiroyuki Asano
Koji Ota
Masaki Kuzumoto

Application Number:

JP2003091470A

Publication Date:

July 30, 2008

Filing Date:

March 28, 2003

Export Citation:

Assignee:

Mitsubishi Electric Corporation

International Classes:

H05H1/30; B01J19/08; F27D11/08; F27D11/12

Domestic Patent References:

Attorney, Agent or Firm:

Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order

Previous Patent: JPH04127659

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