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Title:
NON-VOLATILE SEMICONDUCTOR MEMORY
Document Type and Number:
Japanese Patent JPH06334194
Kind Code:
A
Abstract:

PURPOSE: To make it possible to erase data electrically and selectively with ease by using non-volatile semiconductor memory in simple structure equivalent to an ultraviolet erasing method.

CONSTITUTION: A memory cell forms an N+ type source layer on the surface of a P type semiconductor substrate 1 where a first gate insulation film 4 is formed over these areas. A floating type gate electrode 5 is formed on the gate insulation film 4 and extends to a field oxide film 12. A first control gate 71 and a second control gate 72 are formed independently on the floating type gate electrode 5 on the field oxide film 12 by way of a second gate insulation film 41. During writing data, a tunnel current flows by way of a capacity coupling part 'a' where electrons are implanted into the floating gate electrode 5. During erasing data, the tunnel current flows in a capacity coupling part 'b' where the electrons captured in the floating gate electrode 5 are discharged to a first control gate electrode 71.


Inventors:
ENOMOTO YOSHINARI
Application Number:
JP12223493A
Publication Date:
December 02, 1994
Filing Date:
May 25, 1993
Export Citation:
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Assignee:
FUJI ELECTRIC CO LTD
International Classes:
H01L21/8247; H01L27/115; H01L29/788; H01L29/792; (IPC1-7): H01L29/788; H01L29/792; H01L27/115
Attorney, Agent or Firm:
Minoru Yamada