Title:
TREATMENT DEVICE
Document Type and Number:
Japanese Patent JPH06132210
Kind Code:
A
Abstract:
PURPOSE: To provide a treatment device preventing an air flow sensor from being contaminated by treatment liquid mist for strictly controlling the flow velocity or flow rate of air flowing near the upper surface of a body to be treated.
CONSTITUTION: A sensor 40 for detecting the amount of exhaust is laid out on the upstream side of an exhaust system and at a region where no treatment liquid scatters, for example, near an intake port 39 provided at the base of the bottom part of a cup 33. A butterfly valve 37 which is provided in an exhaust pipe 36 is controlled by a controller 38 driven by the detection signal which is transferred from the sensor 40.
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Inventors:
FUJIMOTO AKIHIRO
INADA HIROICHI
INADA HIROICHI
Application Number:
JP30663192A
Publication Date:
May 13, 1994
Filing Date:
October 20, 1992
Export Citation:
Assignee:
TOKYO ELECTRON LTD
TEL KYUSHU KK
TEL KYUSHU KK
International Classes:
H01L21/306; H01L21/027; (IPC1-7): H01L21/027
Attorney, Agent or Firm:
Kikuhiko Nakamoto