CHARGED PARTICLE BEAM DEVICE

WIPO Patent Application WO/2014/192379

A1

An objective of the present invention is the provision of a charged particle beam device such that the effect of an external electromagnetic wave is inhibited even when an isolating member such as a vacuum valve is in the open state. In order to achieve the objective, proposed is a charged particle beam device provided with a vacuum chamber (111), wherein the vacuum chamber has an opening (104) surrounding a sample delivery path and is equipped with a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmospheric side. The present invention can prevent an electromagnetic wave (117) from reaching the sample chamber through the delivery path.

JPH06310070	SCANNING ELECTRON MICROSCOPE AND SIMILAR DEVICE THEREOF
JP2001143999	CHARGED PARTICLE BEAM TRANSFERRING APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME
JPS5995627	[Title of the device] The plastic surgery iris diaphragm for charged particle beam devices

FUJITA MASASHI (JP)
TSUNODA MASAHIRO (JP)
ONUKI KATSUNORI (JP)
AIBARA KATSUYA (JP)
SHINDO SEIICHI (JP)
NISHIMORI TAKAAKI (JP)

PCT/JP2014/057435

December 04, 2014

March 19, 2014

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HITACHI HIGH TECH CORP (JP)

H01J37/09; H01J37/16; H01J37/20; H01L21/677; H05K9/00

WO2012008123A1

2012-01-19

JP2006287181A	2006-10-19
JPH11186779A	1999-07-09
JP2012074457A	2012-04-12
JP2004039981A	2004-02-05
JP2006351622A	2006-12-28
JP2008277675A	2008-11-13

INOUE Manabu et al. (JP)
Manabu Inoue (JP)

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