Title:
COMPENSATION METHOD AND COMPENSATION SYSTEM FOR EXPOSURE ALIGNMENT
Document Type and Number:
WIPO Patent Application WO/2022/205740
Kind Code:
A1
Abstract:
A compensation method and compensation system for exposure alignment. The compensation method comprises: acquiring original data of an alignment pattern; performing first-order processing on the original data to obtain first-order derivation data; when there is a deviation in the exposure alignment, obtaining a compensation value on the basis of the original data and the first-order derivation data; and compensating exposure alignment on the basis of the compensation value. According to the compensation method for exposure alignment of the present application, the first-order derivation data is obtained by performing first-order processing on the original data, then the compensation value is obtained on the basis of the original data and the first-order derivation data to compensate exposure alignment, so that the compensation precision is high, and the accuracy of exposure alignment can be optimized.
More Like This:
Inventors:
ZHANG SHENG'AN (CN)
ZHAO LEI (CN)
ZHAO LEI (CN)
Application Number:
PCT/CN2021/112707
Publication Date:
October 06, 2022
Filing Date:
August 16, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G03F9/00
Foreign References:
| CN113093485A | 2021-07-09 | |||
| CN112020677A | 2020-12-01 | |||
| US20080295061A1 | 2008-11-27 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
Download PDF: