DEVICE MANUFACTURING APPARATUS CONNECTING APPARATUS AND CONNECTING METHOD, PROGRAM, DEVICE MANUFACTURING SYSTEM, EXPOSING APPARATUS, EXPOSING METHOD, DETERMINING/TESTING APPARATUS AND DETERMINING/TESTING METHOD

Title:

Document Type and Number:

WIPO Patent Application WO/2007/049704

Kind Code:

A1

Abstract:

A communication server (20) connects device manufacturing apparatuses such as an exposing apparatus (13) and various testing apparatuses (14a,14b,16). The communication server (20) comprises a file format converting part (53a) that converts the formats of data transmitted/received between the device manufacturing apparatuses; a communication message converting part (53b) that converts communication messages; and a communication protocol converting part (53c) that converts communication protocols. The communication server (20) receives information transmitted from a transmission source in compliance with the transmission source that is a device manufacturing apparatus, and the communication server (20) then transmits the received information to a transmission destination in compliance with the transmission destination that is another device manufacturing apparatus.

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Inventors:

OKITA SHINICHI (JP)

Application Number:

PCT/JP2006/321383

Publication Date:

May 03, 2007

Filing Date:

October 26, 2006

Export Citation:

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Assignee:

NIKON CORP (JP)
OKITA SHINICHI (JP)

International Classes:

H01L21/02; H01L21/027

Foreign References:

JPH07302826A	1995-11-14
JP2005520324A	2005-07-07
JP2005033013A	2005-02-03
JPH0520332A	1993-01-29

Attorney, Agent or Firm:

SHIGA, Masatake et al. (Yaesu Chuo-k, Tokyo 53, JP)

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