To provide a substrate conveyor which prevents a substrate from being not surely conveyed due to shape distortion of a driving roller made of a synthetic resin even if the driving roller expands by a thermal influence.
A roller unit 66 for conveying the substrate includes: a first attaching disk 57 having an outer surface connected to the end part of a driving shaft 19; a driving roller which is formed in a ring shape by the synthetic resin and has a plurality of through-holes 61 formed in the peripheral part thereof at prescribed intervals in a peripheral direction and supports a substrate with the outer peripheral surface; a second attaching disk 62 holding the driving roller together with the first attaching disk; a plurality of cylindrical shafts 64 each of which has an outer diameter smaller than the inner diameter of the through-hole and is to be inserted into the through-holes when holding the driving roller with the first and second attaching disks; and a screw shaft 65 for connecting and fixing the first and second attaching disks holding the driving roller. When the driving roller expands in a radial direction by heat, deformation of the driving roller is prevented by the difference between the inner diameter of through-holes and the outer diameter of cylinder shafts.
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto