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JP4753947B2 |
A system is disclosed for detecting a non-linear coherent field induced in a sample volume. The system includes a first source for generating a first electromagnetic field at a first frequency, a second source for generating a second ele...
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JP4753063B2 |
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JP4745292B2 |
A radiation distribution measurement system (10') for measuring a phase distribution of a beam of radiation and/or a pupil distribution of a projection system (PS) includes a transparent carrier plate (20), a grating and/or a pinhole (70...
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JP4731951B2 |
Disclosed is a method of analyzing an interference fringe, with which method the optical characteristics of an optical system to be examined can be analyzed very precisely. In one preferred form of the invention, the analyzing method inc...
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JP4734502B2 |
An optical measuring system, including at least one radiation source; a first beam splitter; a second beam splitter; an OCT detector; a wavefront detector which is different from the OCT detector; at least one active optical element; and...
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JP2011141136A |
To provide an inspection apparatus which can measure film thickness on a board.The surface inspection apparatus 1 includes: a stage 10 for supporting a wafer W having a thin film on its surface; an illumination system 20 for applying ill...
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JP4729733B2 |
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JP4728027B2 |
A radiation measurement device for determining a wavelength-related characteristic of radiation from a radiation source is provided. The device includes a wavelength-dependent optical element (e.g., bandpass filter), and an optical power...
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JP4722110B2 |
A real-time wavelength calibration scheme for a swept laser generates an electrical signal from a swept optical output of the swept laser that is cyclical with respect to the wavelength of the swept optical output over a defined range of...
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JP4717308B2 |
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JP4718557B2 |
An optical device under test (DUT) is interferometrically measured. The DUT can include one or more of an optical fiber, an optical component, or an optical system. First interference pattern data for the DUT is obtained for a first path...
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JP4699640B2 |
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JP2011112358A |
To provide an interferometer, an aberration measurement method, and an aberration measuring system capable of accurately measuring aberration of an optical element.A two-beam interferometer 100A includes a half-wave plate 104 disposed at...
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JP2011107065A |
To provide an optical pulse measuring device which accurately evaluate a time width and coherence time of an optical pulse independently without missing such features that a wavelength of the optical pulse is not limited and time charact...
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JP4693097B2 |
The apparatus (40), to measure the wavelength of light, has a measurement section (42) for a reference wavelength. It has interference strips giving reference wavelengths (delta 1,delta 2) through differences in the optical light paths. ...
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JP4688866B2 |
The present invention relates to a method and a system for synthesizing a prescribed three-dimensional electromagnetic field based on generalized phase contrast imaging. Such a method and apparatus may be utilized in advanced optical mic...
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JP2011082749A |
To provide a wavelength monitor device that needs no temperature sensor or temperature control circuit for calibrating a reference-value of a drive signal with respect to a variable wavelength filter, while preventing temporal deteriorat...
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JP4668423B2 |
A process for operation of a laser device (1) is described, whereby circulating light pulses each comprising spectral components according to a plurality of longitudinal modes of a resonator configuration (3) are generated in the resonat...
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JP4667957B2 |
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JP4667965B2 |
This invention provides a light beam measurement device which can conduct wave surface measurement of light beam with low interferentiable feature, and which easily enables the adjustment of the parts of optical system or the provision o...
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JP4667728B2 |
A swept wavelength meter provides a real-time wavelength calibration scheme for a swept laser. The calibration scheme generates an electrical signal from a swept optical output of the swept laser that is cyclical with respect to the wave...
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JP4668204B2 |
Wavefront measuring systems and methods are disclosed which may be employed, for example, in detecting phase aberrations in a spectacle lens and in an eye. Various embodiments include disposing a modulation pattern in the path of a retur...
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JP4659019B2 |
In a wavefront sensor, an optical wavefront to be measured that has entered an entrance pupil P is split into a first optical path L1 and a second optical path L2 by a semi-transparent mirror 3. A wavefront W1 traveling in the first opti...
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JP4660047B2 |
A wavefront aberration of an eye is determined, e.g., in real time. The eye is illuminated, and the light reflected from the retina is converted into spots with a device such as a Hartmann-Shack detector. The displacement of each spot fr...
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JP2011058810A |
To achieve a high resolution by high-precision interference, while miniaturizing an interferometer and a spectroscope compact, by adopting a structure enabling connection of rigid bodies 33 and 34 and leaf springs 31 and 32 without using...
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JP4656791B2 |
Wavefront aberrations in an eye are detected by illuminating the retina, receiving the light reflected by the retina and using a Hartmann-Shack detector (112) or the like to detect the aberrations. The illuminating light (102) is applied...
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JP2011053150A |
To provide a wavefront measuring method and a wavefront measuring device which can measure a wavefront of light properly with a simple constitution.This device includes an SLM (Spatial light modulator) 2 for imparting modulation at rando...
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JP2011053142A |
To provide a wavelength detecting device, pressure detecting device, vibration isolator, and an exposure system, which can improve detection precision of a wavelength change.There are provided an optical part which separates the light em...
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JP4654349B2 |
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JP4647867B2 |
A Shack-Hartmann wavefront sensor having an aperture which is smaller than the size of an object being measured is used to measure the wavefront for the entire object. The wavefront sensor and the object are translated relative to one an...
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JP2011038984A |
To provide a phase connection method of two-dimensional phase data that can perform phase connection in a relatively short time with high noise immunity, and to provide an interference measuring apparatus using such a method.The phase co...
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JP4633103B2 |
A method and an apparatus for optical frequency measurement, using one or two frequency-stabilized mode-locked laser combs operating at different repetition rates to mix with a laser under measurement (LLTM) respectively so as to generat...
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JP4627549B2 |
An optical nonlinear evaluation device (1) capable of accurately evaluating the optical nonlinearity of a Kerr medium in accordance with a phase difference caused by cross-phase modulation generated in the Kerr medium includes: a polariz...
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JP2011022589A |
To provide a laser system using an ultrashort laser pulse.The system includes a laser, pulse shaper and detection device. The system employs a femtosecond laser and a spectrometer. Still the system uses a laser beam pulse, a pulse shaper...
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JP4620701B2 |
A method of absolute optical frequency measurement is realized by using mode-locked laser frequency combs to measure the optical frequency of an unknown laser. By varying the repetition frequency, the relative frequency location of the u...
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JP4614903B2 |
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JP2011007802A |
To provide an optical frequency measurement system for achieving high speed and high resolution measurement of an optical frequency.A laser beam is modulated by an optical frequency comb generator 43 and the frequency of the laser beam i...
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JP4608528B2 |
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JP4613110B2 |
To provide an optical interference type phase sensing device capable of detecting a phase with high-stability and high-precision, by using two reference light in addition to measurement light and then detecting variation in a phase cause...
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JP4604878B2 |
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JP4604879B2 |
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JP4607312B2 |
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JP4592969B2 |
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JP4589620B2 |
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JP4590124B2 |
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JP4590181B2 |
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JP2010258433A |
To provide an inexpensive wavelength variation detection apparatus for laser beam constituted in simplified structure for detecting wavelength variation of a laser beam.The apparatus for detecting wavelength variation of a laser beam inc...
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JP4579232B2 |
A modulated optical radiation field (I) whose modulation amplitude and temporal phase depend on the local position can be detected with a plurality of pixels 1. Each pixel 1 consists of a transducing stage (T) that converts incoming ligh...
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JP2010249837A |
To acquire a whole-region optical measured value of a surface, such as, the surface of a flat panel, a wafer, and the patterned surface of a substrate.A surface 130 to be measured is irradiated with an optical probe beam 112 having a uni...
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JP2010243158A |
To measure a passing wave front of an optical system of an artificial-satellite-carried geo observation optical sensor, by making the environmental condition be the same as that in observation of the earth. A non-interference-system wave...
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