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JP5729883B2 |
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JP5728474B2 |
A new metric applicable to the characterization and design of multimode fiber (MMF) is described. The metric is derived from a Differential Mode Delay (DMD) measurement and when used in combination with industry-standard metrics such as ...
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JP5725681B1 |
To realize an interferometer and a phase shift amount measuring device which operate well in the EUV region. An interferometer of the present invention has an illumination source (1) that generates an illumination beam, an illumination s...
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JPWO2013099468A1 |
When trying to detect minute defects, it is desirable that the width of the above-mentioned illumination region in the short axis direction is short. In the prior art, an illuminated area is formed by focusing light in some way, but it i...
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JP5689879B2 |
A Shack Hartmann (SH) wavefront sensor comprising an optical device, such as a wave front dissector including a lenslet array, for transmitting, dissecting and focusing an incoming optical wave, an optical system, including, for example,...
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JP2015055544A |
To provide a wavefront measurement instrument which is capable of wavefront measurement of an optical element having large wavefront aberrations, has high accuracy, and is low-cost.The wavefront measurement instrument measures a transmit...
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JP5681060B2 |
An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency ...
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JP5667007B2 |
An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency ...
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JP5669206B2 |
To provide a method for detecting wavelength spectrum for providing a compact and portable device using a PD whose installation site is unrestricted.In the method for detecting a waveform spectrum φ(λ) of any light, a photodiode is con...
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JP5660514B1 |
To provide a phase shift amount measuring device and a measuring method capable of measuring a phase shift amount and a transmittance of a phase shift mask by one measuring step by using a monitor pattern having a finer size than the con...
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JP2015010834A |
To provide, while being provided with equivalent performance to a spectrometer, a method and device for estimating the wavelength of a luminous body with high throughput.There are provided a method and device for estimating an estimated ...
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JP5642411B2 |
A wavefront is measured with superior precision even if the density of scatterers in the vicinity of a focal plane is low. Provided is a wavefront measurement method including a contrast measuring step of measuring the contrast of an int...
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JP5637358B2 |
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JP5617066B2 |
It detects the relative phase of two measured signals using two reference signals. The relative phase detector 1 comprises reference signal generator 11, beat signal processor 12 and detecting element 13. As for reference signal generato...
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JP5613627B2 |
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JP5606929B2 |
A tunable laser wavelength measurement system includes an interferometric wavelength tracking system that uses a combination of interferometric and wavelength reference measurements to directly measure the laser output wavelength, The me...
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JP5595463B2 |
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JP2014160894A |
To provide a wavelength monitoring device for optical wavelength multiplex communication and an optical wavelength multiplex communication device that make it possible to use a light receiving element which is inexpensive and easy to inc...
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JP2014157140A |
To provide a spectroscopic device, a spectroscopy method, a monitoring device for an OWDM and an OWDM device that enable separation of a signal component and a noise component with accuracy higher than before, and enable spectral separat...
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JP5572067B2 |
A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of a plurality of wavelength scanning ranges...
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JP5571621B2 |
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JP5567246B2 |
An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency ...
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JP5563439B2 |
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JP5558768B2 |
A wavelength shift measuring apparatus of the present invention is a wavelength shift detector (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the l...
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JP5554234B2 |
The invention relates to a method of estimating at least one deformation of the wave front of an observation system or of an object observed by said observation system, characterized in that: at least one diversity image is acquired, in ...
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JP5553860B2 |
A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a firs...
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JP5538936B2 |
An analyzing method for deriving phase information by analyzing a periodic pattern of moiré comprises steps of: subjecting at least a part of the periodic pattern of moiré to a windowed Fourier transform by a window function; calculati...
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JP5537629B2 |
A method and apparatus for wavefront analysis including obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, obtaining a plurality of in...
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JP5528258B2 |
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JP5511162B2 |
When the distance from the body of an interferometer to an object (110) or a displacement is interferometrically measured by using laser beams of a plurality of wavelengths, obtaining interference measurement values that are measured at ...
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JPWO2012073346A1 |
It is an object of the present invention to provide a light receiving module for a semiconductor light emitting element and an inspection device for a semiconductor light emitting element capable of accurately calculating the amount of l...
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JP5470320B2 |
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JP5459067B2 |
The wavelength control device comprises a first Mach-Zehnder filter which receives a first optical signal and outputs an optical signal having a predetermined wavelength, a second Mach-Zehnder filter which receives a second optical signa...
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JP5451267B2 |
The invention relates to an instantaneous phase shifting Fizeau interferometer using phase analysis with orthogonally polarized reference and measurement beams. The interferometer comprises a light source, adapted to generate a coherent ...
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JP5451979B2 |
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JPWO2012056776A1 |
In the coarse adjustment process before spectroscopic measurement, the moving mirror is moved (# 11), and the output of each dividing element when the interference light between the reflected light from the moving mirror and the reflecte...
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JP5442122B2 |
Provided is a measurement method or apparatus that can reduce the time for measuring the shape of an entire test surface. Each of a plurality of measurement ranges is set so that one measurement range overlaps a portion of at least anoth...
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JP5420130B2 |
An arrangement for microlithography includes a projection objective having a plurality of optical elements; an aberration control circuit controlling imaging properties of the projection objective; and at least one operating element asso...
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JP5417810B2 |
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JP5411216B2 |
An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency ...
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JP2014021053A |
To provide a wavefront measuring device capable of easily measuring a wavefront in a short time.A wavefront measuring device for measuring a transmission wavefront of an optical element or its reflection wavefront comprises: a sensor tha...
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JP5398251B2 |
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JP5401031B2 |
To monitor light pulses from a light source, such as a laser, sense signals are provided to a photosensing component or array, causing photosensing during a series of one or more sense periods for the light pulse. Each light pulse can be...
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JP5387243B2 |
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JP5371591B2 |
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JP5371933B2 |
To accurately measure a coherence time of laser beam having a narrow spectral line width (long coherence time). When a coherence function γ(τ) of the laser beam to be measured, which is the function of a delay time τ, is measured, an ...
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JP5364203B2 |
Provided is an observation device which can obtain a phase image of a moving object rapidly with high sensitivity even when using a photodetector having a slow read-out speed per pixel. The observation device 1 comprises a light source 1...
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JP5366139B2 |
To provide wide-band measurement which is not limited by the response time of a photodiode, a method which eliminates complicated control for an interferometer, a method for removing the intensity component of an optical signal under mea...
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JP2013246016A |
To measure the shape of a wavefront with accuracy which is not varied at all the time, through simple signal processing.A wavefront measuring device comprises an image input section 1, a spot detection section 2, a linear component remov...
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JP5357393B2 |
An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rat...
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