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JP4819276B2 |
The plant (1) has a wall arrangement (2), which defines a heatable inner chamber (3). Parallel heater tubes (4) are arranged in the inner chamber, to guide one or more fluids to be heated. Burners (6) are arranged transverse to the heate...
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JP2011220649A |
To provide a heating apparatus which has a simple structure, is easily handled, can heat an entire heated subject equally without unevenness and is also excellent in heating efficiency.The heating apparatus 10 includes a cylindrical stor...
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JP4808471B2 |
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JP4778611B2 |
An indirect heating device using fossil fuel has a parallelepiped shaped radiant cassette. The cassette has a rectangular cross section with a height/length ratio ≥ 1.5. An Independent claim is included for: a furnace through which art...
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JP4765169B2 |
The single substrate thermal processing apparatus ( 2 ) includes a process chamber ( 5 ) arranged to accommodate a target substrate (W) and provided with a showerhead ( 10 ) disposed on its ceiling. A support member ( 28 ) is disposed to...
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JP4753433B2 |
A heater assembly for an ALD or CVD reactor provides protection for an electrical conductor associated with a heating element by using a purge gas to isolate the conductor from the corrosive environment of the reactor chamber. The purge ...
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JP4753294B2 |
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JP4750147B2 |
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JPWO2009118863A1 |
INDUSTRIAL APPLICABILITY According to the present invention, even if the fastener for fixing the heat insulating layer is broken or otherwise inconvenient, the stopper for fixing the heat insulating layer can be easily replaced in a shor...
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JP4730520B2 |
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JP4719858B2 |
With reference to a device for heating a meltable material, such as plastic, upstream from equipment for further processing, such as casting or extrusion equipment, which device includes a conveyor channel for the material and a heating ...
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JP4695379B2 |
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JP4691349B2 |
To provide a reactor using a high temperature air combustion technology that can increase average heat flow velocity compared with a conventional one. The reactor is formed with a gas passage 11 allowing a combustion gas fluid to flow in...
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JP4685634B2 |
A furnace 10 according to the present invention includes a heating unit 1 and a furnace body 2 that can degrease an article 5, containing an organic substance, to be degreased by heating the article 5 with the heating unit 1. The furnace...
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JP4668358B2 |
To continuously carry out dry distillation without explosive combustion of combustible gas generated by a dry distillation object, to improve throughput by shorting the time required for one batch, and to evenly lower a temperature of a ...
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JP4667905B2 |
To provide an induction heating type dry distillation furnace having improved processing capability by continuously giving dry distillation processing to dry-distilled materials with no explosive combustion of flammable gas generated the...
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JP4662923B2 |
A one-piece or otherwise unitary annular shim member made from a perforated metallic material is used to maintain a space between stacked annular preforms during a manufacturing process, such as densification. The metallic material used ...
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JP4662922B2 |
A one-piece or otherwise unitary annular shim member made from a perforated metallic material is used to maintain a space between stacked annular preforms during a manufacturing process, such as densification. The metallic material used ...
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JP4658638B2 |
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JP4656785B2 |
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JP4641816B2 |
To improve processing capacity by shortening a time for one batch by continuously performing dry distillation processing without explosively burning a combustible gas generated from a dry-distilled material. In this induction heating typ...
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JP4642349B2 |
A vertical heat processing apparatus includes a process chamber ( 5 ) defining a process field (A 1 ) configured to accommodate a plurality of target substrates (W) supported at intervals in a vertical direction. The apparatus further in...
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JP2011021846A |
To provide a pressurizing and cooling treatment method capable of preventing generation of a defective product in view of the fact that when pressurizing or cooling gas supplied to a treated object after vacuum heating treatment has been...
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JP4622387B2 |
To provide a vacuum arc re-melting furnace capable of monitoring the quality of electric contact between a stub welded on a consumable electrode and an outer cylinder for conduction supplying current to the stub, when refining alloy by v...
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JP4623908B2 |
Infrared oven for heating a plurality of preforms and comprising: a conduit through which said preforms move, a flow of outside air that flows through said conduit from an intake mouth to an exhaust mouth under the action of a blower, a ...
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JP4618920B2 |
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JP2011012945A |
To provide a gas circulation method and device for an autoclave, which further improves heat propagation efficiency with respect to a forming material, and achieves power-saving operation.In the hot air circulation method for an autoclav...
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JP4595363B2 |
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JP2010266176A |
To prevent a heat treatment object from being cooled when it is transferred among heat treatment chambers, and to prevent the contamination of a transferring environment in a multi-chamber type heat treatment device. The multi-chamber ty...
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JP4573290B2 |
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JP4568089B2 |
A floating substrate reactor allows heat treatment of a series of semiconductor substrates, one by one. The heat treatment occurs while flowing gas suspends a substrate between two heated surfaces of the reactor. The two heated surfaces ...
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JP4560779B2 |
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JP2010531381A |
Disclosed herein are a carbonizing oven for processing pyroligneous liquor and a method for preparing pyroligneous liquor using the same. More specifically, the present invention provides a carbonizing oven which exhibits a high yield of...
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JP4547664B2 |
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JP4550098B2 |
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JP2010203738A |
To provide an end cap and a heat treatment furnace using the same capable of keeping a prescribed heat treatment atmosphere even if pressure in the heat treatment furnace is changed, and to provide the heat treatment furnace capable of p...
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JP4540953B2 |
This application discloses a substrate heating apparatus comprising a partition separating the inside of a load-lock chamber into two areas. An inside opening provided in the partition is closed by a partition valve, while the second are...
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JP4535754B2 |
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JP4524438B2 |
An appliance for the simultaneous tempering and processing of a plurality of process items with the aid of electromagnetic radiation. The appliance is a stack oven, the process items and the energy sources being arranged on one another i...
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JP4522569B2 |
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JP4519348B2 |
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JP4519302B2 |
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JP2010143964A |
To provide a carbonization apparatus which can prevent a distillation gas from leaking from a carbonization furnace by a simple structure. The carbonization apparatus has the carbonization furnace 21 to which a mixture is supplied, a con...
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JP4493881B2 |
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JP4493192B2 |
A reaction tube 2 comprises heaters 31 - 35, and temperature sensors Sin1 - Sin5, Sout1 - Sout5, and receives a wafer boat 23. A controller 100 estimates temperatures of wafers W and temperatures of the temperature sensors Sin1 - Sin5 in...
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JP4494773B2 |
An improved collar, interlocking arrangement, an electric furnace are provided. The improved arrangement includes an electrically insulating collar having a mounting flange and a passageway, an electrically conductive lead disposed at le...
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JP2010139217A |
To carry out improvement such that further efficient heating treatment can be carried out with respect to various types of heat reception objects on the assumption of adopting microwave heating. The heating equipment 10 includes an inner...
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JP2010139170A |
To provide a continuous heat treatment furnace for a hermetic seal preventing moisture from entering into a muffle of the continuous heat treatment furnace for the hermetic seal performing glass hermetic sealing. The continuous heat trea...
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JP4486885B2 |
A reactor chamber is positioned between a top array of LED heat lamps and a bottom array of LED heat lamps. The LED heat lamps forming the top and bottom arrays are individually or controllable in groups such that power output along each...
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JP2010132988A |
To provide a gas nitriding method which can manufacture a plurality of nitrided components of which the required qualities are greatly different from each other, in the same furnace with the same treatment, and to provide a gas nitriding...
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