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Patent Searching and Data


Matches 701 - 750 out of 1,874

Document Document Title
JP4173153B2  
JP4171074B2
A novel rapid thermal process (RTP) barrel reactor processes a larger batch of semiconductor substrates than was previously possible. The RTP barrel reactor is characterized by a short process cycle time in comparison to the same process...  
JP2008241194A
To provide a heating furnace having a heat reflecting plate usable at a high temperature and suppressing heat transfer along an external wall by heat conduction because a reflection factor falls greatly due to oxidation at the high tempe...  
JP2008241076A
To provide a heating method, an intermittent feed-type tunnel furnace and a batch furnace capable of keeping dispersion of a surface temperature of a treated object within a certain temperature difference in increasing the temperature of...  
JP4157215B2  
JP4158386B2
A thermal processing system (50) includes a cooling tube that covers a processing vessel (56) and heaters (100). The cooling tube has a tubular base member (110) and a cooling pipe (112) spirally wound around the tubular base member (110...  
JP4158905B2
To provide a high speed gas carburizing treatment device with an extremely simple structure where the amount of carburizing gas to be used can be saved, and cost can be reduced, and to provide a treatment method therefor. The gas carburi...  
JP4154787B2  
JP2008201670A
To provide a firing furnace having scarce maintenance burdens and enabling a degreasing process and a firing process which can produce a sintered compact of a specified quality, and a manufacturing method using the firing furnace.The fir...  
JP2008202961A
To suppress thinning of a heater and occurrence of spark, also prevent occurrence of cyanogen, and efficiently raise temperature.Body space that is surrounded by a furnace material and has the heater is shut off into a sample space and a...  
JP2008151371A
To provide a heat treatment device, and its method capable of preventing falling of dust onto a board, reducing electric power and improving product quality, with respect to the heat treatment device performing heat treatment onto a heat...  
JP2008138964A
To provide a sealing apparatus for a heating furnace with superior sealability and durability by a simple composition.The sealing apparatus for the heating furnace carrying out heat treatment of a material to be heat-treated mounted on a...  
JP4103997B2  
JP4103054B2
The invention relates to a method of brazing of aluminium parts in a furnace using a flux, which is carried out effectively without using a corrodible metallic muffle, wherein the furnace inner walls, made preferably of carbonaceous refr...  
JP2008119342A
To accurately melt an internal resin so as to be a target temperature and a uniform temperature by heating a whole capsule where the resin for molding a denture base and a dental crown is encapsulated.A heating furnace includes: a cylind...  
JP2008107050A
To provide a high-temperature heating furnace capable of uniformly heating a sample of a comparatively large area.In this high-temperature heating furnace 1 having a main heating chamber 2 for heating the flat plate-shaped sample placed ...  
JP2008107011A
To provide a burning furnace capable of efficiently and uniformly burning a treating object, and charging the treating object into a furnace main body without hardly decreasing the temperature in the furnace main body without installing ...  
JPWO2006016430A1
The present invention provides a firing furnace having excellent durability and thermal efficiency for a long period of time without significantly deteriorating the heat insulating performance of the heat insulating layer, preventing the...  
JPWO2006013651A1
An object of the present invention is to provide a firing furnace which is free from occurrence of warping and corrosion in a heat insulating layer, so that it becomes possible to eliminate the necessity of exchanging members forming the...  
JP4084412B2
A structure for use in a reactor for processing a substrate, the structure comprising:a susceptor having a first surface adapted for mounting a substrate thereon; a second surface; and a plurality of openings extending through said susce...  
JP4078612B2
To shorten the time for a dry distillation process and to save the supply volume of inactive gas by rapidly carrying on substitution of dry distillation gas with the inactive gas at finish of the dry distillation process. In the inductio...  
JP4077930B2
The tower furnace for heat treatment of metal strips (6) incorporates a muffle (3) which extends over the entire furnace height. An isolated plug (1) with an electric heating element (2) is inserted into the top section of the muffle, wh...  
JPWO2005122231A1
A shutter 20 that shields radiant heat from the high temperature region 32 to the low temperature region 30 is installed between the high temperature region and the low temperature region so as to be able to move forward and backward. Th...  
JP2008082644A
To actualize normal growth of an oxide film on an aluminum foil for electrolytic capacitor when annealed, without being influenced by the air.An aluminum foil coil 30 manufactured with cold rolling is stored in a main heating chamber 10 ...  
JP4067671B2  
JP4061466B2  
JP4060356B2
A substrate thermal conditioning apparatus with a chamber, a plate located in the chamber and a gas supply. The plate has a top heat transfer surface with grooves therealong. A substrate is placed on standoffs of the heat transfer surfac...  
JP4060737B2  
JP2008050645A
To provide a method for continuously heat-treating a metallic wire rod in which in the case of performing the continuous heat-treatment while running the metallic wire rod in a pipe, such problem as generating the surface flaw on the met...  
JP4058147B2  
JP4048242B2
To exhaust sublimed gas or the like by a small amount of air with high heat efficiency. An IR heater H which is a heating device is composed of a heat generation part 1 in which a resistance body is arranged between an insulation glass l...  
JP4045689B2
A thermal processing unit of the invention includes a substrate-holder which can support a plurality of substrates in such a manner that the plurality of substrates are arranged at a predetermined pitch, and a chamber vessel for housing ...  
JP2008024991A
To provide a vacuum heat treatment device where degassing time is short, and vacuum retainability is hard to be lowered.The vacuum heat treatment device 1 is provided with a rotary vessel 4 arranged in a vacuum and further having a stora...  
JP4041923B2
There is provided a method for brazing aluminium parts and/or aluminium alloy parts, wherein the brazing is carried out under an inert atmosphere in a brazing chamber (2), preferably an elongated chamber, composed wholly or partly of car...  
JP4039491B2
To provide: an apparatus for heat treatment in which heater replacement is safely and easily performed, and replacement cost is low; a furnace for heat treatment; an insulation material; and an exhaust duct in the heat treatment apparatu...  
JP4035416B2  
JP4036598B2
To provide a heat treatment apparatus enabling safe and easy work for heater replacement and having a reduced replacement cost. The heat treatment apparatus comprises a heat treatment furnace provided with a gas exhausting duct 22 above ...  
JP2008007829A
To provide a conveying device of a vacuum heat treatment furnace capable of conveying a work to be treated in/out of the vacuum heat treatment furnace by an in-furnace conveying device, omitting an elevating/lowering device on a lower pa...  
JP2008002274A
To provide an evacuation device capable of providing a heat treatment product for reducing a variation by maintaining the inside of a furnace body under predetermined pressure, even if the variation width of an ambient gas flow rate exha...  
JP2007333272A
To provide a heat treatment device capable of highly densely mounting articles to be heated and heating the articles, and a heat treatment system with the heat treatment device. The heat treatment system 1 comprises a transfer device 2 a...  
JP2007333277A
To provide a muffle furnace for manufacturing nuclear fuel, preventing release of a nuclear material inside the muffle even if the muffle, etc. should be broken; and a muffle breakage detecting device for the muffle furnace for manufactu...  
JP2007333218A
To provide a heating furnace for regenerative burners attaining uniformization of temperature in the furnace and a heating value equivalent to the case of using four regenerative burners even if reducing the number of installed regenerat...  
JP4028019B2
A dynamic and thermal mechanical analyzer incorporating a slide driven vertically in an air bearing guidance system with a large displacement capacity, very low friction and low mass. The position of the slide is measured by digitizing a...  
JP4022619B2  
JP2007315729A
To provide an evacuating device for a vacuum heat treating device capable of obtaining heat-treated articles of good quality with little dispersion by maintaining the interior of a furnace body to a predetermined pressure even when the f...  
JP4017276B2  
JP2007309540A
To provide a heating plate, a combined heating plate and a heating furnace comprising the same, capable of reducing a substantial weight per a sheet of heating plate, reducing use electric capacity, simplifying replacement/assembling of ...  
JP4015791B2  
JP4009908B2
To uniformly and quickly rise the temperature of a dry-distilled matter in a furnace, to shorten a dry distillation time and to improve the dry distillation quality. In this induction heating type pyrolysis furnace where a furnace body 3...  
JP2007295005A
To provide a furnace that achieves high-process performance while enhancing maintainability. The furnace has an apparatus for cooling a plurality of heating elements (12) that radiates thermal energy by using a source of air. The furnace...  

Matches 701 - 750 out of 1,874