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JP2023057047A |
To surely suck a substrate regardless of flatness of a sucked surface of a substrate.A substrate suction member 330 includes: a porous member 334 having a substrate suction surface 334a for sucking a substrate WF and a decompression part...
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JP7260322B2 |
To provide a polishing device which can prevent splash of a liquid including grinding sludge to a substrate to prevent contamination of the substrate, and to provide a polishing method.A polishing device includes: a holding stage 4 which...
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JP2023055160A |
To provide a cooling device of a diamond dresser which can suppress heat degradation and abrasion of a longitudinal diamond without reducing holding force of the longitudinal diamond.A cooling device of a diamond dresser comprises: a dre...
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JP2023055115A |
To effectively prevent short circuit by imparting high sealability to an electrical connection part between a controller and a switch.A grinder 1 comprises in a rear cover 4: a motor 6; a controller 9 which has a circuit board 86 and a c...
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JP7258440B2 |
To provide a processing waste liquid treatment apparatus which can reproduce an ion exchange resin without stopping operation of a processing device.A processing waste liquid treatment apparatus that treats a processing waste liquid disc...
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JP2023054962A |
To prevent a hand of a worker from being caught when closing a shutter provided in an opening of an external cover.A processing device comprises: a chuck table which can hold a workpiece; a processing unit which processes the workpiece h...
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JP7256644B2 |
A waste fluid treatment apparatus removing processing debris from a processing waste fluid discharged from a processing apparatus. The waste fluid treatment apparatus includes a fluid bath storing the processing waste fluid, an inflow po...
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JP7256605B2 |
To provide a grinding holder, a grinding tool and a grinding device continuously supplying grinding liquid to a grinding area without interruption and without needing a large-scale composition change in a flow channel of the grinding liq...
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JP7254136B2 |
Disclosed are an air circulation system and a final polishing apparatus including the same. The air circulation system improves the degree of contamination in a final polishing apparatus including a housing formed to accommodate a load u...
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JP2023047458A |
To supply grinding water only to an area where an abrasive wheel contacts with a workpiece to save water in creep feed grinding.A grinding device includes a grind water supply mechanism 7 having: multiple jet nozzles 75 which jet grindin...
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JP2023047614A |
To fill a grinding wheel with grinding water, and to thereby improve cooling effect of the grinding wheel, by suppressing consumption of the grinding water, in a grinding device for creep feed grinding.An external supply part 7 of a grin...
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JP2023047326A |
To provide a receptacle for a rotating tool.The invention relates to a receptacle. The receptacle includes a rotationally symmetrical, hollow cylindrical receptacle main body. A through-pipe, which is braced in particular in relation to ...
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JP2023047325A |
To provide a grinding disc receptacle.The invention relates to a grinding disc receptacle. The grinding disc receptacle has a rotationally symmetrical, hollow cylindrical receptacle main body. A through-pipe, which is braced in particula...
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JP2023046629A |
To increase a removal ratio of dust associated with polishing.Dust generated in a rear surface of a substrate due to polishing by a polishing tool 96 is pushed even to an outer peripheral side of the polishing tool 96 due to a centrifuga...
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JP7250716B2 |
The invention refers to a hand-held and hand-guided random orbital polishing or sanding power tool (1). The tool (1) comprises a static body (31), a motor (15), an eccentric element (17) driven by the motor (15) and performing a rotation...
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JP2023045378A |
To provide a slate polishing device capable of polishing a front layer of a wavy slate more accurately and also capable of suppressing scattering of dust generated in polishing.A polishing device includes: a brush member 22 that vertical...
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JP2023044257A |
To reduce a degree of transmission of heat from a motor to an inclination adjustment mechanism and a chuck table and reduce a used amount of processing water.A processing device includes: a holding unit which holds a workpiece; and a pro...
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JP7249063B2 |
The present invention provides a filtering apparatus for lens polishing wastewater and a system for reducing polishing wastewater, which efficiently remove fine particles such as lens particles and fine lens particles that are mixed into...
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JP2023043253A |
To efficiently clean a rod-like substrate at low cost.A rod-like substrate cleaning device 8 for cleaning a rod-like substrate comprises: a cleaning tank 146 that has, at an upper end thereof, an opening larger than a planar shape of a s...
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JP2023042060A |
To provide a processor capable of improving processing accuracy.In a processor 1, a machine body 3 drives at least one of a workpiece 103 and a tool 101 to process the workpiece 103 by the tool 101. A processing chamber 5 separates the w...
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JP7245493B2 |
To provide a polishing pad capable of efficiently performing a polishing work and a polishing device having the polishing pad.A polishing pad 10 is used for polishing an object W to be polished. The polishing pad includes: a base materia...
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JP2023512226A |
A method of slicing a plurality of wafers from a workpiece with a wire saw during a sequence of slicing operations, the sequence of slicing operations being subdivided into an initial cut followed by first and second cuts, the wire saw c...
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JP7245068B2 |
To provide waste liquid treatment equipment taking clean water from waste liquid, the liquid treatment equipment allowing for confirmation whether the clean water is appropriately taken from a water intake.The waste liquid treatment equi...
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JP2023039837A |
To provide a cutting method for a workpiece that is able to remove liquid from an imaging area of a workpiece during kerf checking and able to prevent adhesion of cutting chips to the workpiece.A cutting method includes: a cutting step o...
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JP7244650B2 |
A honing tool (1) is provided with: a grinding part (13); a tool main body (12) comprising a first region (121), a second region (122) with a window portion (122a) through which the grinding part (13) is inserted, and a third region (123...
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JP2023038865A |
To provide a cutting device which can prevent deposition of an end material on a bottom part of a draining tray with a simple structure without increasing costs.A cutting device 1 includes: a holding table which holds a workpiece; an X a...
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JP2023038068A |
To provide a grinding method of a workpiece which can suppress reduction of grinding liquid supplied to a contact interface between a plurality of grinding stones and the workpiece when performing creep field grinding with respect to the...
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JP2023038253A |
To provide a substrate processing apparatus capable of improving a through-put.A substrate processing apparatus comprises: a polishing part that polishes a substrate; a conveying part that conveys the substrate before the polishing to th...
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JP2023037140A |
To provide a technique for smoothly polishing a resin spectacle lens.A method for polishing a spectacle lens 20 includes the steps of: preparing a polishing pad 10 having a flocked polishing sheet having a flocked part and abrasive grain...
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JP2023037400A |
To prevent a binary fluid from scattering on a holding surface in a processing device having a function for jetting the binary fluid from a nozzle to clean the holding surface of a porous member.A processing device includes: a chuck tabl...
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JP2023037186A |
To suppress uneven wear and falling of brush bundles in segment brushes mounted on a rotary member.A rotary brush device includes a rotary member rotated in a state in which the rotary member is mounted with a plurality of segment brushe...
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JP2023036290A |
To reduce consumptions of grinding water, while appropriately performing cooling of frictional heat and washing-out of ground chips using the grinding water, in creep-feed grinding.A grinding device, which applies creep-feed grinding to ...
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JP7237275B1 |
[PROBLEMS] To provide an electric cutting machine with a dustproof cover in which a disk grinder and a dustproof cover are firmly connected. A disk grinder 3 having a spindle 1 rotationally driven by a built-in electric motor and a cylin...
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JP2023035431A |
To prevent dust from adhering to a suction disk of a holding mechanism arranged in a processing device, which suctions and holds a plate-like work-piece.A holding mechanism 24, which comprises a suction disk 245 having a suction port 240...
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JP2023034440A |
To provide a grinding device that can reduce consumptions of grinding fluid while suppressing poor processing from occurring.A grinding device, which grinds a work-piece, comprises: a chuck table having a holding surface for holding the ...
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JP7236361B2 |
To provide a grindstone cover device for an internal grinding machine that can prevent the grindstone from scattering due to breakage during setup change.A grindstone cover device 9 comprises: a spindle stock 2 that supports a spindle 3 ...
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JP2023031921A |
To provide a grinding device capable of reducing the consumption of a grounding liquid while suppressing the occurrence of a processing failure.A grinding device for grinding a workpiece includes a chuck table having a holding surface fo...
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JP2023031920A |
To easily and safely discharge residual water remaining in a cooling water passage without removing a pipeline of the cooking water passage.A processing device with a holding table, a processing unit and a movement mechanism, includes: a...
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JP2023030756A |
To provide a polishing device which can accurately measure a surface temperature of a substrate in a non-contact manner during polishing of the substrate.A polishing device includes: multiple window members 50A to 50E which are embedded ...
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JP7235454B2 |
To provide a technique by which a position of a cover end with respect to a housing can be held at each of plural positions.A grinder 4 comprises: a prime mover; a, power transmission device which is connected to the prime mover; a housi...
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JP2023028219A |
To provide a new cover member that can be replaced with a bellows-shape cover member in order to prevent processed wastes pinched resulting from expansion/retraction motion from breaking the bellows-shape cover member or the like.A proce...
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JP2023028133A |
To provide a processing device that can suppress cleaning of the inside of a processing chamber.A processing device 1 comprises: a chuck table 10 that holds a work-piece 200; a processing unit 20 that has a spindle 21 on which a polishin...
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JP2023027918A |
To suppress erroneous measurement of the thickness of a wafer.In a grinding apparatus 1 including a chuck table 2 for holding a wafer 8 on a holding surface 200, a grinding mechanism 3 for grinding the wafer 8 held on the holding surface...
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JP7232390B2 |
To provide a method for producing an R-T-B-based sintered magnet without requiring preparation of an inert atmosphere.There is provided a method for producing an R-T-B-based sintered magnet which comprises: a pulverization step S10 of pr...
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JP2023028360A |
To remove machining chips adhering to a holding surface of a chuck table and perform washing so that the machining chips do not adhere to the holding surface, without grinding the holding surface, in washing the holding surface.A grindin...
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JP7232136B2 |
To prevent a telescopic cover from accidentally stretching during wheel replacement work in a grinding device.A processing device 1 comprises a telescopic cover 4 which is connected onto a case 2 surrounding a table, surrounds a processi...
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JP2023026126A |
To propose a novel technique for preventing particles from sticking to a surface of a workpiece.A workpiece processing method uses a cutting device that comprises a holding table 20 for holding a workpiece, and a cutting unit 5 having a ...
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JP7228750B2 |
A disc changing system for a robotic defect repair system is presented. The system has a first abrasive disc and a second abrasive disc. The first and second abrasive discs are coupled to a liner. The system includes an abrasive disc pla...
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JP7227754B2 |
To prevent ground chips from adhering to an innermost segment grindstone when grinding a work-piece using a grinding wheel in which positions of segment grindstones are changed in a radial direction.A grinding device 1 comprises: a wheel...
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JP7223922B2 |
To provide an elastic buff annular body (elastic buff) which makes a rubber base material, a special fiber base material and a special leather base material to be polished of an elastic base material and is composed of the elastic base m...
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