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Patent Searching and Data


Matches 451 - 500 out of 1,585

Document Document Title
JP3833776B2
To provide a wide band ionization gauge capable of measurement in an ultrahigh vacuum area. In an ultrahigh vacuum area, desorption ion is removed from the ion generated within an ion generating part 10 by an energy filter part 20 to mak...  
JP2006153782A
To prevent the flow of a gas to be measured from being directly in contact with a thin film and protect the thin film from contaminants or the like in the gas, in a gas sensing device which provides the thin film, which is formed thermal...  
JP2006153860A
To easily measure the degree of vacuum in a sealed vessel, for example to recognize that the inside of the sealed vessel is kept at a predetermined degree of vacuum, even when the inside of the sealed vessel is under rough vacuum of whic...  
JP2006153672A
To provide a measurement system for measurement of distribution of a physical amount such as air pressure or temperature in the space in particular in a vacuum chamber.The pressure and temperature distribution measurement system for meas...  
JP2006112812A
To provide a technology for measurement of a vacuum of a vacuum space of an enclosed vacuum structured body, using a very simple means without accompaniment of any destructive operation.The vacuum insulation panel 10 of the vacuum struct...  
JP2006084190A
To solve the problem that the conventional case used to have a difficulty in specification of a vacuum gauge of malfuction from among a lot of vacuum gauges when they are set on a plurality of places on a vacuum system.The vacuum gauge m...  
JP2006078190A
To determine the reason for the malfunction at a low cost and with a simple structure, in a system adopted with an insulating structure is whether a degradation in vacuum of the vacuum chamber or the abnormality of the system of the ther...  
JP2006510036A  
JP2006047288A
To provide a vacuum gauge with improved sensitivity, especially for an ionization vacuum gauge restricted in a saddle of electrostatic field.This vacuum gauge includes a negative electrode unit, a positive electrode ring, a shield electr...  
JP3746376B2  
JP2006503290A  
JP2006501620A  
JP2005331362A
To realize a vacuum gage robust against disturbance and capable of detecting precisely a degree of vacuum.A vibration body 1, a beam 2 and a housing 3 cut out of one sheet are fixed onto a base panel 6 via a spacer 5. The vibration body ...  
JP3739141B2
To enlarge the lower limit of extremely high vacuum measuring range by providing a charged particle shielding electrode in a space communicating between a vacuum gauge container and a vacuum chamber to be measured thereby blocking intrus...  
JP2005534032A  
JP3734913B2
To provide a technique capable of surely preventing filament disconnection. When pressure is to be found on the basis of the magnitude of an ionic current I, by collecting ion formed by gas molecule ionization with a collector C after im...  
JP3721238B2
To judge the existence of a vacuum leak by a method wherein sound waves are impinged from one face of a sheetlike vacuum packaged product, the intensity of the sound waves which are transmitted up to a face on the opposite side is measur...  
JP2005522674A  
JP2005172611A
To provide a charged particle beam apparatus and a pressure measuring method for the charged particle beam apparatus, capable of measuring a vacuum pressure value around its charged particle gun.Values R1-R8 corresponding to conductances...  
JP2005517921A  
JP2005140780A
To provide a pressure sensor with its outside dimensions very limited.This pressure sensor is a micro electromechanical vibration device and comprises a silicon substrate 15 with a single-layer or multi-layer vibration assembly 121 forme...  
JP3681962B2
To provide a pressure measurement device which is free from vacuum leakage due to erosion as in use for a ground electrode. By putting a metal block 32 between an insulating part 31 such as ceramics and a ground electrode 33 absorbing di...  
JP2005127733A
To provide a measuring apparatus including a crystal oscillator capable of preventing electrode parts of the crystal oscillator from corroding, keeping natural resonance impedance stable and constant, and improving accuracy in measuring ...  
JP3648246B2  
JP2005114525A
To provide an internal pressure measuring apparatus suited for measuring the internal pressure of a compact food container, in which food items and drink are filled and sealed, by restraining the dispersion of the pressure of air by the ...  
JP2005114574A
To compensate for the fluctuations caused by a cable length change, even when a measuring cable for connecting a gauge head to a measuring part is changed into a cable having a different cable length, and to thereby measure pressure with...  
JP3664002B2
To precisely measure the sealed gas pressure of a gas-sealed apparatus having a dispersion of electrode interval or a gas-sealed apparatus having a fluctuating electrode interval. This measuring method of gas pressure comprises applying ...  
JP2005090991A
To provide a quartz friction vacuum gauge which improves corrosion resistivity by preventing corrosion of electrode part of a quartz vibrator, prevents aging variation of temperature dependence concerning the intrinsic resonance impedanc...  
JP2005062167A
To provide a miniaturized vacuum gauge that has high sensitivity and does not disturb the measurement of pressure greatly.An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a container 10 more con...  
JP2005062176A
To provide a miniaturized vacuum gauge that has high sensitivity and does not give any disturbance for affecting the measurement of pressure.An ionization vacuum gauge measures a residual pressure of a gaseous substance remaining in a co...  
JP2005043052A
To provide a foreign matter detecting method capable of stably detecting floating foreign matter in a treatment chamber by suppressing the deposition of a film caused by plasma treatment and the cloudiness of a measuring window due to et...  
JP3602917B2  
JP2004349102A
To provide a quadrupole type mass spectrometer carrying out measuring of pressure.A pressure detecting part 40 for a pressure measuring device is installed inside a container 11 in which a quadrupole 23 is installed and the quadrupole 23...  
JP3597734B2  
JP2004311592A
To obtain a substrate cleaning device for making a film thickness after cleaning a substrate uniform in the plane when the thickness of laminated films cannot be made uniform because reaction of a gas for forming films on the substrate i...  
JP2004309605A
To make correctable a white defect, a black defect or a glass projection defect of a Levenson mask with one kind of gas.By using diacetone acrylamide, a light-shielding film 17 to correct a white defect can be formed both on a glass subs...  
JP3574279B2  
JP2004264075A
To provide a means for confirming easily and simply a vacuum condition in a clean box.This vacuum gage has as elements a communication space for communicating a vacuum space inside the clean box with a space of atmospheric pressure, a di...  
JP2004257784A
To provide a unit for accurately and easily measuring a degree of vacuum in the tip of an injection gun.The degree-of-vacuum measuring unit comprises: a connecting port 13a airtightly connected to the injection gun 21; closed piping 11 f...  
JP3566652B2  
JP2004239770A
To provide attaching structure for a cold cathode ionization vacuum gage capable of measuring the vacuum in a vacuum vessel under a high-vacuum condition upon restoration of a service power interruption, and capable of replacing the cold...  
JP3585969B2
PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors. CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode e...  
JP3580967B2
To enhance the pressure meausing accuracy of a hot-cathode magnetron-type vacuum gage, to reduce photoelectron current, and to reduce a current generated at a time when gas molecules stucked to the inner wall of an anode are driven out b...  
JP2004163136A
To provide a pressure corrector for a vacuum gage equipped with a correcting function for clearing a pressure value of the effect not only of charged particles flowing into a gage head of the vacuum gage but also of a noise current flowi...  
JP2004144507A
To provide a vacuum gauge which enables grasp of accurate vacuum achievement, and sufficient control of the degree of vacuum, even if rough handling is performed in work, when an air conditioning machine is installed.The inside of a cyli...  
JP2004132698A
To provide a differential pressure/absolute pressure converter for accurately and rapidly performing load lock control.In the converter 10 and its conversion method, where an absolute pressure sensor for detecting an absolute pressure in...  
JP3490685B2  
JP3490982B2
To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function. The vacuum gage pressure corrector is connected to a vacuum gage having a sel...  
JP2003315296A
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted.The detection device is provided with a...  
JP2003303777A
To provide a plasma deposition apparatus which enables accurate end-point detection for cleaning without accompanying the emission of light, and to provide a cleaning method.The plasma deposition apparatus 1 is provided with a first vacu...  

Matches 451 - 500 out of 1,585