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Matches 451 - 500 out of 1,631

Document Document Title
JP4083239B2  
JP2008508517A
In the heat loss-type pressure gauge of resistance heating, current is changed between a perception element and a compensation element by a different duty cycle. As a result, a perception element is heated compared with a compensation el...  
JP2008507708A
The ピラニ pressure gauge is equipped with the perception element which are 90/10 Pt/Ir for example, the shape of a coil formed from the alloy containing platinum and indium was heated. This makes it possible to arrange a pressure gau...  
JP2008506947A
The improved pressure transducer (50, 70, 80) is indicated. A transducer (50, 70, 80) contains the external heater (32, 76) arranged in order to heat a connector, a case, a sensor assembly (58), and a sensor assembly (58). In some modes,...  
JP2008504975A
The present invention offers the method and equipment for reducing aspect ratio dependence etching observed when forming a deep trench in a semiconductor board by plasma etching by performing deposit processing and etching processing by ...  
JP2008504549A
The present invention relates to the sealing test method about the small device MEMS (ed) or enclosed, and MEMS or a small device is accommodated in the cavity of a support medium. It contains gas as the density which will become when pu...  
JP2008014813A
To provide a vacuum measuring device operable normally even if dust enters a measuring environment, and a vapor deposition device.In a taking-out box 12, internal gas is sucked by a turbo-molecular pump 15. A Penning vacuum gage 14 measu...  
JP4036751B2  
JP2007322266A
To prevent a degradation in the sensitivity and a deactivation of a discharge due to a cathode pollution, and stably and accurately measure the pressure in a pressure measured environment that contains a cathode-contaminating gas, such a...  
JP2007535121A
The present invention relates to the system into which the size of a template is changed, in order to reduce this, when distortion of the lower layer pattern formed of the template is not avoided. For that purpose, a system is characteri...  
JP4015859B2  
JP3137252U
[Subject] There is no possibility of interfering with operation of a device, and it provides a pressure sensor which can carry out direct measurement of the pressure inside a hermetic container which closes a device simple. [Means for So...  
JP2007285947A
To measure an accurate vacuum for a large region with a Pirani gauge and to dispense with a calibration table. A resistance R0of a filament at 0°C is determined (S1), a length of the filament is determined from the specifications of the...  
JP2007218619A
To provide a cold-cathode ionization gauge which discharges easily, makes the time lag short during the period from the time a high voltage is applied to the cold-cathode ionization gauge, to the time current caused by discharging starts...  
JP2007522481A
A micro processing vacuum sensor can be formed using a semiconductor integrated circuit process. You may form this sensor into エンクロジャ with micro processing parts. Then, you may measure the pressure in エンクロジャ using...  
JP2007517233A
The cold cathode ion vacuum meter suitable for being used while exhaust pollution exists under a high vacuum is offered. To lessening and twist accuracy, discharge current, By reducing the electric charge current density received with th...  
JP3936139B2  
JP2007155669A
To provide a cold cathode ionization gauge capable of measuring pressure, in an instant after operation has started by providing a simple means for inducing discharge.In the cold cathode ionization gauge 1 comprises a positive electrode ...  
JP2007147344A
To provide a thin film Pirani vacuum sensor having high sensitivity in a high band from a high vacuum pressure to a low vacuum pressure which is lower by almost one atmospheric pressure, and a vacuum measuring device.At least one heater ...  
JP3957371B2
To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump. In a vacuum...  
JP2007113928A
To provide an ionization vacuum gauge that can make noise current which is generated extremely small, and easily and accurately measure all pressures in the region from an ultra-low vacuum to extremely-high vacuum.An electron gun section...  
JP3913770B2  
JP2007093579A
To provide a pressure measurement device and its pressure measurement method related to a vacuum chamber, more specifically, one using ultrasonic waves, in the vacuum chamber pressure measurement system.The device comprises the vacuum ch...  
JP2007085953A
To provide a vibration sensor which is not limited to the usable range, with simplified wiring, capable of alleviating the effects of signal transmittance noise, capable of high-occuracy reliable measurement and of measuring the degree o...  
JP3931294B2
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted. The detection device is provided with ...  
JP2007051963A
To provide a thermal barometric pressure sensor which has barometric pressure sensing sensitivity, including barometric pressure of atmospheric pressure or higher and wide-range vacuum, ranging from low-vacuum region to high-vacuum regio...  
JP2007047910A
To provide a pressure/flow rate control system capable of easily controlling when a vacuum vessel is evacuated and a flow rate and gas pressure of the vacuum vessel is thereafter controlled at a certain level after charging gas into the ...  
JP2007047069A
To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influenc...  
JP2007033422A
To provide a strong and low-cost ionization vacuum gauge using a cold cathode with little gas release.A hot cathode in a hot cathode ionization vacuum gauge (for example, a hot cathode B-A type ionization vacuum gauge) is replaced to the...  
JP2007024849A
To provide an ionization gauge that outgases a small amount of gas and has a robust cathode.A hot cathode in a hot cathode ionization gauge (for example: hot cathode B-A type ionization gauge) is replaced by a cold cathode by a carbon na...  
JP2007501532A
The present invention offers the method and equipment for determining a terminal point in the case of a mutual periodic etching process or Time-Division-Multiplexing process. A substrate is placed into a plasma chamber and applied to the...  
JP2007017263A
To provide a sensing element, a vacuum gauge and a vacuum tube which can catch heat diffused 3-dimensionally with a 3-dimensional temperature sensing part, catch the 3-dimensional isothermal contour with the temperature sensing part, to ...  
JP3869211B2  
JP2006344738A
To provide a technique capable of easily detecting the abnormality of a measuring instrument fitted to a semiconductor production device.A Penning vacuum gage 1 fitted to a dry etching device or the like is composed of two dependent firs...  
JP2006343305A
To enhance the degassing effect of an inner electrode of a measurement tube and that of a measurement-tube inner wall in a triode-type hot cathode ionization vacuum gauge.In this triode-type hot cathode ionization vacuum gauge, an ion co...  
JP2006343304A
To stabilize an apparatus in a B-A type hot cathode ionization vacuum gauge, and to release adsorption gas in a short time.In this B-A type hot cathode ionization vacuum gauge comprising a set of hot cathodes, a helical electrode 7 is pl...  
JP2006329880A
To provide a pressure measuring device capable of measuring pressure in the pressure region from 100 Pa up to atmospheric pressure.The pressure measuring device is provided with a ballistic electron surface-emitting device (BSD) 1, an an...  
JP3886691B2
To calculate pressure within an accelerating tube on the basis of the indicated pressure of an ion pump or the like and to indicate it. This device for indicating the vacuum pressure of an electron microscope accelerating tube computes a...  
JP2006300578A
To provide a capacitance type pressure sensor for absolute pressure measurement having higher accuracy or reliability, and an evaluation method for evaluating the degree of vacuum in a vacuum chamber thereof.In this capacitance type pres...  
JP3840872B2
To provide a vacuum insulated breaker device having high safety and a vacuum pressure monitoring and measuring function with enhanced reliability. A vacuum pressure measuring terminal 30 is installed on the side of a metal container 2 in...  
JP3808092B2  
JP2006201054A
To solve the problem that a magnetron vacuum gage needs a long time until discharge is performed again when discharge stops once, can not measure in a low vacuum region, has a risk breaking a positive electrode in measurement by constant...  
JP3833776B2
To provide a wide band ionization gauge capable of measurement in an ultrahigh vacuum area. In an ultrahigh vacuum area, desorption ion is removed from the ion generated within an ion generating part 10 by an energy filter part 20 to mak...  
JP2006153860A
To easily measure the degree of vacuum in a sealed vessel, for example to recognize that the inside of the sealed vessel is kept at a predetermined degree of vacuum, even when the inside of the sealed vessel is under rough vacuum of whic...  
JP2006153672A
To provide a measurement system for measurement of distribution of a physical amount such as air pressure or temperature in the space in particular in a vacuum chamber.The pressure and temperature distribution measurement system for meas...  
JP2006153782A
To prevent the flow of a gas to be measured from being directly in contact with a thin film and protect the thin film from contaminants or the like in the gas, in a gas sensing device which provides the thin film, which is formed thermal...  
JP2006112812A
To provide a technology for measurement of a vacuum of a vacuum space of an enclosed vacuum structured body, using a very simple means without accompaniment of any destructive operation.The vacuum insulation panel 10 of the vacuum struct...  
JP2006084190A
To solve the problem that the conventional case used to have a difficulty in specification of a vacuum gauge of malfuction from among a lot of vacuum gauges when they are set on a plurality of places on a vacuum system.The vacuum gauge m...  
JP2006078190A
To determine the reason for the malfunction at a low cost and with a simple structure, in a system adopted with an insulating structure is whether a degradation in vacuum of the vacuum chamber or the abnormality of the system of the ther...  
JP2006510036A
In the ionization vacuum gauge, the influence of the X-rays emitted when the electron beam made parallel hits the grid surface of meter structure was reduced by the beam stop with a web. This beam stop with a web forms a shadow domain wi...  

Matches 451 - 500 out of 1,631