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JP2010251813A |
To provide a method and a device for determining an endpoint in an alternating cyclic etching process or a time-division multiplex process.A substrate is placed within a plasma chamber and subjected to an alternating cyclic process inclu...
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JP4568321B2 |
An ionization vacuum device measures a pressure in a vacuum vessel, and has: an anode provided inside the vacuum vessel; a cathode provided inside the vacuum vessel; a power source for discharge that supplies electric power for discharge...
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JP2010210302A |
To provide a vacuum gauge for low-temperature apparatus which is capable of performing measurement even when its measuring range is a region other than a molecular flow region, has improved the vibration-proof property and durability of ...
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JP2010210301A |
To provide a vacuum gauge for low-temperature apparatus whose vibration-proof property and durability have been improved.The vacuum gauge for low-temperature apparatus includes a low-temperature heat source 1 arranged inside a vacuum hea...
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JP2010190694A |
To provide a vacuum processing apparatus where a measuring probe of a vacuum gauge of which sensitivity is changed by a magnetic field is arranged at an optimum position in the magnetic field.The vacuum processing apparatus 100 includes:...
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JP4522143B2 |
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JP2010169665A |
To provide an electrostatic capacitance type diaphragm vacuum gage for highly accurately measuring pressure independently from attaching conditions of the vacuum gages.There is provided an inclined angle sensor 14 for detecting an inclin...
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JP2010525366A |
A measurement instrument having a processor, a first sensor and a second sensor. The processor is adapted to output a measurement signal embodying a measurement of a physical quantity. The first sensor and second sensor are connected to ...
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JP2010151623A |
To provide a cold cathode ionization gauge that induces discharge in a short time even when used for a long time without complicating the device. The cold cathode ionization gauge includes a rod-shaped anode 2, a probe container (cathode...
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JP2010151622A |
To provide a thermal conduction type vacuum gage capable of improving the accuracy of measurement without remodeling the shape of a gage head container, even in a viscous flow domain wherein heat transfer of gas molecules is governed by ...
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JP4493139B2 |
It is an object of the present invention to provide an ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement...
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JP2010096763A |
To provide a method and a device for reducing contaminants which reach an ion gauge collector.The system for measuring gas density in a vacuum includes a vacuum gauge, a housing which stores this vacuum gauge, and a magnet secured to out...
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JP4437578B2 |
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JP4437336B2 |
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JP2010054486A |
To provide an infrared sensor device capable of detecting the degree of vacuum in a package while suppressing the complication of the configuration.The infrared sensor device includes a diode 31 having an electric characteristic dependin...
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JP3156592U |
To provide a front / back discriminating device capable of reliably discriminating even when a woven strap is applied in a process of incorporating a strap used as a puller of various products into an applicable product. The strap is for...
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JP2009300381A |
To provide a heat conduction type vacuum gage capable of preventing fluctuation of an output current from an electric resistor caused by convection of gas, and measuring a pressure always stably regardless of a mounting direction when be...
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JP4382939B2 |
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JP4382708B2 |
A vacuum ionization gauge ( 30 ) includes a cathode ( 31 ), an anode ring ( 33 ), a shield electrode ( 32 ), an ion educed electrode ( 34 ), a reflector ( 35 ) and a collector ( 36 ). The cathode is positioned corresponding to a first op...
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JP4377196B2 |
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JP2009271051A |
To provide a measuring apparatus capable of measuring a pressure in a high vacuum by increasing efficiency of ultrasound transmission and reception required in measuring the pressure and improving accuracy.The pressure measuring apparatu...
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JP2009537831A |
The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrat...
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JP4339948B2 |
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JP2009216719A |
To provide a method of pressure measurement using a measuring apparatus which includes a crystal oscillator can prevent electrode parts of a crystal oscillator from corroding, keep natural resonance impedance stable and constant, and imp...
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JP4332296B2 |
Two resistance elements (3, 6) are used for eliminating the influence of wall temperature on the gas pressure in a vessel, determined by a Pirani manometer. The first resistance element (3) is present in a first branch of a Wheatstone br...
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JP4327423B2 |
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JP4316007B2 |
A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes ...
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JP2009525487A |
A method and apparatus are provided for achieving nearly perfect temperature compensation of a heat-loss vacuum gauge over its full pressure range. A voltage is measured across a sensor leg, a sensor leg and a temperature compensating le...
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JP4283118B2 |
A small high thermal conductivity plate (3) forming a thermal reservoir has a thin covering (4) of open-pore material, the pore structure of which is coarser than that of the thermal insulation panel. Plate and covering are built-into th...
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JP2009109456A |
To easily detect pressure with a simple constitution.The pressure element 3 is arranged in a chamber 1 in which pressure varies, is constituted by cyano crosslink metal complex 6 containing water of crystallization, and measures the pres...
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JP4264156B2 |
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JP4252064B2 |
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JP4246332B2 |
To provide a pressure measuring circuit capable of detecting the disconnection of a filament 25. This pressure measuring circuit 1 comprises a first amplifier 31 connected to a resistance bridge circuit 5 having the filament 25 of a Pira...
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JP2009506544A |
The present invention provides a method for establishing endpoint during an alternating cyclical etch process or time division multiplexed process. A substrate is placed within a plasma chamber and subjected to an alternating cyclical pr...
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JP2009024577A |
To detect abnormality in degree of vacuum at a decompression part connected to a liquid seal type vacuum pump.In this method, it is judged by comparing actual vacuum pressure of the decompression part 3 connected to the liquid seal type ...
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JP2009505052A |
The thermal pressure gauge measures the filament (12) on one side (20) of the Wheatstone bridge circuit, the variable digital potentiometer (28) on the diagonally opposite side (16) of the bridge circuit, and the resistance of the potent...
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JP4216375B2 |
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JP2008304463A |
To provide a micro mechanical vacuum sensor for determining the pressure within a cavity of a micro mechanical element.The sensor includes a substrate 2, at least one electrically conductive support member 4 connected to the substrate, a...
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JP4196367B2 |
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JP4199050B2 |
To provide a quadrupole type mass spectrometer carrying out measuring of pressure. A pressure detecting part 40 for a pressure measuring device is installed inside a container 11 in which a quadrupole 23 is installed and the quadrupole 2...
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JP4189020B1 |
To provide a constant current type Pirani vacuum gauge having high measurement accuracy, a simple structure, and a wide pressure measurement range even when a sensor unit having a filament and a control system are separated from each oth...
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JP4186646B2 |
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JP4187321B2 |
To realize a method for calibrating a mass spectrometer without specially introducing a calibration gas by obtaining a calibration coefficient for the mass spectrometer from the ratio between the pressure value measured by a total pressu...
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JP2008281565A |
To provide an ionization vacuum gauge, especially an ionization vacuum gauge using a carbon nanotube.The ionization vacuum gauge includes a linear negative electrode, a positive electrode installed so as to surround the linear negative e...
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JP2008170175A |
To provide a method for estimating a degree of vacuum, which can estimate the degree of vacuum in a vacuum vessel being highly vacuum or ultra-highly vacuum by using a simple technique needing no expensive nor large-sized apparatus.A pro...
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JP2008164541A |
To provide a quartz type gas pressure gage capable of eliminating data collection man-hours and a computing circuit for temperature calibration to reduce a cost, by controlling very efficiently a temperature of a tuning fork type quartz ...
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JP2008164540A |
To provide a quartz type GAS pressure gage capable of eliminating collection man-hours and a computing circuit for a correlation characteristic data between a natural resonance resistance and a temperature of a quartz oscillator to reduc...
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JP2008507708T6 |
A ピラニ pressure gauge is provided with a perception element which are 90/10 Pt/Ir for example, the shape of a coil formed from an alloy containing platinum and indium was heated. This makes it possible to arrange a pressure gauge at...
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JP2008128994A |
To reduce a current applied onto current introduction terminals of an ionization vacuum gage and a mass spectrometer having an electrification-heating type grid, to compactify a vacuum terminal part, and to reduce a cost.The grid is form...
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JP4083239B2 |
A pressure gauge device that is operated as a thermal conduction manometer contains a measuring resistor (131) that is arranged in layer form on a self-supporting carrier foil and is in defined thermal contact with a gas whose pressure i...
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