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Matches 451 - 500 out of 1,690

Document Document Title
JP4382708B2  
JP4377196B2  
JP2009540268A
[Means for Solution] A gas sensor comprises silicon material and has the permselective membrane (13) which contains a warmer (20) outside. A film (13) closes a housing which stores a pressure sensor and which is exhausted. When exhaustin...  
JP2009271051A
To provide a measuring apparatus capable of measuring a pressure in a high vacuum by increasing efficiency of ultrasound transmission and reception required in measuring the pressure and improving accuracy.The pressure measuring apparatu...  
JP2009537831A
The present invention is a sensor element for pressure measurement which has a substrate (5) and at least one mass element (1), and the mass element (1) is, To the substrate (5), an interval is kept, and it is arranged, and the mass elem...  
JP4339948B2  
JP2009216719A
To provide a method of pressure measurement using a measuring apparatus which includes a crystal oscillator can prevent electrode parts of a crystal oscillator from corroding, keep natural resonance impedance stable and constant, and imp...  
JP2009210587A
To provide a high-sensitivity vacuum gauge.The present invention includes a cathode unit, an anode ring, a shielding electrode, an ion educing electrode, a reflector, and a collector. One end of the shielding electrode corresponds to the...  
JP4332296B2  
JP4327423B2  
JP4316007B2  
JPWO2009096504A
A floating structure held above a substrate after heat separation of this micro vacuum meter had been carried out from a substrate by support structure prolonged from a substrate and the substrate, It has a heating element which is arran...  
JP2009525487A
[Subject] A method and a device which attain nearly perfect temperature compensating over all the pressure ranges of heat loss type vacuum meter 200 are provided. [Means for Solution] Sensor leg RS and temperature compensating leg R2 are...  
JP4283118B2  
JP2009128276A
To provide an ionization vacuum device protecting an electrode against contaminants in a vacuum vessel.The ionization vacuum device includes: a vacuum vessel 13; an anode 11 provided in the vessel 13, cathodes 12a and 12b provided in the...  
JP2009109456A
To easily detect pressure with a simple constitution.The pressure element 3 is arranged in a chamber 1 in which pressure varies, is constituted by cyano crosslink metal complex 6 containing water of crystallization, and measures the pres...  
JP4264156B2  
JP2009097892A
To provide a constant-current type Pirani vacuum gage having high measurement accuracy, even if a sensor part that has a filament is separated from a control system, and a simple structure, and a wide measurement range of pressure.This v...  
JP2009517633A
A diaphragm device for vacuum meter (15) contains a tubular diaphragm casing (14) which surrounds a diaphragm (20), The casing has a connecting hole (22) for being open for free passage with Ko Deguchi (16) for being open for free passag...  
JP2009079965A
To provide a thermocouple heater for a heat conduction type sensor having high sensitivity, high accuracy and a simple structure, wherein a thermocouple is used as an essential temperature sensor, and simultaneously operated as a heater ...  
JP4252064B2  
JP4246332B2  
JPWO2009035123A
While raising the response to a rapid pressure increase, the Pirani gauge which lost restrictions of the attachment direction of the gauge head container to a vacuum vessel is provided. It has a hot filament base material which supports ...  
JP2009510438A
[Subject] The device which detects the method for judging the high-pressure state in an electric device and the high-pressure state in an electric device is provided. [Means for Solution] It is a method and a device which detect a high-p...  
JP2009506544A
The present invention gives the method for establishing the terminal point in the periodic etching processing performed by turns or a Time-Division-Multiplexing process. A base is put in in a plasma chamber and it applies to the periodic...  
JP2009024577A
To detect abnormality in degree of vacuum at a decompression part connected to a liquid seal type vacuum pump.In this method, it is judged by comparing actual vacuum pressure of the decompression part 3 connected to the liquid seal type ...  
JP2009505041A
The 1st housing body in which a vacuum measurement cell consists of aluminum oxides (1), And a diaphragm (2) which consists of an aluminum oxide which is arranged so that a vacuum may be sealed in an edge field to this side, and forms a ...  
JP2009505052A
A thermal conductivity gauge adjusts resistance of the variable digital ポテンシオ meter (28) in the neighborhood (16) the filament (12) in one neighborhood (20) of a ホイート stone bridged circuit, and catty-corner from a bridg...  
JP4216375B2  
JP2009008693A
To provide a capacitive vacuum measuring cell which is practically and completely made of ceramic, and is highly resistant to corrosion as a result.A very thin ceramic diaphragm having a thickness of 250 m or less is used so as to be abl...  
JP2008304361A
To provide a cold cathode ionization vacuum gage capable of achieving excellent efficiency in maintenance work and reducing cost of work.The cold cathode ionization vacuum gage 21 is provided with plate members 24A, 24B arranged in the i...  
JP2008304360A
To provide a cold cathode ionization vacuum gage capable of preventing an auxiliary ignition device from being deformed and improving the efficiency in assembly work while achieving stable operation in a high vacuum condition.The cold ca...  
JPWO2006121173A1
真空装置に連通状態で接続された真空容器( 4)の内部に、少なくともグリッド(2)と 電子源(3)とイオンコレクタ(1)の3電 極を備え、該電子源(3)から放射され...  
JP2008304463A
To provide a micro mechanical vacuum sensor for determining the pressure within a cavity of a micro mechanical element.The sensor includes a substrate 2, at least one electrically conductive support member 4 connected to the substrate, a...  
JP4196367B2  
JP4199050B2  
JP4189020B1
[Subject] A constant current type Pirani gauge with a wide time base range of pressure is offered simply [even if the sensor assembly and control system which have a filament are separated, measurement accuracy is high, and / structure]....  
JP4186646B2  
JP4187321B2  
JP2008281565A
To provide an ionization vacuum gauge, especially an ionization vacuum gauge using a carbon nanotube.The ionization vacuum gauge includes a linear negative electrode, a positive electrode installed so as to surround the linear negative e...  
JP2008268235A
To provide a method capable of maintaining accurate measurement without having to recalibrate a secondary electron multiplying element measuring system, and a vacuum processing device that precludes the operation from stopping for recali...  
JP2008267933A
To provide a transducer type vacuum gauge and its control method suppressing an increase of cost required for a device, and facilitating the setting of set points and the reading of the set-up set points in the transducer type vacuum gau...  
JP2008241264A
To provide an outdoor apparatus provided with a vacuum gauge capable of reliably measuring the degree of vacuum of a vacuum part without being affected by weather even in the case that the vacuum gauge is mounted to the apparatus install...  
JP2008537998A
The negative pole (6) which emits electrons consists of a conductive emitter layer (7) attached to the side wall (2) which consists of stainless steel, and the gate (9) fixed to the inner side in the concave emitter surface of an emitter...  
JP2008233079A
To provide ionization vacuum gauges or, in particular, an ionization vacuum gauge that utilizes carbon nanotubes.An ionization vacuum gauge according to the present invention includes: a cathode including a substrate and an emitter film ...  
JP2008233057A
To provide a high-sensitivity high-precision heat conduction type sensor for measuring physical quantities such as degrees of vacuum, gas or liquid flow rates and capable of widening the range of measurement and a heat conduction type me...  
JP2008209284A
To provide a pressure measuring device 185 capable of determining a gas pressure accurately.The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for ca...  
JP2008170175A
To provide a method for estimating a degree of vacuum, which can estimate the degree of vacuum in a vacuum vessel being highly vacuum or ultra-highly vacuum by using a simple technique needing no expensive nor large-sized apparatus.A pro...  
JP2008164541A
To provide a quartz type gas pressure gage capable of eliminating data collection man-hours and a computing circuit for temperature calibration to reduce a cost, by controlling very efficiently a temperature of a tuning fork type quartz ...  
JP2008164540A
To provide a quartz type GAS pressure gage capable of eliminating collection man-hours and a computing circuit for a correlation characteristic data between a natural resonance resistance and a temperature of a quartz oscillator to reduc...  

Matches 451 - 500 out of 1,690