Login| Sign Up| Help| Contact|

Patent Searching and Data


Matches 451 - 500 out of 1,543

Document Document Title
JP2004239770A
To provide attaching structure for a cold cathode ionization vacuum gage capable of measuring the vacuum in a vacuum vessel under a high-vacuum condition upon restoration of a service power interruption, and capable of replacing the cold...  
JP3585969B2
PURPOSE: To accurately measure continuously a measuring area wider than the measuring area of each sensor element, by combining a plurality of pressure sensors. CONSTITUTION: A Pirani sensor 1 is used in combination with a cold cathode e...  
JP3580967B2
To enhance the pressure meausing accuracy of a hot-cathode magnetron-type vacuum gage, to reduce photoelectron current, and to reduce a current generated at a time when gas molecules stucked to the inner wall of an anode are driven out b...  
JP2004163136A
To provide a pressure corrector for a vacuum gage equipped with a correcting function for clearing a pressure value of the effect not only of charged particles flowing into a gage head of the vacuum gage but also of a noise current flowi...  
JP2004144507A
To provide a vacuum gauge which enables grasp of accurate vacuum achievement, and sufficient control of the degree of vacuum, even if rough handling is performed in work, when an air conditioning machine is installed.The inside of a cyli...  
JP2004132698A
To provide a differential pressure/absolute pressure converter for accurately and rapidly performing load lock control.In the converter 10 and its conversion method, where an absolute pressure sensor for detecting an absolute pressure in...  
JP3490685B2  
JP3490982B2
To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function. The vacuum gage pressure corrector is connected to a vacuum gage having a sel...  
JP2003315296A
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted.The detection device is provided with a...  
JP2003303777A
To provide a plasma deposition apparatus which enables accurate end-point detection for cleaning without accompanying the emission of light, and to provide a cleaning method.The plasma deposition apparatus 1 is provided with a first vacu...  
JP2003279433A
To suppress increase of a device scale and a processing scale in a measuring system of the degree of vacuum, and to measure the degree of vacuum accurately, easily and quickly in a wide range from the low degree of vacuum (atmospheric pr...  
JP2003240740A
To provide a means for judging the degree of vacuum in element units and to provide an electron device having the means, in the electron device that is sealed in a pressure-reduced atmosphere in element units.The electron device is provi...  
JP3437579B2  
JP3462238B2
PURPOSE: To provide a sensitivity correction method of a gyro capable of correcting sensitivity change accompanying a change with the passage of time of the gyro as it is mounted on a moving body and securing precision necessary for navi...  
JP3452913B2
To provide a vacuum gage using a Peltier element. The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter...  
JP3421951B2  
JP3434813B2
To accurately measure vacuum pressure. A vacuum gauge comprises an electron supply source 16, an open anode 18 for forming an anode space, an ion collector electrode 20 for collecting ions formed by a collision of electrons with gas mole...  
JP2003149069A
To provide a vacuum switch which can be operated when a prescribed degree of vacuum is reached and to provide a vacuum evacuation device using the vacuum switch as well as to provide an ion-type vacuum gage.A switching element 18 which i...  
JP2003083831A
To detect a leakage current flowing into a live part interphase caused by deterioration of an insulating material, in a vacuum circuit breaker having a three-phase integrally molded insulating frame.A conductor 8 is disposed on a live pa...  
JP2003065877A
To provide an ultrahigh vacuum gage capable of adjusting and measuring offset derived from a gage head and the whole measuring system, and an ultrahigh vacuum measuring method using the gage.In this ultrahigh vacuum gage, a condition whe...  
JP2003065875A
To provide an ultrahigh vacuum measuring method capable of removing the influence by electrons and the influence by ions.This method is constituted as follows: a vacuum gage for ionizing gas molecules by electron impact at an ion source ...  
JP3403845B2
PURPOSE: To provide a method and a vacuum gauge for ultra-high vacuum which can accurately measure ultra-high vacuum not more than about 10-11Pa by removing an ESD(electronically stimulated desorbed) ions. CONSTITUTION: In an ultra-high ...  
JP2003050176A
To accurately measure vacuum pressure. A vacuum gauge comprises an electron supply source 16, an open anode 18 for forming an anode space, an ion collector electrode 20 for collecting ions formed by a collision of electrons with gas mole...  
JP3400885B2
PURPOSE: To provide a flange mount-type hot cathode ionization vacuum gauge of long life which can measure stably even under a high pressure or even when performing degassing frequently and can be made compact. CONSTITUTION: The gauge ha...  
JP3396726B2
To enhance measuring sensitivity and accuracy in a BA-type ionization vacuum gauge. In the BA-type ionization vacuum gauge 10, an ion collector electrode 16 in an open grid 12 is formed into a loop shape, and the loop surface thereof is ...  
JP2003042884A
To provide a vacuum measuring apparatus capable of substantially shortening aging time. The vacuum measuring apparatus is provided with both a vacuum gauge connected to a vacuum processing chamber and a controller connected to the vacuum...  
JP2003021567A
To provide a micro high-vacuum pressure sensor, which is housed inside a low-pressure microchip enclosure and which can be manufactured by a well-known microchip manufacturing technique.The micro pressure sensor uses an electric field ge...  
JP2003021566A
To provide a silicon-diaphragm type vacuum pressure sensor device, by which a pressure region up to 13.3 kPa from 0.01 Pa can be measured continuously.The diaphragm-type vacuum pressure sensor device is provided with a first silicon-diap...  
JP3385624B2
PURPOSE: To precisely guide a moving body through a passage by displaying an actual image in addition to map information. CONSTITUTION: When there is some input from an input device 6, images from an image pickup device 5 are stored on a...  
JP3385392B2
PURPOSE: To provide a vacuum sensor which is simple in structure, small-sized, and besides can measure wide range of vacuum pressure with by itself by counterposing plural sets of diaphragm electrodes and conductive film electrodes with ...  
JP2003004572A
To accurately and easily assemble a quadrupole section of a partial pressure vacuum gauge using a jig.The partial pressure vacuum gauge with a quadrupole section employs an assembling jig and an assembling method by which electrode rods ...  
JP2003004571A
To protect a crystal gauge of a combination gauge from heat radiated from an ion gauge.In the combination gauge in which the crystal gauge is arranged near the ion gauge having a thermal filament, the crystal gauge is surrounded by a pie...  
JP3359941B2  
JP2002340720A
To provide a vacuum gage pressure corrector which is usable together with an existing ionization vacuum gage controller to have a pressure correcting function.The vacuum gage pressure corrector is connected to a vacuum gage having a self...  
JP2002340719A
To provide a vacuum gage using a Peltier element.The vacuum gage using a Peltier element for measuring the pressure in a vacuum tank comprises a signal generator 1 for generating a current flowing in the Peltier element, a current meter ...  
JP2002318166A
To provide an electrostatic capacity type vacuum sensor allowing the change of a measuring pressure region without changing the thickness of an elastic structure part of a diaphragm electrode and allowing the measuring pressure region of...  
JP3336384B2  
JP3358394B2
PURPOSE: To resume the leak test effectively by lowering the background level at a mass spectrometric section quickly even when a large quantity of He is mixed into an oil in an oil-sealed rotary vacuum pump due to gross leak. CONSTITUTI...  
JP2002267560A
To provide a manufacturing method capable of manufacturing high- reliability pressure sensor by establishing a patterning technology capable of forming a conductive substrate of a pressure sensor and a corrosion resisting metal thin film...  
JP2002528777A  
JP2002528983A  
JP2002528775A  
JP2002528776A  
JP2002520613A  
JP3323004B2
PURPOSE: To provide a small and highly sensitive pressure sensor excellent in environment resistance. CONSTITUTION: A pressure sensor 20 is arranged so as to face an opening 14 communicated with a space 12 being a measuring object, and t...  
JP3280981B2  
JP2002122498A
To provide a simple method for measuring gas pressure and a low-cost device for the method applicable to a pressure reduced atmosphere and having excellent measuring accuracy and responsiveness.This method and device for measuring the pr...  
JP3300775B2
PURPOSE: To provide a field emission type vacuum gauge which has an extremely simple structure and small size and can accurately measure a pressure in an ultra-high vacuum region or lower than the region. CONSTITUTION: A constant-current...  
JP2002508836A  
JP2002071500A
To provide a method and an apparatus using a crystal oscillator which can always measure pressure accurately without replacement and cleaning of the crystal oscillator.In the method and the apparatus measuring gas pressure based on the d...  

Matches 451 - 500 out of 1,543