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Matches 451 - 500 out of 1,663

Document Document Title
JP4246332B2  
JPWO2009035123A
While raising the response to a rapid pressure increase, the Pirani gauge which lost restrictions of the attachment direction of the gauge head container to a vacuum vessel is provided. It has a hot filament base material which supports ...  
JP2009510438A
[Subject] The device which detects the method for judging the high-pressure state in an electric device and the high-pressure state in an electric device is provided. [Means for Solution] It is a method and a device which detect a high-p...  
JP2009506544A
The present invention gives the method for establishing the terminal point in the periodic etching processing performed by turns or a Time-Division-Multiplexing process. A base is put in in a plasma chamber and it applies to the periodic...  
JP2009024577A
To detect abnormality in degree of vacuum at a decompression part connected to a liquid seal type vacuum pump.In this method, it is judged by comparing actual vacuum pressure of the decompression part 3 connected to the liquid seal type ...  
JP2009505041A
The 1st housing body in which a vacuum measurement cell consists of aluminum oxides (1), And a diaphragm (2) which consists of an aluminum oxide which is arranged so that a vacuum may be sealed in an edge field to this side, and forms a ...  
JP2009505052A
A thermal conductivity gauge adjusts resistance of the variable digital ポテンシオ meter (28) in the neighborhood (16) the filament (12) in one neighborhood (20) of a ホイート stone bridged circuit, and catty-corner from a bridg...  
JP4216375B2  
JP2009008693A
To provide a capacitive vacuum measuring cell which is practically and completely made of ceramic, and is highly resistant to corrosion as a result.A very thin ceramic diaphragm having a thickness of 250 m or less is used so as to be abl...  
JP2008304361A
To provide a cold cathode ionization vacuum gage capable of achieving excellent efficiency in maintenance work and reducing cost of work.The cold cathode ionization vacuum gage 21 is provided with plate members 24A, 24B arranged in the i...  
JP2008304360A
To provide a cold cathode ionization vacuum gage capable of preventing an auxiliary ignition device from being deformed and improving the efficiency in assembly work while achieving stable operation in a high vacuum condition.The cold ca...  
JP2008304463A
To provide a micro mechanical vacuum sensor for determining the pressure within a cavity of a micro mechanical element.The sensor includes a substrate 2, at least one electrically conductive support member 4 connected to the substrate, a...  
JP4196367B2  
JP4199050B2  
JP4189020B1
[Subject] A constant current type Pirani gauge with a wide time base range of pressure is offered simply [even if the sensor assembly and control system which have a filament are separated, measurement accuracy is high, and / structure]....  
JP4186646B2  
JP4187321B2  
JP2008281565A
To provide an ionization vacuum gauge, especially an ionization vacuum gauge using a carbon nanotube.The ionization vacuum gauge includes a linear negative electrode, a positive electrode installed so as to surround the linear negative e...  
JP2008268235A
To provide a method capable of maintaining accurate measurement without having to recalibrate a secondary electron multiplying element measuring system, and a vacuum processing device that precludes the operation from stopping for recali...  
JP2008267933A
To provide a transducer type vacuum gauge and its control method suppressing an increase of cost required for a device, and facilitating the setting of set points and the reading of the set-up set points in the transducer type vacuum gau...  
JP2008241264A
To provide an outdoor apparatus provided with a vacuum gauge capable of reliably measuring the degree of vacuum of a vacuum part without being affected by weather even in the case that the vacuum gauge is mounted to the apparatus install...  
JP2008537998A
The negative pole (6) which emits electrons consists of a conductive emitter layer (7) attached to the side wall (2) which consists of stainless steel, and the gate (9) fixed to the inner side in the concave emitter surface of an emitter...  
JP2008233079A
To provide ionization vacuum gauges or, in particular, an ionization vacuum gauge that utilizes carbon nanotubes.An ionization vacuum gauge according to the present invention includes: a cathode including a substrate and an emitter film ...  
JP2008233057A
To provide a high-sensitivity high-precision heat conduction type sensor for measuring physical quantities such as degrees of vacuum, gas or liquid flow rates and capable of widening the range of measurement and a heat conduction type me...  
JP2008209284A
To provide a pressure measuring device 185 capable of determining a gas pressure accurately.The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for ca...  
JP2008170175A
To provide a method for estimating a degree of vacuum, which can estimate the degree of vacuum in a vacuum vessel being highly vacuum or ultra-highly vacuum by using a simple technique needing no expensive nor large-sized apparatus.A pro...  
JP2008164541A
To provide a quartz type gas pressure gage capable of eliminating data collection man-hours and a computing circuit for temperature calibration to reduce a cost, by controlling very efficiently a temperature of a tuning fork type quartz ...  
JP2008164540A
To provide a quartz type GAS pressure gage capable of eliminating collection man-hours and a computing circuit for a correlation characteristic data between a natural resonance resistance and a temperature of a quartz oscillator to reduc...  
JP2008151756A
To resolve a problem such that in vacuum gauges in a way where gas molecules are ionized and pressure is determined from the number of generated ions, interaction such as collision and the like between ions and molecules can not be ignor...  
JP2008523410A
The method and equipment for measuring gas tension by combining the ionization vacuum gauge 110 with other at least one vacuum sensor. The nonvolatile memory 140 combined with the vacuum gauge 165 contains the proofreading parameter pecu...  
JP2008128994A
To reduce a current applied onto current introduction terminals of an ionization vacuum gage and a mass spectrometer having an electrification-heating type grid, to compactify a vacuum terminal part, and to reduce a cost.The grid is form...  
JP2008111778A
To provide a Pirani vacuum gage capable of expanding a measurable pressure range and improving measurement accuracy.The Pirani vacuum gage comprises: a float membrane 32 having an electric resistor 40 which is disposed on its surface, an...  
JP4083239B2  
JP2008508517A
In the heat loss-type pressure gauge of resistance heating, current is changed between a perception element and a compensation element by a different duty cycle. As a result, a perception element is heated compared with a compensation el...  
JP2008507708A
The ピラニ pressure gauge is equipped with the perception element which are 90/10 Pt/Ir for example, the shape of a coil formed from the alloy containing platinum and indium was heated. This makes it possible to arrange a pressure gau...  
JP2008506947A
The improved pressure transducer (50, 70, 80) is indicated. A transducer (50, 70, 80) contains the external heater (32, 76) arranged in order to heat a connector, a case, a sensor assembly (58), and a sensor assembly (58). In some modes,...  
JP2008504975A
The present invention offers the method and equipment for reducing aspect ratio dependence etching observed when forming a deep trench in a semiconductor board by plasma etching by performing deposit processing and etching processing by ...  
JP2008504549A
The present invention relates to the sealing test method about the small device MEMS (ed) or enclosed, and MEMS or a small device is accommodated in the cavity of a support medium. It contains gas as the density which will become when pu...  
JP2008014813A
To provide a vacuum measuring device operable normally even if dust enters a measuring environment, and a vapor deposition device.In a taking-out box 12, internal gas is sucked by a turbo-molecular pump 15. A Penning vacuum gage 14 measu...  
JP4036751B2  
JP2007322266A
To prevent a degradation in the sensitivity and a deactivation of a discharge due to a cathode pollution, and stably and accurately measure the pressure in a pressure measured environment that contains a cathode-contaminating gas, such a...  
JP2007535121A
The present invention relates to the system into which the size of a template is changed, in order to reduce this, when distortion of the lower layer pattern formed of the template is not avoided. For that purpose, a system is characteri...  
JP4015859B2  
JP3137252U
[Subject] There is no possibility of interfering with operation of a device, and it provides a pressure sensor which can carry out direct measurement of the pressure inside a hermetic container which closes a device simple. [Means for So...  
JP2007285947A
To measure an accurate vacuum for a large region with a Pirani gauge and to dispense with a calibration table. A resistance R0of a filament at 0°C is determined (S1), a length of the filament is determined from the specifications of the...  
JP2007218619A
To provide a cold-cathode ionization gauge which discharges easily, makes the time lag short during the period from the time a high voltage is applied to the cold-cathode ionization gauge, to the time current caused by discharging starts...  
JP2007522481A
A micro processing vacuum sensor can be formed using a semiconductor integrated circuit process. You may form this sensor into エンクロジャ with micro processing parts. Then, you may measure the pressure in エンクロジャ using...  
JP2007517233A
The cold cathode ion vacuum meter suitable for being used while exhaust pollution exists under a high vacuum is offered. To lessening and twist accuracy, discharge current, By reducing the electric charge current density received with th...  
JP3936139B2  
JP2007155669A
To provide a cold cathode ionization gauge capable of measuring pressure, in an instant after operation has started by providing a simple means for inducing discharge.In the cold cathode ionization gauge 1 comprises a positive electrode ...  

Matches 451 - 500 out of 1,663