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Patent Searching and Data


Matches 451 - 500 out of 1,648

Document Document Title
JP4189020B1
[Subject] A constant current type Pirani gauge with a wide time base range of pressure is offered simply [even if the sensor assembly and control system which have a filament are separated, measurement accuracy is high, and / structure]....  
JP4186646B2  
JP4187321B2  
JP2008281565A
To provide an ionization vacuum gauge, especially an ionization vacuum gauge using a carbon nanotube.The ionization vacuum gauge includes a linear negative electrode, a positive electrode installed so as to surround the linear negative e...  
JP2008268235A
To provide a method capable of maintaining accurate measurement without having to recalibrate a secondary electron multiplying element measuring system, and a vacuum processing device that precludes the operation from stopping for recali...  
JP2008267933A
To provide a transducer type vacuum gauge and its control method suppressing an increase of cost required for a device, and facilitating the setting of set points and the reading of the set-up set points in the transducer type vacuum gau...  
JP2008241264A
To provide an outdoor apparatus provided with a vacuum gauge capable of reliably measuring the degree of vacuum of a vacuum part without being affected by weather even in the case that the vacuum gauge is mounted to the apparatus install...  
JP2008537998A
The negative pole (6) which emits electrons consists of a conductive emitter layer (7) attached to the side wall (2) which consists of stainless steel, and the gate (9) fixed to the inner side in the concave emitter surface of an emitter...  
JP2008233079A
To provide ionization vacuum gauges or, in particular, an ionization vacuum gauge that utilizes carbon nanotubes.An ionization vacuum gauge according to the present invention includes: a cathode including a substrate and an emitter film ...  
JP2008233057A
To provide a high-sensitivity high-precision heat conduction type sensor for measuring physical quantities such as degrees of vacuum, gas or liquid flow rates and capable of widening the range of measurement and a heat conduction type me...  
JP2008209284A
To provide a pressure measuring device 185 capable of determining a gas pressure accurately.The device includes a Pirani vacuum gage 10 for outputting an electric signal corresponding to the gas pressure; an operation device (CPU) for ca...  
JP2008170175A
To provide a method for estimating a degree of vacuum, which can estimate the degree of vacuum in a vacuum vessel being highly vacuum or ultra-highly vacuum by using a simple technique needing no expensive nor large-sized apparatus.A pro...  
JP2008164541A
To provide a quartz type gas pressure gage capable of eliminating data collection man-hours and a computing circuit for temperature calibration to reduce a cost, by controlling very efficiently a temperature of a tuning fork type quartz ...  
JP2008164540A
To provide a quartz type GAS pressure gage capable of eliminating collection man-hours and a computing circuit for a correlation characteristic data between a natural resonance resistance and a temperature of a quartz oscillator to reduc...  
JP2008151756A
To resolve a problem such that in vacuum gauges in a way where gas molecules are ionized and pressure is determined from the number of generated ions, interaction such as collision and the like between ions and molecules can not be ignor...  
JP2008523410A
The method and equipment for measuring gas tension by combining the ionization vacuum gauge 110 with other at least one vacuum sensor. The nonvolatile memory 140 combined with the vacuum gauge 165 contains the proofreading parameter pecu...  
JP2008128994A
To reduce a current applied onto current introduction terminals of an ionization vacuum gage and a mass spectrometer having an electrification-heating type grid, to compactify a vacuum terminal part, and to reduce a cost.The grid is form...  
JP2008111778A
To provide a Pirani vacuum gage capable of expanding a measurable pressure range and improving measurement accuracy.The Pirani vacuum gage comprises: a float membrane 32 having an electric resistor 40 which is disposed on its surface, an...  
JP4083239B2  
JP2008508517A
In the heat loss-type pressure gauge of resistance heating, current is changed between a perception element and a compensation element by a different duty cycle. As a result, a perception element is heated compared with a compensation el...  
JP2008507708A
The ピラニ pressure gauge is equipped with the perception element which are 90/10 Pt/Ir for example, the shape of a coil formed from the alloy containing platinum and indium was heated. This makes it possible to arrange a pressure gau...  
JP2008506947A
The improved pressure transducer (50, 70, 80) is indicated. A transducer (50, 70, 80) contains the external heater (32, 76) arranged in order to heat a connector, a case, a sensor assembly (58), and a sensor assembly (58). In some modes,...  
JP2008504975A
The present invention offers the method and equipment for reducing aspect ratio dependence etching observed when forming a deep trench in a semiconductor board by plasma etching by performing deposit processing and etching processing by ...  
JP2008504549A
The present invention relates to the sealing test method about the small device MEMS (ed) or enclosed, and MEMS or a small device is accommodated in the cavity of a support medium. It contains gas as the density which will become when pu...  
JP2008014813A
To provide a vacuum measuring device operable normally even if dust enters a measuring environment, and a vapor deposition device.In a taking-out box 12, internal gas is sucked by a turbo-molecular pump 15. A Penning vacuum gage 14 measu...  
JP4036751B2  
JP2007322266A
To prevent a degradation in the sensitivity and a deactivation of a discharge due to a cathode pollution, and stably and accurately measure the pressure in a pressure measured environment that contains a cathode-contaminating gas, such a...  
JP2007535121A
The present invention relates to the system into which the size of a template is changed, in order to reduce this, when distortion of the lower layer pattern formed of the template is not avoided. For that purpose, a system is characteri...  
JP4015859B2  
JP3137252U
[Subject] There is no possibility of interfering with operation of a device, and it provides a pressure sensor which can carry out direct measurement of the pressure inside a hermetic container which closes a device simple. [Means for So...  
JP2007285947A
To measure an accurate vacuum for a large region with a Pirani gauge and to dispense with a calibration table. A resistance R0of a filament at 0°C is determined (S1), a length of the filament is determined from the specifications of the...  
JP2007218619A
To provide a cold-cathode ionization gauge which discharges easily, makes the time lag short during the period from the time a high voltage is applied to the cold-cathode ionization gauge, to the time current caused by discharging starts...  
JP2007522481A
A micro processing vacuum sensor can be formed using a semiconductor integrated circuit process. You may form this sensor into エンクロジャ with micro processing parts. Then, you may measure the pressure in エンクロジャ using...  
JP2007517233A
The cold cathode ion vacuum meter suitable for being used while exhaust pollution exists under a high vacuum is offered. To lessening and twist accuracy, discharge current, By reducing the electric charge current density received with th...  
JP3936139B2  
JP2007155669A
To provide a cold cathode ionization gauge capable of measuring pressure, in an instant after operation has started by providing a simple means for inducing discharge.In the cold cathode ionization gauge 1 comprises a positive electrode ...  
JP2007147344A
To provide a thin film Pirani vacuum sensor having high sensitivity in a high band from a high vacuum pressure to a low vacuum pressure which is lower by almost one atmospheric pressure, and a vacuum measuring device.At least one heater ...  
JP3957371B2
To provide a vacuum device by which the exhausting performance of the vacuum device can be kept in a good condition regardless of the temperature change of the sealing water to be supplied to a sealing water type vacuum pump. In a vacuum...  
JP2007113928A
To provide an ionization vacuum gauge that can make noise current which is generated extremely small, and easily and accurately measure all pressures in the region from an ultra-low vacuum to extremely-high vacuum.An electron gun section...  
JP3913770B2  
JP2007093579A
To provide a pressure measurement device and its pressure measurement method related to a vacuum chamber, more specifically, one using ultrasonic waves, in the vacuum chamber pressure measurement system.The device comprises the vacuum ch...  
JP2007085953A
To provide a vibration sensor which is not limited to the usable range, with simplified wiring, capable of alleviating the effects of signal transmittance noise, capable of high-occuracy reliable measurement and of measuring the degree o...  
JP3931294B2
To provide a detection device with a high sensitivity capable of detecting, with a high sensitivity, a detection object smaller in size than a detection object which a conventional art has targeted. The detection device is provided with ...  
JP2007051963A
To provide a thermal barometric pressure sensor which has barometric pressure sensing sensitivity, including barometric pressure of atmospheric pressure or higher and wide-range vacuum, ranging from low-vacuum region to high-vacuum regio...  
JP2007047910A
To provide a pressure/flow rate control system capable of easily controlling when a vacuum vessel is evacuated and a flow rate and gas pressure of the vacuum vessel is thereafter controlled at a certain level after charging gas into the ...  
JP2007047069A
To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influenc...  
JP2007033422A
To provide a strong and low-cost ionization vacuum gauge using a cold cathode with little gas release.A hot cathode in a hot cathode ionization vacuum gauge (for example, a hot cathode B-A type ionization vacuum gauge) is replaced to the...  
JP2007024849A
To provide an ionization gauge that outgases a small amount of gas and has a robust cathode.A hot cathode in a hot cathode ionization gauge (for example: hot cathode B-A type ionization gauge) is replaced by a cold cathode by a carbon na...  
JP2007501532A
The present invention offers the method and equipment for determining a terminal point in the case of a mutual periodic etching process or Time-Division-Multiplexing process. A substrate is placed into a plasma chamber and applied to the...  
JP2007017263A
To provide a sensing element, a vacuum gauge and a vacuum tube which can catch heat diffused 3-dimensionally with a 3-dimensional temperature sensing part, catch the 3-dimensional isothermal contour with the temperature sensing part, to ...  

Matches 451 - 500 out of 1,648