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WO/2024/074276A1 |
Methods, and corresponding systems for, determining one or more aberrations of a projection system (for example a projection system of a lithographic apparatus) are disclosed. One method comprises performing a phase stepping or phase sca...
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WO/2024/068961A1 |
A method for measuring an interference fringe period of interference fringes from two combined laser beams includes imaging the combined beams with first and second digital image sensor arrays to produce first and second images, where a ...
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WO/2024/055094A1 |
In a general aspect, a method includes interacting a beam of light with a vapor in a vapor cell. The vapor cell includes a body defined by a stack of layers that includes electrically conductive layers and electrically insulating layers....
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WO/2024/040335A1 |
Excitation used to produce luminescence is cancelled using interference with an excitation cancelling beam by controlling or setting a phase difference. An excitation beam and an excitation cancelling beam are produced from a common sour...
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WO/2024/036885A1 |
A calibration method for delay time (ti) nonlinearity of an optical delay system (14), comprising: first building a polarization Michelson interference measurement system, wherein a rotary optical delay system (14) comprises a rotary pri...
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WO/2024/037799A1 |
A wavelength of a tunable laser device is stabilized by providing a laser beam from a tunable laser source to an interferometer having a stable reference axis and to a gas absorption cell, scanning the laser beam between first and second...
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WO/2024/031747A1 |
A laser interference lithography system, which relates to the technical field of laser interference lithography. The system comprises: a laser device (1), an optical path system, a phase detection apparatus and a substrate (15), wherein ...
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WO/2024/005484A1 |
The present invention relates to a multi-mode shape measurement device and a multi-mode shape measurement method using same. The multi-mode shape measurement device is characterized by comprising: a light source; a selective interferomet...
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WO/2023/247125A1 |
A method of determining a physical quantity is disclosed. The method uses a sensor system configured to sample a plurality of positions in parallel, wherein sampling each position uses radiation incident on an object plane patterning dev...
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WO/2023/225456A1 |
A method for identifying three entangled photons includes generating a set of first, second, and third entangled photons correlated in time and interfering the first and second entangled photons based on a difference between a first opti...
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WO/2023/217872A1 |
A microwave synchronisation system comprising an oscillator configured to provide a microwave signal, and an RF cavity configured to resonantly enhance the microwave signal to form a resonantly enhanced electromagnetic field, an electro-...
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WO/2023/210115A1 |
In the present invention, at least three beams of light in a test pattern projected from an optical module 1 are acquired by a wavefront sensor 9, the degree of parallelism of each beam is calculated, and the posture of a display panel 5...
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WO/2023/174648A1 |
Disclosed is an illumination arrangement for providing at least one radiation beam for use as an illumination beam and/or reference beam in a metrology device. The illumination arrangement comprises at least one radiation beam modifier m...
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WO/2023/165667A1 |
Disclosed is a method for obtaining a transverse phase gradient of a wave field from at least a first and a second wavefield intensity map comprising the steps of; capturing at a first incoherent tilt aberration said first wave field int...
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WO/2023/158574A1 |
The present disclosure provides a unique, optically based analytical system that provides accurate measurements and detection of unknowns in an analyte that are direct, rapid, and have increased sensitivity in detection of substances wit...
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WO/2023/154060A1 |
Systems and methods for beam profile imaging by emitting a ray into one or more media; receiving a first signal corresponding to the ray at a first point; encoding a first matrix based at least in part on one or more of a location of the...
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WO/2023/135627A1 |
The purpose of the present disclosure is to reduce the amount of calculation and to perform real-time processing while streaming measurement data. In order to accomplish the aforementioned purpose, a signal processing method according ...
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WO/2023/120604A1 |
This measuring device comprises a light source unit, an optical element, and at least one imaging element. The light source unit is configured to emit a plurality of light beams having mutually different directions simultaneously onto a ...
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WO/2023/112372A1 |
A wavefront measurement device 1 comprises: a phase modulation unit 2 having a spatial light modulator 7 into which incoming light L0 enters; a pattern generation unit 3 that generates a phase pattern 11 to be inputted to the spatial lig...
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WO/2023/088860A1 |
The invention relates to a method for ascertaining a wavefront gradient, comprising: (a1) first irradiation of a transmission filter unit (4) with a light (2a, 2b), with a first angle (α) between the light (2a, 2b) and a main transmissi...
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WO/2023/088421A1 |
Disclosed are a method and apparatus for real-time vector analysis of an optical signal having a detection bandwidth greater than 1 THz. The method comprises: mapping the frequency spectrum of a signal to be detected to different time po...
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WO/2023/079741A1 |
This optical measuring method includes: a step for configuring an optical system for recording a hologram generated by modulating, using illuminating light and coherent reference light, object light obtained by illuminating a sample with...
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WO/2023/070378A1 |
A light wavelength measurement apparatus and method, and a light wavelength control device and a light-emitting system. The light wavelength measurement apparatus and method can be used for expanding a wavelength range which can be detec...
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WO/2023/062891A1 |
An optical heterodyne interference measurement device 1 comprises a beam generation unit 10, a beam splitter 21, a mirror 31, a first photodetector 41, a linear polarizing plate 42, a second photodetector 51, a linear polarizing plate 52...
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WO/2023/057353A1 |
Disclosed are a method and a device (10) for characterising a laser beam (12) of an ophthalmic laser system (14). The device (10) comprises a contact element (16) by means of which the device (10) can be coupled to the ophthalmic laser s...
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WO/2023/022091A1 |
The analysis system is equipped with an acquisition unit for acquiring a cell image that includes images of a plurality of cultured cells cultured in medium and an image analysis unit for analyzing the state of viability of the plurality...
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WO/2023/020706A1 |
Provided are embodiments of a method for photonic sampling of a test-waveform (20). The method comprises providing a sampling light pulse (22) and generating a local oscillator (24) by frequency multiplication of the sampling light pulse...
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WO/2023/020230A1 |
The present invention relates to the technical field of power transmission line safety control, and provides a standing wave half-wavelength determining method and apparatus in an OPGW optical cable, a device, a storage medium, and a com...
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WO/2022/249658A1 |
This dispersion measurement device comprises a pulse formation unit, light detection unit, and computation unit. The pulse formation unit comprises an SLM for presenting a phase pattern in which prescribed phase deviation for each wavele...
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WO/2022/249659A1 |
This dispersion measuring device comprises a pulsed laser light source, a pulse forming unit, a correlator, and a computing unit. The pulse forming unit forms a light pulse train including a plurality of light pulses having time lags bet...
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WO/2022/249660A1 |
This dispersion measurement device 1A comprises a pulse laser light source 2, pulse formation unit 3, light detection unit 4, control unit 5a, and computation unit 5b. The control unit 5a selectively outputs a first phase pattern and a s...
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WO/2022/226134A1 |
A method for in-situ wave front detection within an inspection system is disclosed. The method includes generating light with a light source and directing the light to a stage-level reflective mask grating structure disposed on a mask st...
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WO/2022/204518A1 |
Systems, devices and methods with improved wave front sensing and detection capabilities are described. One example wave front sensor includes a lenslet array that receives an incoming wave front, and a mask that is positioned at a focal...
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WO/2022/173848A1 |
Digital holography is one of the most widely used label-free microscopy techniques in biomedical imaging. Recovery of the missing phase information of a hologram is an important step in holographic image reconstruction. A convolutional r...
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WO/2022/173240A2 |
An optical measurement apparatus, according to one aspect of the present invention, comprises: a universal metasurface on which light is incident; a polarizations sensor which measures the polarization state of light passing through the ...
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WO/2022/170418A1 |
In a general aspect, a method is presented for increasing the measurement precision of an optical instrument. The method includes determining, based on optical data and environmental data, a measured value of an optical property measured...
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WO/2022/164027A1 |
A laser light source device on the basis of a micro-optic Mach-Zehnder interferometer according to the present invention comprises: a coupler receiving an input of pump light and coupling same to an optical fiber; a collimator collimatin...
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WO/2022/158957A1 |
Optical system for controlling optical aberrations incorporating coded diffraction patterns, comprising: a wavefront phase corrector device; beam splitter; image sensor; a wavefront sensor module, comprising signal processor; phase corre...
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WO/2022/147918A1 |
Disclosed is a high-accuracy interference wavelength measuring instrument, comprising an optical input port, a light shield, an off-axis parabolic mirror, a first flat glass, a second flat glass, at least two cylindrical lenses, and at l...
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WO/2022/147920A1 |
An optical wavelength measuring system for optical communication, comprising an optical input port (1), a light shield (2), an off-axis parabolic mirror (3), a first flat glass (4), a second flat glass (5), at least two cylindrical lense...
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WO/2022/140439A1 |
The subject matter of this specification can be implemented in, among other things, a system that includes a light source to produce a first beam and one or more first optical elements to impart an orbital angular momentum (OAM) to at le...
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WO/2022/132797A1 |
Wavefront sensors are provided herein. An aperture mask is configured to receive incident light the wavefront of which is to be measured and comprising irregularly spaced apertures that respectively transmit sub-beams of the incident lig...
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WO/2022/126198A1 |
The present invention relates to a method of reducing phase-error signal degradation in a characteristic spectrum produced by a Fourier Transform interferometer, comprising the steps of: (1) Receiving, upon the detector array, a light be...
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WO/2022/132496A1 |
A totagram is produced by an iterative spectral phase recovery process resulting in complete information recovery using special masks, without a reference beam. Using these special masking systems reduce computation time, number of masks...
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WO/2022/128892A1 |
The invention relates to a device (D) for measuring the power and wavelength of laser radiation by photoacoustic effect, comprising: - a cell (C) containing at least one gas (G) having an absorption line with a central wavelength λc; - ...
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WO/2022/121071A1 |
A wavefront modulation-based device and method for phase imaging and component detection. In view of the deficiencies of existing interferometry techniques with respect to twin image elimination, limit resolution, undersampling wavefront...
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WO/2022/100930A1 |
A measurement system (11), the measurement system comprising: a sensor apparatus (22); an illumination system (IL1) arranged to illuminate the sensor apparatus with radiation, the sensor apparatus comprising a patterned region arranged t...
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WO/2022/097726A1 |
This wavelength measuring device is provided with: a spectral diffraction means (3) for spectrally diffracting light emitted as a result of the excitation of a plurality of light-emitting element chips (101) included in a measurement tar...
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WO/2022/083735A1 |
A method for calculating a Ronchi shear interference image in a photolithography projection objective (2). In the method, a strict photolithography vector model is used for calculation during the process of transmitting light, emitted by...
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WO/2022/084317A1 |
The invention relates to a binary intensity mask (100) for use in an EUV system working with EUV radiation, comprising a substrate (110) and a mask structure (140), which is applied to the substrate and contains absorber material. The ma...
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