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WO/2004/021068A1 |
A condenser comprising a plurality of light sources (10, 20), and a light synthesizing element (30). These light sources (10, 20) comprise semiconductor laser array stacks (12, 22), collimator lenses (16, 26), and beam converters (18, 28...
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WO/2004/021086A1 |
The invention relates to an attenuator for attenuating electromagnetic radiation of wavelengths unequal to a used wavelength, with at least one grating element, with the grating element comprising grating grooves resulting in at least on...
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WO/2004/017124A2 |
The invention concerns a polarization converting system (100) and a method for adjusting same comprising an array (110) of polarizing beam splitters and at least one first lens (115) and a second lens (120) in cascade for receiving non-p...
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WO/2004/010483A1 |
An illuminating optical system substantially free from micro-channel in a diffractive optics disposed on the optical path of a laser beam having a high energy density. An illuminating optical system having a light source (1) for supplyin...
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WO/2004/008507A1 |
An optical integrator having a property of lessening the influence of the manufacture variation of a plurality of small refraction surfaces integrally formed by, e.g., etching on the illumination distribution. The optical integrator (8) ...
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WO/2004/006308A1 |
An exposing device characterized by comprising an illuminating optical system having a light source array where discrete light sources are arranged one- or two-dimensionally, a focusing optical system for focusing the light beams emitted...
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WO/2004/006021A2 |
The invention relates to an optical device for illuminating an object of which an image should be formed with the aid of corresponding optics. The inventive device comprises a light source (210), which is arranged in the vicinity of or i...
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WO/2003/083579A1 |
The invention relates to a collector unit for lighting systems having a wavelength of = 193 nm, preferably in the range of EUV wavelengths, comprising at least one mirror dish which has an optical effect. The beams impinge at an angle of...
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WO/2003/081321A1 |
Lighting equipment using lens arrays and capable of eliminating such a trouble that the peripheral parts of an illuminating area become extremely dark, comprising a light generating means (11), a condensing means (12) for condensing outg...
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WO/2003/075089A1 |
A projection display device, comprising a light source (101), an illuminating optical system (102) forming illuminating light, a reflective light bulb (106) forming an optical image by reflecting the illuminating light, a projection opti...
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WO/2003/075068A1 |
The invention relates to a lighting system that comprises a light source (2001) and a field plane (2030) for wavelengths < 193nm, especially < 126nm, especially preferred wavelengths in the EUV range. The inventive system further compris...
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WO/2003/062902A1 |
An image display unit comprising an illuminating optical system (2) for illuminating a light bulb (1) having a reflection electrode, and a projection lens (3) for forming the image of the light bulb (1), wherein a reflection sheet (4) is...
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WO/2003/050584A1 |
An optical coupling element for use in large numerical aperture collecting and condensing systems. The optical coupling element includes a curved surface such as a lens at the output of a tapered light pipe (TLP). The TLP in combination ...
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WO/2003/041134A1 |
An illumination optical device capable of realizing, with a simple configuration, illumination conditions different from each other in two directions orthogonal to each other on an illuminated surface. This illumination optical device ha...
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WO/2003/032048A1 |
A projection display device, comprising a light source (1), an illumination means (8), a reflection means (9), a reflection light modulation element (10), a lens element (11), and a projection means (12), wherein the optical axis (8a) of...
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WO/2003/032049A1 |
A small projection type display unit capable of preventing the overlapping of the optical path of an incident light on that of an outgoing light in a reflection type light bulb and providing high−picture−quality projection images, an...
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WO2002099534A9 |
The invention relates to a lighting system for wavelengths of 100 nm having an object plane and a field plane. Said invention is characterized in that the lighting system comprises at least one grid element having a plurality of individu...
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WO/2003/014833A2 |
The invention relates to a collector for a projection printing installation, which is operated in a scanning mode along a scanning direction with a wavelength $m(F) 193 nm, preferably $m(F) 126 nm, more preferably with extreme UV wavelen...
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WO/2003/001291A1 |
An illumination optical unit comprising an optical system (13−16) for applying light from a light source lamp (11) to an object (22) uniformly and&sol or focusingly, a reflector (1) for reflecting an output light from the lamp (11) to ...
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WO/2002/086617A2 |
A light recovery system for a projection display with a reflector (102) having a first focal points (104) and a second focal point (106). A source (108) of electro-magnetic radiation (110) is disposed proximate to the first focal point (...
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WO/2002/084397A2 |
A display apparatus projects a two dimensional image onto a display screen and includes illumination optics, a light modulator, separating optics and scanning optics. The light modulator is optically coupled to the illumination optics su...
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WO/2002/084339A2 |
The invention relates to a projection display system comprising two lamp sources (32,46) each having a different geometric aligning means. By combining a first light source (32) having an annular cross-sectioned beam and a second light s...
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WO/2002/075225A2 |
A nonimaging light concentrator system including a primary collector of light, an optical mixer disposed near the focal zone for collecting light from the primary collector, the optical mixer having a transparent entrance aperture, an in...
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WO/2002/073535A2 |
Imaging device is trained (e.g., panned, zoomed, focussed) on environmental navigation features, such as street sign or house number, by operator input and computer control (620). Optical illumination in visible, infrared, ultraviolet, o...
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WO2000022344A9 |
An electromagnetic radiation source (SO), such as an arc lamp, is located at a point displaced from the optical axis of a concave toroidal reflecting surface (M1). The concave primary reflector (M1) focuses the radiation from the source ...
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WO/2002/065482A2 |
The invention relates to a collector for lighting systems having a wavelength $m(F) 193 nm, preferably $m(F) 126 nm, more preferably EUV wavelengths for receiving light from a light source via an aperture on the side of the object, and f...
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WO/2002/063390A2 |
An illumination engine for a projection display using a tapered light pipe(718) including a reflector having first and second focal points. A source of electro-magnetic radiation disposed proximate to the first focal point of the reflect...
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WO/2002/057830A1 |
A zoom optical system capable of ensuring a required magnification without substantially changing positions of an object plane and an image plane and positions of an entrance pupil and an exit pupil when a focal length is changed. When t...
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WO/2002/044766A2 |
The invention relates to a concentrator for concentrating incident light on a predetermined area or on a predetermined volume with an entry area and an exit area. In order to provide a static concentrator that is capable of concentrating...
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WO/2002/031592A1 |
A conventional illumination optical unit has a drawback that unevenness of brightness appears in the inclining direction when an area inclining with respect to the optical axis is illuminated. The inventive illumination optical unit comp...
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WO/2002/027402A2 |
The invention concerns an illumination system, particularly for microlithography with wavelengths $m(F) 193 nm, comprising: a primary light; a first optical component; a second optical; an image plane component; and an exit pupil; wherei...
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WO/2002/027401A2 |
The invention concerns an illumination system, particularly for microlithography with wavelengths < 193 nm, comprising: a primary light source; a first optical component; a second optical component; an image plane; and an exit pupil; whe...
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WO/2002/027405A2 |
The invention concerns an illumination system, particularly for microlithography with wavelengths $m(F) 193 nm, comprising: a primary light source; a first optical component; a second optical component; an image plane; and an exit pupil,...
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WO/2002/027400A2 |
The invention concerns an illumination system, particularly for microlithography with wavelengths $m(F) 193 nm, comprising: a primary light source (8201, 8401); a first optical component; a second optical component (8221, 8421); an image...
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WO/2002/027406A2 |
The invention concerns an illumination system, particularly for microlithography with wavelengths ≤ 93 nm, comprising: a primary light source; a first optical component; a second optical component; an image plane; and an exit pupil; wh...
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WO/2002/025329A2 |
An optical coupling element for use in large numerical aperture collecting and condensing systems. The optical coupling element includes a lens (503) having a curved surface and a tapered light pipe (504). The curved surface reduces the ...
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WO/2002/021734A1 |
An optical wireless communication receiver comprises a dielectric totally internally reflecting concentrator (DTIRC) (1) having a convexly curved receiving surface (2) for receiving incident radiation over a wide field-of-view and a conc...
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WO/2002/014924A1 |
A relay image optical system which is reduced in size and weight with fewer lenses and without compromise in required optical characteristics, which forms an image on a first plane (10) onto a second plane (M), and which comprises, in th...
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WO/2002/010855A2 |
Systems and methods for providing illumination suitable for imaging devices such as laser projection systems. In one embodiment, a highly collimated (e.g., laser light) beam is passed through a holographic diffuser to create a well defin...
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WO/2002/001298A1 |
A scanning pattern generator and a method for microlithographic multi-beam writing of high precision patterns on a photosensitive substrate (11), the system comprising a light source (1), preferably a laser, for generating at least two l...
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WO/2001/098706A1 |
An inexpensive illuminator comprising light-emitting diodes prevented from failing because of the heat of a soldering iron, having a small size, emitting an increased intensity of light, and assembled easily. A large number of light emit...
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WO/2001/098760A1 |
An illumination device for inspection by which a line-shaped light having a sharp outline can be obtained with a simple structure. The illumination device for inspection comprises a plurality of light emitting diodes (2) whose optical ax...
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WO/2001/084833A1 |
A projection device comprising at least one light source, at least one light-modulation panel preceding the light source, and polarization-separating means arranged between said light source and said light-modulation panel for separating...
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WO/2001/080618A2 |
The invention relates to an optode for picking up and relaying endogenous cell light, comprising a paraboloid reflector (1) in whose focal point the pick-up end of a light pick-up element (2) is located.
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WO/2001/073487A2 |
A condensing and collecting optical system includes a first reflector (20) and second reflector (30). The first and second reflectors and includes a portion of an ellipsoid of revolution having two focal points (24, 26) and an optical ax...
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WO/2001/069300A2 |
A highly efficient optical device comprises two opposing active non-spherical optical surfaces defined by a two-dimensional representation that is symmetrically extended to provide a three-dimensional device. A focal area, spaced apart f...
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WO/2001/055771A2 |
Focusing system of the light beam for a videoprojector comprising at least an image microforming device DMD (Digital Micromirror Device); the main feature of the system consisting in that it comprises at least an aspheric lens associated...
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WO/2001/053871A2 |
An in-vivo tissue inspection device provides for increased signal levels and the ability to discriminate between normal and abnormal tissues through the use of an exogenous fluorescent or fluorogenic reagent. The device reduces the costs...
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WO/2001/040706A1 |
The invention relates to a luminaire (1) suitable for accommodating a light source (2) which is situated substantially in a first plane (V1), comprising an optical element (3) which is situated substantially in a second plane (V2). The o...
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WO/2001/027962A2 |
Various lamp systems are disclosed which effectively utilize light from an aperture lamp (3). Lamp systems are respectively configured to perform various types of light recapture including etendue recycling, polarization recycling, and/o...
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