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Matches 501 - 550 out of 3,384

Document Document Title
JP6080875B2  
JP2017032923A
【課題】小型で光利用効率が高い照明光学系 を提供する。【解決手段】照明光学系23は 、光源1からの光束に光源像を形成させる第 1の光学系21と、第1の光学系からの...  
JP2017032964A
【課題】 OFF状態の正反射光が鏡胴に照射されるこ とにより該鏡胴が発熱する現象を阻止し、解 像の劣化と迷光を抑制し得る光学系を提供す る。【解決手段】 照明光学系...  
JP2017027903A
[Subject] A lighting installation with high light use efficiency is provided. A projector provided with the light equipment is provided. [Means for Solution] A light source array which has a mounting board which has a mounting side, and ...  
JP6072177B2  
JP6069941B2  
JP2017022035A
【課題】光源からの光の利用効率を向上させ ることができ、また、複数の投光素子を、被 照射面における特定範囲をそれぞれ投光する ように高精度に位置決め調整しつつ、所...  
JP2017022088A
【課題】操作しやすく、低コストであると同 時に、照射領域に色陰を形成せずに、均一な 照射および高い光学効率を実現することがで き、照射色温度を変化させることができ...  
JP2017015836A
[Subject] Offer of all the circumference illumination-light study members which utilization efficiency of light is high, intensity of light can be bright almost uniformly, it is hard to produce halation, it can illuminate a candidate for...  
JP2017016854A
[Subject] A lighting installation which can illuminate a user uniformly efficiently by few light sources is provided with a thin shape. [Means for Solution] Inner frame 5 is inserted in an inside of frame 3. Optical diffusion board 9 is ...  
JP2017009734A
[Subject] Light equipment with high light use efficiency is provided. A lighting installation provided with the light equipment is provided. A projector provided with the lighting installation is provided. [Means for Solution] A light em...  
JP2017009690A
[Subject] Light equipment by which influence by the photoelasticity effect was prevented is provided. A projector provided with the light equipment is provided. [Means for Solution] Light equipment of the present invention is provided wi...  
JP2017009779A
[Subject] Provide the projector using the projection optical system which can perform back focus adjustment and alignment easily, and the projection optical system concerned in application to a projector. [Means for Solution] Back focus ...  
JPWO2014084143A1
複数の発光素子を1つの基板に搭載したデバ イスであったとしても、単位面積当たりの光 強度を高くすることができる光照射デバイス を提供する。相対的に移動する対象物に...  
JP2017003681A
[Subject] An optical wheel device which raised a capacity factor of light which carried out diffuse transmission with an optical wheel, and light equipment and a projection device provided with this optical wheel device are provided. [Me...  
JP2017004025A
[Subject] An illumination-light study system which has high flexibility about change of shape of pupil intensity distribution, and a polarization state without being accompanied by exchange of an optical member. [Means for Solution] An i...  
JP2017004026A
[Subject] Supply and recovery of a fluid can be performed in the state of a request, and an exposure device which can suppress degradation of a pattern image projected on a substrate is provided. [Means for Solution] An exposure device i...  
JP2017003847A
[Subject] Though you have a lens of comparatively small number of sheets, provide the optical system for projecting and projector which can cover a wide variable power range. [Means for Solution] Lens F1 which is from one right lens whic...  
JP2017004697A
[Subject] Though it is narrow distribution for Distribution , a lighting installation which can obtain illumination light excellent in appearance easily is provided. [Means for Solution] Lighting installation 10 is provided with light so...  
JP2016225182A
[Subject] A large LED lighting system of an input is realized without changing an LED output. [Means for Solution] The present invention is provided with LED1 and hemisphere mirror 3, and LED1 is, The light-emitting part has a plane and ...  
JP2016224375A
[Subject] An exposure device advantageous to adjusting light volume on a substrate is provided. [Means for Solution] A braid for forming an opening which is an exposure device which exposes a substrate, operates light from a light source...  
JP2016541009A
【課題】自発光型コントラストデバイスのア レイを備えるプログラマブルパターニングデ バイスを含み得る装置を提供する。【解決手 段】露光装置は、基板(17)を保持す...  
JP2016541021A
マイクロリソグラフィ投影露光装置(10) の照明系は、空間分解方式で入射光を透過又 は反射する空間光変調器(52)上に光を向 ける瞳形成ユニット(36)を含む。対...  
JP6053748B2  
JP6053737B2  
JP2016218381A
[Subject] A lighting installation for proximity exposure which can compensate for variation in size of an exposure pattern resulting from variation in a gap between a work and a mask with easy composition, a proximity exposure device, an...  
JP6049043B2  
JP6050618B2  
JP2016212434A
[Subject] An illumination optical device which can form ring band-like lighting pupil distribution of a peripheral direction polarization state is provided suppressing a light volume loss satisfactorily. [Means for Solution] An illuminat...  
JP6044611B2  
JP2016206247A
[Subject] Art advantageous to the improvement in accuracy of amendment of exposure light volume unevenness and coexistence of a throughput is provided. [Means for Solution] An illumination-light study system which illuminates a field to ...  
JP2016206246A
[Subject] Art advantageous to improvement in accuracy of amendment of exposure light volume unevenness and coexistence of a throughput is provided. [Means for Solution] An illumination-light study system which illuminates a field to be i...  
JP2016206234A
[Subject] An aperture for modification lighting and an exposure device which can be easily applied to the conventional exposure device are provided. [Means for Solution] Aperture 20 for modification lighting which forms gray tone illumin...  
JP6041304B2  
JP2016200787A
[Subject] A light irradiation device which can adjust a wavelength and light volume of illumination light is provided being able to obtain sufficient light volume used as substitution of a discharge lamp, and holding the homogeneity of i...  
JP2016537683A
Including a transparent lens in which the present invention defines optic volume, the transparent lens is related with an optical system containing the 1st reflective lens which orients light so that light which carried out demand may re...  
JP6034845B2  
JP2016197600A
[Subject] Provide light equipment and an image display device which can attain high-intensity-ization, suppressing enlargement of a device. [Means for Solution] Light equipment concerning one form of this art is provided with the followi...  
JP6025835B2  
JP6028633B2  
JP2016192343A
[Subject] A short arc Flach lamp which has in a housing a pair of starting auxiliary electrodes arranged inside an arc tube among a pair of a main electrode and the pair of main electrodes, While having a reflective mirror reflected belo...  
JP2016535313A
An illumination-light study unit for EUV projection lithography functions, in order that an object recognition field (3) of a downstream image formation optical unit (6) may illuminate an illuminated viewing field arranged inside. An obj...  
JP2016192264A
[Subject] A subject of the present invention is having an irradiation object face of high illumination homogeneity, and having a small optical radial plane compared with an irradiation object face, and providing a tabular imaging optics ...  
JP2016191844A
[Subject] It aims at being able to emit fluorescence at high efficiency and providing fluorescence light equipment which can constitute a small device from an easy structure. [Means for Solution] It has an excitation light emitting part ...  
JP6022759B2  
JP6023777B2  
JP2016188923A
[Subject] An exposure device and an exposure method which can attain efficient-izing and reinforcement of a spatial-light-modulation element are provided. [Means for Solution] Micro lens array 142 by which a micro lens in which exposure ...  
JP2016188878A
[Subject] An illumination-light study system which can obtain high illumination realizing illumination homogeneity in a lighting field, and homogeneity of the irradiation angle characteristic. [Means for Solution] The 1st light-emitting ...  
JP2016186892A
[Subject] A bundle of rays can be extracted thinly and small light equipment and a lighting installation, and a projector are provided. [Means for Solution] The 2nd light source unit 21B that ejects bundle of rays K2 containing the 1st l...  
JP6016169B2  

Matches 501 - 550 out of 3,384