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Matches 501 - 550 out of 2,825

Document Document Title
JP5352694B2  
JP5352989B2  
JP2013235739A
To provide a lighting device capable of suppressing color irregularities, in one having white LED light sources arranged in which blue LED elements are eccentrically arranged.A lighting device 10 is provided with a plurality of white LED...  
JP2013541808A  
JP5338863B2  
JP5333528B2  
JP5333429B2  
JP5333322B2  
JP5337304B2  
JP2013540350A  
JP2013225673A
To provide a method and apparatus for determining apodization properties of a projection system in a lithographic apparatus.The method comprises allowing light from a given point in an illumination field to pass through the projection sy...  
JP5326259B2  
JP5327658B2  
JP2013218235A
To provide a projector that can make brightness of a projecting image uniform and improve light utilization efficiency.The projector comprises: a light modulation device 400R that includes a light source device, a lens integrator optical...  
JP2013219381A
To provide a device 1 for transferring a structure provided in a mask 2 onto a substrate 3.A device comprises: at least one illumination device 9 for uniformly irradiating a part of a mask 2; a mask holding device 7 for holding the mask ...  
JP5322331B2  
JP2013214030A
To provide a homogenizer for homogenizing light after primary concentration, which has a smaller moment of a homogenizer optical system and suppresses reduction in power generation efficiency due to displacement of an optical axis of the...  
JP5315322B2  
JP2013211558A
To provide an illumination optical device and a projection exposure device capable of reducing light quantity loss when illuminating a mask such as a reticle with illumination light in a prescribed polarization state.An illumination opti...  
JP5308275B2  
JP5308638B2  
JP2013198547A
To prevent the unevenness of color arising from differences in radiation angles of a plurality of semiconductor light sources.An endoscope light source device includes first-third light source modules 31-33. The light source modules 31-3...  
JP5302220B2  
JP2013195821A
To provide a light source device that can miniaturize a light guide optical system of blue light for blue image projection, and to provide a projector device including the light source device.A wheel 34 is provided with a prism 342 forme...  
JP2013195501A
To provide a laser emitting device and video display device capable of reducing speckle noise, having less vibration sound, and suitable for downsizing.A laser emitting device 1 includes a laser source 2 emitting a laser beam, a uniformi...  
JP2013195838A
To provide a light source device able to switch the optical path of blue light in time division without forming a phosphor plate in the shape of a wheel and to provide a projector device equipped with the same.A wheel 35 is disposed in t...  
JP2013190760A
To provide an illuminator for a microscope capable of easily switching critical illumination and Koehler illumination with improved uniformity of illumination than before in a simple composition.An illuminator for a microscope has: a fir...  
JP2013190674A
To provide a projector that can suppress occurrence of thermal damage and thermal degradation and is excellent in reliability.A projector comprises a first light source section 50A and a first optical element 60A. The first optical eleme...  
JP2013191858A
To provide an illumination optical device capable of reducing light quantity loss when lighting up a mask such as a reticle with illumination light in a predetermined polarized state, and a projection aligner.An illumination optical devi...  
JP5296382B2  
JP2013186338A
To provide a laser expand optical system capable of removing speckle, and simultaneously illuminating a wide area evenly without lowering a luminous intensity.A laser expand optical system 1 includes: an input lens 2 for condensing injec...  
JP5295468B1  
JP5293689B2  
JP2013182207A
To provide a projector that can suppress occurrence of illuminance unevenness and is excellent in display quality.A projector comprises: a solid light source 52 for emitting linearly polarized light; a birefringent element 60 for convert...  
JP5287113B2  
JP5287114B2  
JP2013535105A  
JP2013178290A
To provide a light source device capable of being mounted on a three-plate type projection type display device which uses a phosphor as a light source.A semiconductor laser 1 emits excitation light. A reflection type phosphor assembly 42...  
JP2013179305A
To provide an exposure device enabling the size reduction thereof and mask-less exposure with a stable operation and to provide an exposure device and exposure method enabling highly accurate exposure through mask-less exposure with resp...  
JP2013174844A
To provide an equal-magnification reflection-type imaging optical system that enables reflection light from a measured thin film surface of a predetermined wavefront aberration and a broad frequency band to be imaged on a light receiving...  
JP2013174905A
To provide an endoscope light source optical system capable of handling respective observation methods, preventing enlargement of a light source device and securing brightness.A light source optical system guiding light from a light sour...  
JP5283928B2  
JP5282290B2  
JP5282669B2  
JP2013171125A
To provide a projector optical system that completely shields against light reflected from a prism face.In a projector optical system that decomposes or composes light by a beam splitter and reflects the light by a DMD, thereby projectin...  
JP2013165134A
To certainly and quickly optimize pupil luminance distribution so as to obtain an image formation performance sufficiently similar to a desired image formation performance.A method includes: a first step of deriving variation in an OPE v...  
JP2013533615A  
JP5267029B2  
JP5268428B2  
JP5268333B2  

Matches 501 - 550 out of 2,825