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Patent Searching and Data


Matches 501 - 550 out of 1,695

Document Document Title
JP2009260337
To provide an illumination optical system capable of adjusting a pupil intensity distribution at each point on the planes-to-be-illuminated approximately uniform, respectively.The illumination optical system for illuminating planes-to-be...  
JP2009251559
To provide an optical element which dispenses with alignment between a secondary optical source part and a tapered rod array, and can emit homogenized light upon emission from an emission surface at a prescribed angle with respect to inc...  
JP2009244521
To provide an optical article having superior optical characteristics of a quartz substrate and exhibiting various functions by a fine convexo-concavo shape on the surface and a method of manufacturing the same.The optical article includ...  
JP2009244360
To radiate illumination light having high directivity and uniform brightness distribution, while enhancing the utilization efficiency of light, in a light pipe 1 which allows a light from a light source impinging from an incident opening...  
JP2009244316
To provide a compact light guide lens having excellent optical performance, and which is efficiently molded in a short processing cycle time.A first light incident surface 2, a second light incident surface 3, a third light incident surf...  
JP2009217060
To provide a projector device having a condenser lens group, which has high efficiency of condensing light from a light source.The projector device 10 is constituted of: the light source 1; a display element 6 having a rectangular displa...  
JP2009212540
To simultaneously transfer various pitch patterns, each with high a resolution.An exposure apparatus includes an illuminating optical system 12 for illuminating a reticle R with illumination light IL, and a projecting optical system PL t...  
JP2009205011
To provide an illumination optical system that can form an illumination area (for instance, a circular-arc shaped illumination area) having uniform illuminance while suppressing the decrease of illumination efficiency.The illumination op...  
JP2009206227
To provide an illumination optical system capable of excellently illuminating an arcuate area through a small number of mirrors.The illumination optical system includes a pair of fly-eye mirrors 211 on which light from a light source is ...  
JP2009198524
To provide a columnar solar lens made of a transparent material and capable of condensing the sunlight reaching the whole surface of the solar lens from all the directions and all the altitudes on a bottom face of the lens.This solar len...  
JP2009198736
To make diverging light emitted from a light source enter a light guiding member highly efficiently in an illuminating device.The illuminating device 1 includes: a light source 2 that emits a diverging light; the light guiding member 4 h...  
JP2009192891
To provide a compact illuminating optical system that achieves both brightness and high contrast.The illuminating optical system 3 includes: integrate optical systems 11a, 11b that convert the distribution of the illumination of light fr...  
JP2009192789
To provide a lighting optical system that is easily manufactured and emit an illuminating light suitable for image display by improving speckle noise or spatial light intensity distribution, and to provide a projection image display appa...  
JP2009194159
To provide an optical unit capable of contributing to the equalization of illumination distribution of light to be emitted, and to provide an illumination optical system, an exposure apparatus and a device manufacturing method.A first op...  
JP2009194107
To improve calculation accuracy of a lithography simulator.A database generation method has a step S1002, in which an effective light-source shape is calculated, while changing a plurality of conditions settable in an illumination optica...  
JP2009186942
To achieve the performance improvement and cost reduction of a solar lens capable of condensing the sunlight in a prescribed range with the lens staying still irrespective of the position of the sun, as there is a need for constantly all...  
JP2009181109
To provide a condenser lens system having compact structure, which is incorporated in a narrow space and selectively emits inspection light of a specified wavelength region, and an illuminator.The condenser lens system condenses waveleng...  
JP2009175741
To provide an illumination apparatus and a projection display for suppressing the increase in cost of the entire device even when using light beams of four or more colors.The illumination apparatus includes: a light source 10 emitting wh...  
JP2009162984
To provide an illumination device capable of easily forming an irradiation area and uniforming light quantity distribution, and to provide an image display device and a projector using the illumination device.The illumination device comp...  
JP2009162467
To provide a light-heat convertor effectively collecting light energy of the sun.In the light-heat convertor 1 including at least one outer sleeve 12, and at least one condensing lens 14, at least one through-hole 22 is opened in a pipe ...  
JP2009157379
To provide an uncomplicated decohered laser light production system with high energy efficiency.The decohered laser light production system is provided. The decohered laser light system includes a laser source. The system further include...  
JP2009145843
To provide a microscope illumination optical system that can change the height of an eyepiece unit, by extending/shortening the optical system of a microscope with a method that will not affect the optical performance.The microscope illu...  
JP2009130091
To provide an illumination optical device capable of adjusting a ratio of internal diameter to external diameter continuously in a wide range.The illumination optical device for applying luminous flux from a light source to a surface to ...  
JP2009130065
To provide an exposure apparatus for highly accurate exposure control.The photolithography machine includes a lighting optic system for lighting a reticle by means of a light flux from a light source and a projection optic system for pro...  
JP2009128695
To provide an optical system in which efficiency of bringing out fluorescent light, emission light, illumination light or the like emitted from a light-emitting body can be significantly improved while reducing as much as possible a loss...  
JP2009130071
To provide an illumination optical system achieving high-grade resolution with a simple configuration, and to provide an exposure apparatus.In the illumination optical system that is used for the exposure apparatus for exposing a pattern...  
JP2009128444
To provide an optical device which can be made compact in the whole device, in which accuracy of disposing each optical surface can be fixed to a high level without adjusting the position upon assembling, and fluorescent light, emission ...  
JP2009130367
To provide a reflective lighting technology that reduces an adhesion amount of particulates such as debris to the reflective surface.A lighting optical device for illuminating a surface being irradiated with exposure light EL includes a ...  
JP2009123888
To provide a lighting optical device capable of dimming illuminance of the light output from a light source, across such wide range as up to the illuminance requested for various measurements on a substrate side, while suppressing change...  
JP2009124143
To provide a lithographic apparatus which is simpler and lower in cost than those of prior art, using a conventional filter having sub-micron sized dots.In this system and method for use of a lithographic apparatus having a substrate and...  
JP2009117561
To improve controllability of a pupil luminance distribution formed on a lighting pupil surface.A illuminator which forms a predetermined light intensity distribution on the lighting pupil surface (5b) based upon light from a light sourc...  
JP2009116331
To provide a mixed light apparatus for application to liquid-crystal displays and lighting systems.The mixed light apparatus includes at least two light collectors and at least two light sources. Each of the light collectors has a first ...  
JP2009117671
To provide an illumination optical device forming a pupil intensity distribution of a desired shape and desired illumination and obtaining illumination conditions of great variety.The illumination optical device has: a spatial light modu...  
JP2009117812
To provide an illumination optical system capable of easily forming a desired light intensity distribution in which illumination non-uniformity is not distinctive at the pupil position of the illumination optical system or at a position ...  
JP2009117801
To provide illumination optical system which materializes a variety of illumination conditions and improves productivity of a device when the illumination optical system is applied to an exposure apparatus.The illumination optical system...  
JP2009117672
To provide an illumination optical system that saves space in an optical path between a spatial light modulator and an optical integrator and obtains illumination conditions of great variety.The illumination optical system irradiates a s...  
JP2009107922
To provide a manufacturing method of a mass-producible lens array allowing cost reduction with fewer production steps, to provide a lens array, to provide an illumination optical device, and to provide a projector.Molten glass G is set a...  
JP2009111175
To provide an illumination optical apparatus capable of correcting an illuminance distribution in an irradiated area irradiated with exposure light on an irradiated surface of an irradiated body, to provide an exposure apparatus, and to ...  
JP2009111369
To provide an illumination optical apparatus, an exposure apparatus, and a device manufacturing method, that can contribute to higher output of a light source and improvement in manufacturing efficiency of a device even when spatial ligh...  
JP2009098493
To provide a projector in which an adverse effect on an optical performance aspect, generated due to compactness, is reduced.A reflective liquid crystal display element 224 has a rectangular display region 240 which is oppositely arrange...  
JP2009099879
To provide: an illumination optical system accurately forming an effective light source shape; an exposure device; and a device manufacturing method.The illumination optical system illuminating an illumination object surface by using lum...  
JP2009099696
To provide an illumination optical system capable of stably keeping an optical characteristic of an optical member like, such as a diffractive optical element.The illumination optical system includes a light-transmitting optical system 1...  
JP2009080468
To obtain a laser beam synthesizer which can efficiently synthesize laser beams with a simple structure and at low cost.The laser beam synthesizer comprises a plurality of laser light sources 11 having anisotropy in the angle of laser be...  
JP2009071011
To provide an optical integrator, capable of uniforming an illumination distribution on an irradiated surface by suppressing the influence due to the difference in surface shape of each refractive surface, when it is applied to, for exam...  
JP2009071010
To provide an illumination optical system capable of adjusting the pupil intensity distribution, while suppressing the loss in optical quantity to a low level.The illumination optical system for illuminating surfaces (M, W) to be illumin...  
JP2009063619
To provide an illumination device and a projection image display device in each of which illuminance non-uniformity of illumination light on an optical modulation element can be smoothly and effectively suppressed.The illumination device...  
JP2009060139
To provide a light source unit capable of collecting DPP divergent light while reducing the adherence of debris to a reflecting surface.The light source unit is provided with a light source main body for bringing a target material into a...  
JP2009055060
To provide a lithographic apparatus and method for projecting a patterned beam onto a substrate.An illumination system supplies a projection beam of radiation. A pattern is imparted to the projection beam, for example by an array of indi...  
JP2009054325
To provide an illumination light source employing a coherent light source, which suppresses the influence of speckle in a simplified arrangement.The illumination light source comprises: a surface emitting laser 2 in which a plurality of ...  
JP2009044147
To provide a lighting optical device which can illuminate a mask as an irradiated surface when it is applied to exposure equipment, e.g. an EUVL, without arranging a plane mirror in the optical path between a lighting optical system and ...  

Matches 501 - 550 out of 1,695