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Matches 501 - 550 out of 3,201

Document Document Title
JP2016517026A
An illumination-light study unit (4) for projection lithography functions as illuminating an object recognition field (5) which can arrange an object (7) imaged by illumination light (16). An illumination-light study unit (4) has a view ...  
JP2016103025A
[Subject] An exposure method and a device for enabling transfer of a pattern of various pitches to high resolution simultaneous respectively are provided. [Means for Solution] It is an exposure device which has illumination-light study s...  
JP5928653B2  
JP5928632B2  
JP5927555B2  
JP2016099390A
[Subject] An illumination-light study system and an image display device which can raise a contrast ratio of picture light by reducing diffraction light are provided. [Means for Solution] An optical equalization element (14) which equali...  
JP2016100461A
[Subject] Large-sized-izing of an illumination optical device accompanying an increase in the number of optical components and complication of imaging optics and big-ticket-ization are avoided, and an illumination optical device in which...  
JPWO2013191255A1
照明装置は、長方形の第1面、内面、及び長 方形の第2面を有し、前記第1面に入射した 光が前記内面での多重反射を介して前記第2 面から出射する、光インテグレータと、...  
JP2016095523A
To provide catadioptric projection objectives that have tilted deflecting mirrors which allows imaging of patterns including sub-patterns oriented in various directions.A first deflecting mirror has a first reflective coating with reflec...  
JP2016086060A
[Subject] Without consuming a memory of a computer excessively, also when a part of shape of a mask pattern is changed, an image formation pattern simulation system and an image formation pattern simulation method which can carry out a s...  
JP2016085472A
[Subject] An illumination-light study system which has high flexibility about change of shape of pupil intensity distribution, and a polarization state without being accompanied by exchange of an optical member. [Means for Solution] An i...  
JP5918858B2  
JP2016513817A
[Subject] As there are novelty and unobviousness to a prior art, the temperature of a reflector (for example, mirror) is controlled. [Means for Solution] An array of thermoelectrical heat pump which has respectively the 1st end that is i...  
JP2016075936A
To provide a device for making laser radiation uniform in the visual field of illumination, and to provide a method for manufacturing the device.A device for making laser radiation uniform in the visual field of illumination includes a f...  
JP5914254B2  
JP2016071353A
[Subject] The object of the present invention is to provide an optical apparatus which can realize smaller light equipment, light equipment using this, and a projection type display, controlling decline in utilization efficiency of light...  
JP2016072543A
[Subject] Although generating of a failure by a pattern is suppressed, provide a light irradiation device for peripheral exposure devices which can irradiate with light which has the irradiation intensity distribution which rises steeply...  
JP2016065923A
[Subject] Even when a point of a light source emitting light is large, control a fall of condensing nature in a condensing point. [Means for Solution] It extends to near the euphotic point at least from LED package 24A containing a plura...  
JP5911898B2  
JP5910324B2  
JP5909369B2  
JP2016063185A
[Subject] Enlargement is avoided and an illumination optical device advantageous to illuminating a field to be illuminated high illumination and uniformly is provided. [Means for Solution] Illumination optical device 101 is the 1st angle...  
JP2016061851A
[Subject] A lighting installation and a projector which can be made to generate fluorescence efficiently are provided. [Means for Solution] A condensing optical system which is established between a light source which emits excitation li...  
JP2016057644A
[Subject] Even if it increases the number of elements used as a light source, an illumination-light study system is aimed compact at offer of the illumination-light study system and image display device which can be constituted. [Means f...  
JP2016058591A
[Subject] An illumination optical device which makes shape of an image of a secondary light source easily desired ring belt shape and circle shape is provided suppressing a loss of light volume. [Means for Solution] Illumination optical ...  
JP2016058165A
[Subject] A lighting installation which is stabilized and can control a direction of movement of high-output light from light equipment with high precision is provided. [Means for Solution] Lighting installation 40 contains optical eleme...  
JP2016053718A
To provide an illumination optical device capable of reducing light quantity loss when lighting up a mask with illumination light in a predetermined polarized state, and a projection exposure device.An illumination optical device include...  
JP2016053644A
To provide a color separation synthesis system and projection type display device that can suppress an influence of leakage light.A color separation synthesis system comprises: a cross dichroic prism 19 that synthesizes each color light;...  
JP2016510425A
At least one mirror device (200) which has a plurality of mirror elements of each other because of the object of changing the angular distribution of the light in which the present invention was reflected by the mirror device which can b...  
JP2016510142A
The projection lens for imaging the pattern arranged in the object plane (OS) of a projection lens using the electromagnetic radiation line which has the operating wavelength of lambda< 260 nm at the image plane has a plurality of optica...  
JP2016045306A
To provide a light flux control member that is used in plane light source devices suppressing luminance unevenness and high in light utilization efficiency.A light flux control member has: a first incidence plane 151; a second incidence ...  
JP2016042124A
To provide a lighting device capable of changing the beam angle distribution of illumination light while restraining loss in the quantity of light.A lighting device comprises: a light source 2 that emits light; a multiple reflection elem...  
JP2016042122A
To provide a lighting device capable of changing the beam angle distribution of illumination light while restraining loss in the quantity of light.A lighting device comprises: a light source that emits light; a multiple reflection elemen...  
JP2016509691A
A system constituted so that a radiation beam might be projected on a target portion of a substrate in a lithography device is indicated. A system is provided with a mirror and a controller. A mirror has an actuator for constituting shap...  
JP2016042125A
To provide a diffusion lens that suppresses sensitivity to changes in illuminance as well as suppresses degradation in optical performance caused by unnecessary light and decrease in releasability in the process of molding the lens.An em...  
JP5892499B2  
JP5888622B2  
JP2016039258A
To provide an optical device advantageous in adjustment of optical performance through an aperture stop.An optical device 100 includes: an aperture stop 3 including a first member 3a and a second member 3b each having two facing end part...  
JP2016039429A
To provide a projector whose type is to serially arrange two spatial modulation elements, and which can suppress the occurrence of moire by controlling a boundary between a bright portion and a dark portion in an image plane of an image ...  
JP2016035593A
To provide an illumination optical apparatus and an exposure apparatus which can contribute to increase in manufacture efficiency of a device with increase in an output of a light source, even when a spatial light modulation member is di...  
JP2016035999A
To provide a light source device which is advantageous in terms of utilization efficiency of a light flux radiated from the light source.A light source device 100 includes a light source 1 for radiating a light flux from a light emission...  
JP5884743B2  
JP5884871B2  
JP5881221B2  
JP5878169B2  
JP2016031403A
To improve light utilization efficiency with a small-sized configuration.An illumination optical system 20A illuminating a liquid crystal panel 40 modulating light from a light source unit 10 with the light, includes, in order from a lig...  
JP5872639B2  
JP5868492B2  
JP5867576B2  
JP5863974B2  

Matches 501 - 550 out of 3,201