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Matches 501 - 550 out of 1,772

Document Document Title
JP2011039435
To provide a lighting system where the disturbance of the polarization direction is small in a rod integrator and the light utilization efficiency is high, when a polarized light of an aligned polarization direction is made to be inciden...  
JP2011039172
To suppress the decline of image forming characteristics due to nonuniform temperature distribution which can occur in the lens of a projection optical system.In the exposure apparatus having the projection optical system for projecting ...  
JP2011040716
To form a lighting region having a trapezoidal light intensity distribution along a predetermined direction on a photosensitive substrate, and to vary a blur width of the lighting region within a necessary range.An exposure apparatus whi...  
JP2011040619
To provide a light shielding apparatus, a lighting optical system, and an exposure apparatus that can precisely project a predetermined pattern on a surface to be irradiated for exposure, and a method of manufacturing a device.The light ...  
JP2011040618
To provide a diffraction optical element capable of uniformly adjusting light intensities by positions on a surface to be irradiated, an illumination optical system, an exposure apparatus, a method of manufacturing a device, and a method...  
JP2011039210
To obtain an image projector capable of obtaining a projection image, in which variation in optical performance of a projection lens is small and which has a good image quality, by reducing absorption of luminous flux of the projection l...  
JP2011029596
To switch over a diffraction optical element and a spacial light modulator based on a simple configuration and eventually to achieve illumination conditions of great variety for the shape and the size of pupil's intensity distribution.A ...  
JP2011022553
To provide an illumination optical system which achieves uniform illuminance distribution on an object surface to be illuminated by combining a light beam from an integrating sphere and a light beam generated by a critical illumination m...  
JP2011013589
To provide a compact, low-cost illumination optical system which secures uniformity of illumination light, and to provide an illuminating apparatus.The illumination optical system 30 used for the illuminating apparatus 10 includes: a col...  
JP2011009611
To provide an integrator structured so that a lens and a lens can be readily integrated without gaps, and to provide a light irradiation device that uses the integrator.Rectangular lens 41 are arranged bidirectionally so that the side fa...  
JP2011009780
To provide a microlithographic system in which partial coherence and a field size are variable.The microlithographic system includes: a lighting source; a lighting optical system including, in the order from an objective lens side, (a) a...  
JP2011009317
To correct illuminance unevenness of an illumination region formed on a surface to be irradiated while saving space and suppressing light quantity loss and generation of a flare small.The optical integrator (7) having a plurality of wave...  
JP2011003908
To provide an illumination optical apparatus for illuminating a surface to be illuminated using light in a desired polarized state without substantial influence from manufacturing errors in an optical member functioning as a wave plate.A...  
JP2010287806
To provide an illumination optical system capable of forming an illumination region having a light intensity distribution having a trapezoidal shape along a predetermined direction and nearly uniform in the shape of a pupil intensity dis...  
JP2010287759
To make uniform an illumination distribution on a surface to be irradiated by suppressing the projection of an integrated quantity of light with respect to a light irradiation device using LEDs.The light irradiation device is constituted...  
JP2010286510
To provide an observing apparatus, preventing the occurrence of unevenness regardless of a curve of a liquid level to equally observe the whole of an observation object.In an observing apparatus, a liquid and the observation object are s...  
JP2010282032
To appropriately configure a solar system that has a large light receiving area, by providing a Fresnel lens for a solar system with a structure that is less likely to bend by its weight.Many prism portions 11 and 12 are arranged along a...  
JP2010281976
To provide a lower-cost mechanism for adjusting the position of an optical element.The mechanism 1 for adjusting the position of the optical element B is provided in a microscope having the optical element B for observing a sample, and a...  
JP2010278443
To provide a lithographic apparatus with a uniformity collection system.A system finger is movably configured so that it can be moved to the inside or outside of the intersection with a radiation beam to correct the intensity of respecti...  
JP2010272631
To provide a lighting apparatus capable of lighting a body in an expected state.The lighting apparatus lights a first surface based upon irradiation light supplied from a light source. The lighting apparatus includes: a spatial optical m...  
JP2010272640
To provide a lighting apparatus capable of illuminating a body in an expected state.The lighting apparatus illuminates a first surface based upon irradiation light supplied from a light source. The lighting apparatus includes: a polarize...  
JP2010272858
To provide a light source device forexposure machine capable of efficiently condensing light rays emitted from a plurality of ultraviolet LEDs, while having a simple consitution.The light source device for an exposure machine includes th...  
JP2010256511
To provide an optical device which is rigid and prevents deterioration in sealing performance for liquids contained therein.An illuminator 3 is obtained by holding and fixing a liquid lens element 2 and a holder 80 with a fixture 160 and...  
JP2010245224
To provide a lighting apparatus that prevents deterioration in luminous efficacy.This lighting apparatus illuminates an object by illumination light emitted from light source. The lighting apparatus is provided with: a first reflecting m...  
JP2010225954
To adjust a difference in light intensity between a pair of regions spaced apart from each other in a predetermined direction across an optical axis in pupil intensity distributions associated with respective points on a surface to be ir...  
JP2010214696
To improve quality of a fly-eye lens.When recessed curved surfaces 22 formed on a fly-eye lens molding die 21 in an arrangement corresponding to a plurality of projecting curved surfaces of the fly-eye lens are machined in a prescribed m...  
JP2010217881
To provide a device for illuminating a document, which enables counter-illumination free from shadow of a light source and efficient light use free from changes in illuminance and illuminance distribution in a sub-scanning position, and ...  
JP2010204280
To obtain an illumination optical system capable of easily performing focus adjustment of a projection image by a projection optical system on a screen surface by smoothly blurring the blur of the projection image even if the projection ...  
JP2010197517
To provide an illumination optical device for improving productivity by correcting illuminance irregularity inherent to a fly eye lens upon exchanging fly eye lenses because of changes in irradiation regions or the like; and eliminating ...  
JP2010192868
To uniformize intensity distribution of light emitted from a laser source and make the light incident onto a light intake of an exposure apparatus body.The unit (1) for uniformization is arranged at an immediate back of a light output of...  
JP2010192471
To provide a technique capable of suppressing the occurrence of flare light, and capable of adjusting an incident angle distribution on a illumination target surface with a high degree of accuracy (namely, uniformly).An illumination opti...  
JP2010192914
To provide an illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with illumination light in a predetermined polarized state.Am illumination optical system...  
JP2010187027
To provide a system and a method for producing incoherent radiation having uniform illuminance.The system and method are used to form incoherent beams from a coherent beam. The system includes a source of radiation and a reflective loop ...  
JP2010178974
To provide a light source device, heightening the utilization of fluorescence in a configuration in which a plurality of optical fibers are united into one.This light source device includes: a pumping source for emitting excitation light...  
JP2010182704
To adjust difference in light intensity of a pair of regions spaced apart across an optical axis at intervals in predetermined direction, relating to a pupil intensity distribution about respective points on a lit surface.The lighting op...  
JP2010182989
To prevent deterioration in the evenness of the luminance distribution on a light irradiation face in a light irradiation device having a filter for holding a plurality of filter boards by the frame and its bridges.The rays of light emit...  
JP2010182703
To adjust pupil intensity distribution at respective points on a lit surface to required distribution respectively.Lighting optical systems (2-12) for lighting lit surfaces (M;W) with the light from a light source (1) include distributio...  
JP2010181529
To provide a projector capable of performing full color display without preparing for an optical modulation element for every color light and having higher light utilization efficiency than a conventional projector.The projector 1000 inc...  
JP2010177657
To form a ring band-shaped pupil intensity distribution set to a partial circumferential polarization state, having partially collapsing characteristics from a circumferential polarization state.A polarization conversion unit (5) in an i...  
JP2010169797
To provide a light source device which makes efficient use of light emitted from an LED element and hardly increases the temperature of the LED element; and to provide a projection-type display device and a back face projection-type disp...  
JP2010169852
To provide a liquid crystal display for suppressing temperature increase of a liquid crystal device and suppressing deterioration of contrast of display images even when incorporating a micro-lens array.Liquid crystal light valves 25a, 2...  
JP2010127981
To provide a lens array element which suppresses occurrence of a defect in accuracy caused by releasing property when it is molded by using a metallic mold concerning a reference surface provided at an end face of a rectangular plate sha...  
JP2010122532
To obtain the light utilization efficiency nearly in the same extent as when an original circular concave reflecting mirror is used without using a sub reflecting mirror and an auxiliary reflecting mirror even when a reflecting mirror is...  
JP2010117672
To achieve a compact configuration, even when a reflection type spatial modulation element is used, in an image projection device.The image projection device 100 projects the display image of the reflection type spatial modulation elemen...  
JP2010114438
To provide a lithographic device and method for EUV emission lithography, wherein loss of emission intensity and/or increased complexity of the device is removed or reduced.The transmission type fly eye integrator including a first array...  
JP2010109242
To provide a lighting optical system and an exposure device capable of reducing the effec of background light.The lighting optical system includes a diffraction optical element 4 which converts the light intensity distribution of a lumin...  
JP2010102154
To provide a lighting optical system suitable for an observation optical system having a wide viewing angle, used for an endoscope used in medical or industrial sectors, for example, appropriately distributing light to the side and the b...  
JP2010097975
To provide an illumination optical system capable of almost uniformly adjusting respective pupil intensity distributions at respective points on a surface to be irradiated.The illumination optical system for illuminating the surface (M;W...  
JP2010097128
To provide a filter device which can control illuminating light radiated to an object to achieve a desired illumination distribution.The filter device includes: a filter element to change the incident light intensity depending on the inc...  
JP2010093291
To achieve illuminating conditions abounding in a diversity regarding proper illuminating conditions required for accurately transferring a mask pattern having various characteristics such as the light intensity distribution, polarizatio...  

Matches 501 - 550 out of 1,772