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Matches 501 - 550 out of 1,750

Document Document Title
JP2010256511
To provide an optical device which is rigid and prevents deterioration in sealing performance for liquids contained therein.An illuminator 3 is obtained by holding and fixing a liquid lens element 2 and a holder 80 with a fixture 160 and...  
JP2010245224
To provide a lighting apparatus that prevents deterioration in luminous efficacy.This lighting apparatus illuminates an object by illumination light emitted from light source. The lighting apparatus is provided with: a first reflecting m...  
JP2010225954
To adjust a difference in light intensity between a pair of regions spaced apart from each other in a predetermined direction across an optical axis in pupil intensity distributions associated with respective points on a surface to be ir...  
JP2010214696
To improve quality of a fly-eye lens.When recessed curved surfaces 22 formed on a fly-eye lens molding die 21 in an arrangement corresponding to a plurality of projecting curved surfaces of the fly-eye lens are machined in a prescribed m...  
JP2010217881
To provide a device for illuminating a document, which enables counter-illumination free from shadow of a light source and efficient light use free from changes in illuminance and illuminance distribution in a sub-scanning position, and ...  
JP2010204280
To obtain an illumination optical system capable of easily performing focus adjustment of a projection image by a projection optical system on a screen surface by smoothly blurring the blur of the projection image even if the projection ...  
JP2010197517
To provide an illumination optical device for improving productivity by correcting illuminance irregularity inherent to a fly eye lens upon exchanging fly eye lenses because of changes in irradiation regions or the like; and eliminating ...  
JP2010192868
To uniformize intensity distribution of light emitted from a laser source and make the light incident onto a light intake of an exposure apparatus body.The unit (1) for uniformization is arranged at an immediate back of a light output of...  
JP2010192471
To provide a technique capable of suppressing the occurrence of flare light, and capable of adjusting an incident angle distribution on a illumination target surface with a high degree of accuracy (namely, uniformly).An illumination opti...  
JP2010192914
To provide an illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with illumination light in a predetermined polarized state.Am illumination optical system...  
JP2010187027
To provide a system and a method for producing incoherent radiation having uniform illuminance.The system and method are used to form incoherent beams from a coherent beam. The system includes a source of radiation and a reflective loop ...  
JP2010178974
To provide a light source device, heightening the utilization of fluorescence in a configuration in which a plurality of optical fibers are united into one.This light source device includes: a pumping source for emitting excitation light...  
JP2010182704
To adjust difference in light intensity of a pair of regions spaced apart across an optical axis at intervals in predetermined direction, relating to a pupil intensity distribution about respective points on a lit surface.The lighting op...  
JP2010182989
To prevent deterioration in the evenness of the luminance distribution on a light irradiation face in a light irradiation device having a filter for holding a plurality of filter boards by the frame and its bridges.The rays of light emit...  
JP2010182703
To adjust pupil intensity distribution at respective points on a lit surface to required distribution respectively.Lighting optical systems (2-12) for lighting lit surfaces (M;W) with the light from a light source (1) include distributio...  
JP2010181529
To provide a projector capable of performing full color display without preparing for an optical modulation element for every color light and having higher light utilization efficiency than a conventional projector.The projector 1000 inc...  
JP2010177657
To form a ring band-shaped pupil intensity distribution set to a partial circumferential polarization state, having partially collapsing characteristics from a circumferential polarization state.A polarization conversion unit (5) in an i...  
JP2010169797
To provide a light source device which makes efficient use of light emitted from an LED element and hardly increases the temperature of the LED element; and to provide a projection-type display device and a back face projection-type disp...  
JP2010169852
To provide a liquid crystal display for suppressing temperature increase of a liquid crystal device and suppressing deterioration of contrast of display images even when incorporating a micro-lens array.Liquid crystal light valves 25a, 2...  
JP2010127981
To provide a lens array element which suppresses occurrence of a defect in accuracy caused by releasing property when it is molded by using a metallic mold concerning a reference surface provided at an end face of a rectangular plate sha...  
JP2010122532
To obtain the light utilization efficiency nearly in the same extent as when an original circular concave reflecting mirror is used without using a sub reflecting mirror and an auxiliary reflecting mirror even when a reflecting mirror is...  
JP2010117672
To achieve a compact configuration, even when a reflection type spatial modulation element is used, in an image projection device.The image projection device 100 projects the display image of the reflection type spatial modulation elemen...  
JP2010114438
To provide a lithographic device and method for EUV emission lithography, wherein loss of emission intensity and/or increased complexity of the device is removed or reduced.The transmission type fly eye integrator including a first array...  
JP2010109242
To provide a lighting optical system and an exposure device capable of reducing the effec of background light.The lighting optical system includes a diffraction optical element 4 which converts the light intensity distribution of a lumin...  
JP2010102154
To provide a lighting optical system suitable for an observation optical system having a wide viewing angle, used for an endoscope used in medical or industrial sectors, for example, appropriately distributing light to the side and the b...  
JP2010097975
To provide an illumination optical system capable of almost uniformly adjusting respective pupil intensity distributions at respective points on a surface to be irradiated.The illumination optical system for illuminating the surface (M;W...  
JP2010097128
To provide a filter device which can control illuminating light radiated to an object to achieve a desired illumination distribution.The filter device includes: a filter element to change the incident light intensity depending on the inc...  
JP2010093291
To achieve illuminating conditions abounding in a diversity regarding proper illuminating conditions required for accurately transferring a mask pattern having various characteristics such as the light intensity distribution, polarizatio...  
JP2010066362
To provide a projection display device that can improve quality of a projection image by suppressing luminance distribution irregularity of the projection image.After parallel beams are emitted from light sources 2a and 2b and are linear...  
JP2010067866
To switch an illumination condition at high speed, and to correct an imaging characteristic at high speed according to the illumination condition.In the exposure method that exposes a pattern of a reticle R with an illumination light IL ...  
JP2010062281
To provide a lighting optical system and an exposure device that provide at least one of improvement in light use efficiency and excellent lighting wherein distortion of an effective light source of the lighting optical system is suppres...  
JP2010062397
To provide an exposure method etc., that increases use efficiency of illumination light and transfers patterns having various pitches at the same time with high resolution.A light quantity distribution on a pupil plane of a lighting opti...  
JP2010062309
To suppress the generation of irregularity in an illuminance on an irradiating face, and a change of a polarizing state caused by influences of a stress double refraction inside a lens.The lighting optical system which lights the irradia...  
JP2010048903
To reduce influence of irregularities of emission intensity distribution of each emission part and emission intensity between a plurality of the emission parts to uniformly illuminate illuminated faces by having light sources including t...  
JP2010040617
To provide an illumination optical system almost uniformly adjusting a pupil intensity distribution at each point on an irradiated surface.An optical integrator (9) formed in an optical path of the illumination optical system illuminatin...  
JP2010034486
To provide an illumination optics that facilitates forming a desired light intensity distribution having no illumination irregularities at a pupil position of the illumination optics or a position optically conjugated with the pupil posi...  
JP2010026114
To provide a light source device capable of uniforming the illuminance of the exiting end surface of a fiber bundle.The light source device (20) includes: a light source (21) in which a filament is arranged; a light guide optical system ...  
JP2010027876
To provide an illumination optical system capable of adjusting pupil intensity distributions at respective points on a radiated surface to be almost uniform.The illumination optical system for illuminating radiated surfaces (M;W) based o...  
JP2010014815
To provide a projection type display device using a laser light source, reducing the overall thickness of the device and eliminating annular color unevenness which is highly likely to occur when viewing a 3D video image using a liquid cr...  
JP2010004002
To provide an exposure device capable of supplying only EUV light to a mask, while eliminating light other than the EUV light.A multilayer film of Mo/Si is formed on the front surface of a mirror 510, and blazed grooves 513 are formed on...  
JP2009300916
To provide a light source optical system for endoscopes which is compatible with various viewing modes, prevents a light source apparatus from being enlarged, and secures brightness.The light source optical system comprises, in order fro...  
JP2009294249
To provide an illuminator and an illuminating method by which the uniformity of light intensity is enhanced by stably and efficiently suppressing occurrence of an interference fringe with a simple and compact configuration, and also to p...  
JP2009295801
To provide: an optical element holding unit that can adjust the position and shape of an optical element while suppressing complication of an entire unit; an optical system; an exposure unit; and a device manufacturing method.An optical ...  
JP2009288314
To provide a microscope which attains a bright vertical illumination, while WD and NA are identical to the values of the conventional types.In a stereomicroscope 1, having two observation optical systems 10 including an objective lens 11...  
JP2009288407
To vary contrast without significantly deteriorating brightness of projection images.A lighting optical system 100 is used for an image projection apparatus for guiding a light flux from a light source 101 to an image display element 110...  
JP2009288438
To solve a problem that a peripheral part of a liquid crystal panel is somewhat dark because of influence of aberration when a plurality of luminous fluxes emitted from a fly-eye lens array are superposed on the liquid crystal panel.The ...  
JP2009276544
To provide a fly-eye optical system for perfectly projecting illuminating light from a light source onto a specimen surface.The microscope illumination device comprises a collector lens for converting divergent light emitted from the lig...  
JP2009276720
To obtain an illuminating optical system can brightly and efficiently illuminate a target illumination surface with less light loss.The illuminating optical system includes: a luminous flux condensing means by which a luminous flux emitt...  
JP2009267403
To provide an inexpensive constitution of a double facet illumination system in which an illumination mode thereof can be variably controlled, and to provide a method for controlling the illumination mode in such an illumination system.A...  
JP2009267390
To provide an illumination optical system capable of almost uniformly adjusting the pupil intensity distribution on respective points of a surface-to-be-illuminated.An optical integrator (9) arranged in an optical path of an illumination...  

Matches 501 - 550 out of 1,750