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Matches 501 - 550 out of 3,372

Document Document Title
JP2017009779A
[Subject] Provide the projector using the projection optical system which can perform back focus adjustment and alignment easily, and the projection optical system concerned in application to a projector. [Means for Solution] Back focus ...  
JPWO2014084143A1
複数の発光素子を1つの基板に搭載したデバ イスであったとしても、単位面積当たりの光 強度を高くすることができる光照射デバイス を提供する。相対的に移動する対象物に...  
JP2017003681A
[Subject] An optical wheel device which raised a capacity factor of light which carried out diffuse transmission with an optical wheel, and light equipment and a projection device provided with this optical wheel device are provided. [Me...  
JP2017004025A
[Subject] An illumination-light study system which has high flexibility about change of shape of pupil intensity distribution, and a polarization state without being accompanied by exchange of an optical member. [Means for Solution] An i...  
JP2017004026A
[Subject] Supply and recovery of a fluid can be performed in the state of a request, and an exposure device which can suppress degradation of a pattern image projected on a substrate is provided. [Means for Solution] An exposure device i...  
JP2017003847A
[Subject] Though you have a lens of comparatively small number of sheets, provide the optical system for projecting and projector which can cover a wide variable power range. [Means for Solution] Lens F1 which is from one right lens whic...  
JP2017004697A
[Subject] Though it is narrow distribution for Distribution , a lighting installation which can obtain illumination light excellent in appearance easily is provided. [Means for Solution] Lighting installation 10 is provided with light so...  
JP2016225182A
[Subject] A large LED lighting system of an input is realized without changing an LED output. [Means for Solution] The present invention is provided with LED1 and hemisphere mirror 3, and LED1 is, The light-emitting part has a plane and ...  
JP2016224375A
[Subject] An exposure device advantageous to adjusting light volume on a substrate is provided. [Means for Solution] A braid for forming an opening which is an exposure device which exposes a substrate, operates light from a light source...  
JP2016541009A
【課題】自発光型コントラストデバイスのア レイを備えるプログラマブルパターニングデ バイスを含み得る装置を提供する。【解決手 段】露光装置は、基板(17)を保持す...  
JP2016541021A
マイクロリソグラフィ投影露光装置(10) の照明系は、空間分解方式で入射光を透過又 は反射する空間光変調器(52)上に光を向 ける瞳形成ユニット(36)を含む。対...  
JP6053748B2  
JP6053737B2  
JP2016218381A
[Subject] A lighting installation for proximity exposure which can compensate for variation in size of an exposure pattern resulting from variation in a gap between a work and a mask with easy composition, a proximity exposure device, an...  
JP6049043B2  
JP6050618B2  
JP2016212434A
[Subject] An illumination optical device which can form ring band-like lighting pupil distribution of a peripheral direction polarization state is provided suppressing a light volume loss satisfactorily. [Means for Solution] An illuminat...  
JP6044611B2  
JP2016206247A
[Subject] Art advantageous to the improvement in accuracy of amendment of exposure light volume unevenness and coexistence of a throughput is provided. [Means for Solution] An illumination-light study system which illuminates a field to ...  
JP2016206246A
[Subject] Art advantageous to improvement in accuracy of amendment of exposure light volume unevenness and coexistence of a throughput is provided. [Means for Solution] An illumination-light study system which illuminates a field to be i...  
JP2016206234A
[Subject] An aperture for modification lighting and an exposure device which can be easily applied to the conventional exposure device are provided. [Means for Solution] Aperture 20 for modification lighting which forms gray tone illumin...  
JP6041304B2  
JP2016200787A
[Subject] A light irradiation device which can adjust a wavelength and light volume of illumination light is provided being able to obtain sufficient light volume used as substitution of a discharge lamp, and holding the homogeneity of i...  
JP2016537683A
Including a transparent lens in which the present invention defines optic volume, the transparent lens is related with an optical system containing the 1st reflective lens which orients light so that light which carried out demand may re...  
JP6034845B2  
JP2016197600A
[Subject] Provide light equipment and an image display device which can attain high-intensity-ization, suppressing enlargement of a device. [Means for Solution] Light equipment concerning one form of this art is provided with the followi...  
JP6025835B2  
JP6028633B2  
JP2016192343A
[Subject] A short arc Flach lamp which has in a housing a pair of starting auxiliary electrodes arranged inside an arc tube among a pair of a main electrode and the pair of main electrodes, While having a reflective mirror reflected belo...  
JP2016535313A
An illumination-light study unit for EUV projection lithography functions, in order that an object recognition field (3) of a downstream image formation optical unit (6) may illuminate an illuminated viewing field arranged inside. An obj...  
JP2016192264A
[Subject] A subject of the present invention is having an irradiation object face of high illumination homogeneity, and having a small optical radial plane compared with an irradiation object face, and providing a tabular imaging optics ...  
JP2016191844A
[Subject] It aims at being able to emit fluorescence at high efficiency and providing fluorescence light equipment which can constitute a small device from an easy structure. [Means for Solution] It has an excitation light emitting part ...  
JP6022759B2  
JP6023777B2  
JP2016188923A
[Subject] An exposure device and an exposure method which can attain efficient-izing and reinforcement of a spatial-light-modulation element are provided. [Means for Solution] Micro lens array 142 by which a micro lens in which exposure ...  
JP2016188878A
[Subject] An illumination-light study system which can obtain high illumination realizing illumination homogeneity in a lighting field, and homogeneity of the irradiation angle characteristic. [Means for Solution] The 1st light-emitting ...  
JP2016186892A
[Subject] A bundle of rays can be extracted thinly and small light equipment and a lighting installation, and a projector are provided. [Means for Solution] The 2nd light source unit 21B that ejects bundle of rays K2 containing the 1st l...  
JP6016169B2  
JP2016184127A
[Subject] Light equipment which controlled a fall of luminosity is realized including a plurality of LED elements. [Means for Solution] Light equipment is provided with the following. A plurality of LED elements, The first optical system...  
JP2016184126A
[Subject] A plurality of LED elements are included and light equipment which improved the homogeneity of illumination distribution on an irradiation side is realized. [Means for Solution] Light equipment is provided with the following. A...  
JP6010032B2  
JP2016177194A
[Subject] It excels in portability and obtains the image projection device which can display a picture with an expansion display and sufficient quality easily. [Means for Solution] It has a light source, an image display element illumina...  
JP2016173484A
[Subject] By thinking transmissivity of a red spectrum region as important, a projection lens and a projector aiming at improving a shortage of light volume of a red spectrum region are provided. [Means for Solution] It is a projection l...  
JP2016170390A
[Subject] It aims at providing a projector incorporating light equipment and this with high utilization efficiency of light. [Means for Solution] Light equipment 2 is provided with a pickup optical system into which a light emitting elem...  
JP5994970B2  
JP2012522358A5  
JP2016167024A
[Subject] A shadow cast over exposure light by a member of a light source part provides art advantageous to reducing influence which it has on image formation performance. [Means for Solution] An illumination-light study system which ill...  
JP2016528526A
A fiducial structure object (250, 400, 500) and the 1st actuator (205) that is self-maintenance type actuators are used, and it is the 1st optical element (215) that can operate to a fiducial structure object (250, 400, 500), An EUV imag...  
JP5991256B2  
JP5984013B2  

Matches 501 - 550 out of 3,372