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Matches 501 - 550 out of 2,746

Document Document Title
JP2013526071A  
JP5213761B2  
JP2013120264A
To provide projectors and a projection system which allow a projection image to be excellently and stereoscopically viewed.A projector 2A comprises: a polarization switching device 22 in which a retardation value is switched between a fi...  
JP2013522918A  
JP5206132B2  
JP2013114175A
To form a highly accurate pattern while ensuring a wide exposure area in a projection exposure device.The projection optical system 30 of the projection exposure device comprises a first lens group 32, a second lens group 34, a third len...  
JP5201061B2  
JP2013102225A
To provide an illumination optical system for a microlithographic projection exposure apparatus.An illumination optical system for a microlithographic projection exposure apparatus (1) is used for illuminating an object surface (19) with...  
JP2013518421A  
JP2013095659A
To provide an optical mechanism for EUV lithography reducing deformation caused by an influence of a temperature, and to provide a method for constituting the optical mechanism having especially a projection lens and an optical element.T...  
JP2013092788A
To provide a lighting system and an optical device that are capable of equally illuminating an illuminated area (image formation area) without making a speckle noise outstanding.A lighting system relating to the invention comprises: a li...  
JP5195991B2  
JP5197227B2  
JP5200182B2  
JP5197149B2  
JP2013076927A
To achieve the reduction of the manufacturing costs and scale of a reading head.An optical element 15 includes: an optical block 20; a first reflection film 21 and a second reflection film 22 formed on the surfaces of first and second cu...  
JP5187632B2  
JP5188927B2  
JP5187631B2  
JP5187636B2  
JP2013074089A
To provide an adhesion method for optical element on optical element holding device, capable of fixing an optical element on an optical element holding device by removing distortion and/or deformation of the optical elements as much as p...  
JP2013072888A
To provide a projection type image displaying apparatus that enables the range of color reproduction to be expanded even when a luminous body having a broad spectrum is used.A projection type image displaying apparatus 100 comprises a li...  
JP2013513087A  
JP2013068651A
To provide an image display device having a narrow viewing angle capable of contributing to energy saving by eliminating waste of energy caused by having a wider viewing angle than required.An image display device includes: a convex lens...  
JP5182588B2  
JP2013065857A
To provide a microlithographic projection exposure apparatus for imaging a mask on a layer using a catoptric projection lens which is configured for wavelengths in the extreme ultraviolet spectral range (EUV).A microlithographic projecti...  
JP2013065051A
To provide a projection objective which secures a space sufficient for mounting an optical element particularly in the front portion of an objective.A projection objective includes: object planes (20, 100, 300, 2103) by which object visu...  
JP2013058801A
To provide a method of correcting/repairing a projection target instrument of a lithography projection exposure apparatus.The method of correcting/repairing a projection target instrument of a lithography projection exposure apparatus (1...  
JP5172063B2  
JP5170221B2  
JP5167873B2  
JP2013051424A
To provide an optical imaging arrangement which has good and long-term reliable imaging properties and is used in an EUV exposure process.Provided is an optical imaging arrangement comprising: a mask unit 3; a substrate unit 4; an optica...  
JP5162560B2  
JP5157945B2  
JP5158439B2  
JP5156056B2  
JP2013046060A
To resolve problems such as increase in cost and complexity of a lithographic process, decrease in throughput, and increase in defects.A lithographic apparatus includes: an illumination system for providing a radiation beam; a patterning...  
JP2013041132A
To provide an optical element capable of obtaining light in which intensity distribution is equalized with high efficiency.An optical element 30 includes: a first rod integrator 31A that has a first end surface 3a and a second end surfac...  
JP2013041018A
To provide a dimmer capable of enhancing an extinction rate in a state that a light-shielding member is closed even when lenses constituting a lens array are arranged at odd-numbered rows in a direction in which the light-shielding membe...  
JP2013041017A
To provide a dimmer capable of maintaining a separation distance between end portions of a light-shielding member and of enhancing an extinction rate, and further to provide a projector.A dimmer blocks a light beam made incident thereto ...  
JP2013041760A
To provide a lighting device with a further improved light use efficiency than a prior art.The lighting device 100 includes a light source device 110 emitting light, a first lens array 120 with a plurality of first micro lenses 122, a se...  
JP2013037300A
To provide an exposure device capable of continuously producing a high-image-quality, inexpensive liquid crystal panel at a high yield, in a process for manufacturing a TFT substrate using a gray tone mask and to provide an exposure meth...  
JP5150335B2  
JP5142892B2  
JP5138364B2  
JP2013025130A
To provide a video display device which can get along with multiple kinds of reflective display devices having different angles at which minute mirrors are driven, without having adversely affecting display video.A circuit board 33 can b...  
JP2013025249A
To provide a luminaire that reduces a partial temperature rise of an excitation light emitting position regardless of an installed position and reduces degradation in the light conversion rate of a rotary fluorescent plate and performanc...  
JP2013025080A
To provide an irradiation device capable of simply increasing illuminance.In the irradiation device which includes a light source device 4 for emitting light, a glass rod 18 constituting an integrator optical system for uniformizing ligh...  
JP2013025215A
To provide a projector capable of preventing luminance reduction of a display image.A projector includes: a solid light source 411 that emits light with a given wavelength; a wavelength change device 46 that has a fluorescent layer 4611 ...  
JP2013025247A
To provide a projector using local dimming technique in which luminance unevenness between divided regions recognizable by an observer is low, and higher image quality display is possible.A projector 1 includes: a light source unit 2 inc...  

Matches 501 - 550 out of 2,746