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JP6970369B2 |
To provide a light source device which includes a plurality of LED elements, and can suppress lowering in illuminance caused by positional deviation.A light source device includes: a light source section in which a plurality of ultraviol...
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JP2021529982A |
A photohomogenizing device is described. The light homogenizing element includes a lens array with correction features designed to improve the homogeneity of the light field generated by the light source. The correction feature includes ...
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JP2021170126A |
To provide an illumination optical system capable of giving a high illuminance while achieving illuminance uniformity in an illumination area and uniformity of illumination angle characteristics.The illumination optical system illuminati...
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JP6952587B2 |
A HMD device including a first waveguide element and a second waveguide element is provided. An image beam is projected to a projection target. The first waveguide element includes a plurality of first light splitting elements. The image...
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JPWO2020095843A1 |
In order to provide a coaxial lighting device that can widen the field of view while being compact and can simplify the adjustment work, the work W to be observed and the observation unit M for observing the work W are connected. The hal...
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JP6950339B2 |
To provide a lighting system that can make uniform an illuminance distribution in a lighting target area even with a small number of components, and to provide a projector that includes the lighting system.A lighting system comprises: a ...
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JP6942795B2 |
A luminous device for a motor vehicle, said device including a pixelized light source and an optical system that is arranged to project a pixelized light beam emitted by the pixelized light source, the optical system comprising a first m...
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JP6931469B2 |
An illumination optical system is used with a reflective imaging optical system configured to form an image of a pattern arranged on a first plane onto a second plane, and is configured to illuminate an illumination area on the first pla...
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JP2021124690A |
To provide a technique advantageous for solving problems caused by the reduced intensity of light reaching an illuminated surface.An exposure device includes: a light source that emits light that has a continuous wavelength range; and at...
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JP6921327B2 |
An HUD illumination system includes a collimation and homogenization unit and an intensity distribution adjustment unit. The collimation and homogenization unit is configured to convert an incident light source into a collimated and homo...
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JP2021107164A |
To provide a head-up display device capable of suppressing reduction of display quality.This head-up display device comprises: a display unit that emits display light; a concave mirror that guides the display light from the display unit ...
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JP6909866B2 |
A stage lamp lighting device, comprising: a light emitting device (20) capable of emitting single-colored light beams in at least two colors; a light combining device (21) capable of combining the single-colored light beams in the at lea...
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JP6900603B2 |
To provide a light source device that can improve uniformity of an amount of light on an irradiated surface.In a light source device 1, a plurality of light emitting diodes 2 are arranged on a plane. A light distribution angle of each of...
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JP2021096998A |
To provide a light source module, which combines a first beam (a mixed beam of red, blue and ultraviolet beams) generated by a first light source, and a fourth beam (a yellow beam) generated by a fourth light source to form a mixed white...
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JP6889103B2 |
A facet mirror for an illumination optical unit for projection lithography has a plurality of used facets, which in each case reflect an illumination light partial beam. The facet mirror has at least one change subunit having a plurality...
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JP2021085815A |
To provide a light irradiation device which allows for unifying the magnitude of collimation half angle at each point in time, and easily modifying the magnitude and irradiation mode over time in a given range of a workpiece being irradi...
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JP2021511546A |
Illumination optics units for projection lithography are useful for illuminating the field of view of an object. The illumination optical unit has an optical rod (19) with an inlet area and an exit area (20) for illumination light. The o...
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JP6861149B2 |
An illumination optical assembly for projection lithography serves for illuminating an illumination field, in which an object field of a downstream imaging optical assembly is arrangeable, with illumination light of an EUV light source. ...
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JP6864685B2 |
A microlithographic projection exposure apparatus optical 22 system includes a first reflective surface and at least one second reflective surface, each in the optical beam path. The first reflective surface is movable for the correction...
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JP6861536B2 |
To shorten molding time while preventing sink from generating and to enhance productivity, in order to solve the problem in which molding time has become long in order to avoid sink when molding a projection lens in a lamp unit including...
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JP2021033264A |
To provide a light source device responding to environmental problems and having excellent energy-saving performance in a projection type exposure machine used for manufacturing various devices such as a semiconductor integrated circuit ...
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JP6832588B2 |
To provide an optical system device and a double-convex lens that collimate irradiation light with more space saving, and equalize illuminance on an irradiation surface by the irradiation light.An optical system device 1, parallelizes ir...
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JP2021021876A |
To provide a light source module which allows for accurate separation between S-polarized light and P-polarized light.The light source module comprises a light-emitting element having a resonator composed of a photonic crystal structure ...
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JP2021015744A |
To provide an optical device capable of converting a plurality of light sources, which radiate light with mutual different wavelengths, into parallel light in the same direction.An optical device comprises a plurality of light sources th...
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JP2021500599A |
The present invention can form a first region, a second region, and a third region, and the light intensity in the first region is higher than the light intensity in the second region and the third region, respectively. To generate a sec...
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JP6806565B2 |
A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a...
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JP6806236B2 |
An illumination device that illuminates a mask, the illumination device comprising: a light source that generates illumination light; a variable-power optical system that adjusts the maximum inclination angle of the illumination light; a...
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JP2020534674A |
The control system is configured to adjust the wave front of the radiated beam. The control system has a pair of mirrors that define part of the beam's propagation path. Each of the mirrors has a profiled reflective surface configured to...
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JP2020187152A |
To provide a diffusion lens that can absorb shape errors caused by molding variations and suppress adverse effects such as occurrence of bright lines.A diffusion lens 13 diffuses light that is incident on an incident surface 21A from an ...
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JP2020531916A |
An irradiation system is provided that includes a light source configured to radiate first rotationally polarized light onto an object, the first rotationally polarized light having at least one of circularly polarized light and elliptic...
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JP6780267B2 |
To provide a laser irradiation apparatus capable of reducing intensity distribution of laser light radiated from a laser light source and emitting the laser light with uniform intensity.The laser irradiation apparatus is so configured as...
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JP6781772B2 |
A connection arrangement for connecting an optical component of an optical imaging arrangement to a support unit of a support structure includes: a connecting element unit having a support interface end with support interface section; an...
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JP2020177132A |
To provide a lens unit capable of simultaneously imaging a plurality of spot lights having an illuminance distribution equalized to an irradiation surface.A lens unit comprises: a first lens array 25 using a light flux incident from a li...
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JP6772472B2 |
To effectively arrange a second article in a desired area on a first article.There is provided a device manufacturing method including arranging a second article (CNT) in a desired area (201) on a first article (200), supplying a medium ...
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JP6767970B2 |
An illumination optical assembly for a projection exposure apparatus includes a first facet element having a multiplicity of first facets, which are formed in each case by a multiplicity of displaceable individual mirrors, and a second f...
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JP6765011B2 |
The invention relates to a headlight module (1) for motor vehicles, comprising at least one light source (2), downstream of which at least one deflection mirror (3), a micromirror array (4) and a lens (5) are arranged in the beam path, t...
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JP6761574B2 |
To provide an illumination optical system capable of homogenizing an integrated illuminance distribution on an illumination target surface with a relatively small quantity of pulsed light even when a high-coherence light source is used.T...
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JP6761306B2 |
Provided is an illuminating optical system that illuminates, using light emitted from a light source, a surface to be illuminated. This illuminating optical system has: an optical integrator that is disposed between a light source and a ...
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JP6755416B2 |
The invention provides a lighting device (1) lighting device (10) comprising: (I) a first light source (110) configured to provide first light source light (101); (II) a luminescent material (200) configured to convert at least part of t...
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JP6754946B2 |
The utility model provides a difficult emergence because wavelength converting part, projecting apparatus and lighting device that the metallic reflective layer's that the migration caused reflectionefficiency reduces. Wavelength convert...
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JP6753477B2 |
To provide a light source device and a distance measuring sensor provided with the same which are capable of providing a light source having higher luminance than the prior art.A light source device 10 is provided with: a light source un...
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JP2020140172A |
To provide an illumination optical system which is advantageous in illuminance distribution control with respect to an illuminated plane.There is provided an illumination optical system for illuminating an illuminated plane, comprising: ...
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JPWO2019059315A1 |
The integrator section (90) is provided with two fly-eye lenses (91,92), and the fly-eye lens spacing adjustment mechanism (95) is the distance between the two fly-eye lenses (91,92) in the optical axis direction (d). ) Is changed. The d...
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JP6748197B2 |
Metalenses and technologies incorporating the same are disclosed. In some embodiments, the metalenses are in the form of a hybrid multiregion collimating metalens that includes a first region and a second region, wherein the hybrid multi...
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JP6742322B2 |
A test appliance and a method for testing a mirror, e.g., a mirror of a microlithographic projection exposure apparatus. The test appliance has a computer-generated hologram (CGH), and a test can be carried out on at least a portion of t...
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JP2020112796A |
To provide an optical system for a microlithographic projection exposure apparatus for operation in EUV.An optical system includes a polarization-influencing arrangement (124, 224, 324, 424, 524, 624, 724) having at least one first doubl...
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JP6721453B2 |
A HUD system and light source apparatus can be manufactured with miniaturization at low cost. A head-up display apparatus includes: an image display apparatus generating image light to be projected; an optical system performing predeterm...
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JP6724440B2 |
To provide a novel relay optical system which guides divergent luminous flux from a light source to an incidence end face of an optical transmission element, to form an image of a light emission part of the light source at the position o...
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JP6722411B2 |
To provide a luminaire sufficiently utilizing the performance of a coherent light source to brightly illuminate an illuminated area with a desired light distribution pattern.A luminaire 10 comprises: a light diffusion element 50 includin...
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JP2020101651A |
To provide a compact projector that has a projection function and an imaging function.An optical element of the present invention comprises: a prism assembly that is composed of a plurality of prisms including a first prism, a second pri...
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