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JP6314540B2 |
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JP2018063448A |
To provide a variant form lens that can broaden an illumination range of incident light, and can be formed into miniaturization.A variant form lens 400 has: an incidence part 410; and an outgoing part 430. The incidence part 410 has an e...
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JP6311949B2 |
An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arrang...
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JP6312682B2 |
Disclosed is test structure for measuring wave-front aberration of an extreme ultraviolet (EUV) inspection system. The test structure includes a substrate formed from a material having substantially no reflectivity for EUV light and a mu...
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JP2018054900A |
To provide: a wavelength conversion element which curbs a variation in thermal resistance between a wavelength conversion layer and a peripheral member (base material) to achieve high wavelength conversion efficiency; a light source devi...
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JP2018054992A |
To provide an illumination optical system capable of suppressing increase of a minimum line width, and reducing variation of a line width of a pattern formed on a substrate.The invention relates to an illumination optical system 10 for i...
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JP2018049127A |
To provide an exposure device with which resolution of a pattern extending to various directions can be heightened.An exposure device (100) includes a polarizing member (125) to polarize illumination light and a filter (130) having at le...
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JP2018045060A |
To provide an illumination device advantageous for illuminating an arc-like region in a surface to be illuminated.An illumination device includes an optical system that forms a rectangular illumination region that has a longer direction ...
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JP6297793B2 |
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JP6297292B2 |
The system i.e. multi-projection display system (200), has a light valve (201) for providing a beam, and an image divider (202) optically coupled to the light valve and comprising an optical axis and positive magnification that lies with...
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JP6291267B2 |
This light flux control member has an entrance region and an exit region. The entrance region contains a plurality of raised linear portions having an entrance face, a reflection face, and a ridge line. The raised linear portions are eac...
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JP6290523B2 |
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JP6278528B2 |
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JP2018022097A |
To allow for combining light making use of the low-loss property of a rod lens and compensating for lack of flexibility of the rod lens.A light combining/irradiating structure (51) is for combining output light from a plurality of light ...
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JP6270998B2 |
An EUV imaging apparatus is provided, which includes a reference structure and a first optical element, which is actuatable relative to the reference structure with the aid of a first actuator. The first actuator is a self-holding actuat...
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JP6270740B2 |
The invention relates to an optical arrangement comprising: at least one optical element comprising an optical surface and a substrate, wherein the substrate is formed from a material whose temperature-dependent coefficient of thermal ex...
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JP6267742B2 |
A lighting device for illuminating an operative field comprises, in an axial lighting dome, a first ring of LEDs at a first color temperature, and a second ring of LEDs at a second color temperature different from said first color temper...
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JP6255665B2 |
The present invention provides a microlens array including multiple microlenses arranged axially parallel to one another, wherein entrance surfaces of the microlenses on which light is incident are made of resin, and exit surfaces of the...
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JP2017227803A |
To provide an image projection device and an image position adjustment device which can suppress the increase in size of an image generation part, while moving a position of the projection image on a projection plane in a wide range.An i...
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JP2017227906A |
To provide an illumination optical device capable of forming a ring-like illumination pupil distribution of a circumferential direction polarization state while excellently suppressing light volume loss.An illumination optical device of ...
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JP6252298B2 |
An illumination device (40) includes an irradiation device (70), a diffusing element (50), a first lens array (55), a second lens array (60) and a deflecting element (65), which are arranged in this order along the light path. Diffused l...
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JP6250687B2 |
A lighting device (1) comprising a housing (3) with a light emission window (5) and, opposite thereto, a reflector (7). A planar light transmissive carrier (9) arranged in between the light emission window and the reflector and comprisin...
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JP6246907B2 |
An optical component includes a mechanism for reducing a radiation-induced influence on the displacement of an optical device.
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JP6242505B2 |
An optical system for collimation of incoming light, comprising: a body (102); a recess (110) formed on a first side (104) of the body (102), the recess (110) having a central light entry surface (114) and a side light entry surface (112...
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JP6242501B2 |
A beam shaping system is for example for use over an array of light sources. An array of beam shaping units is arranged in a general plane, each beam shaping unit comprising a central refracting area, an intermediate total internal refle...
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JP6237249B2 |
An illumination lens condenses a light from a light source and emits the light toward a display to illuminate the display. The illumination lens includes multiple first lens surface parts having a shape obtained by extracting multiple po...
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JP6238140B2 |
An illumination optical unit for a projection exposure apparatus serves for guiding illumination light toward an illumination field, in which a lithography mask can be arranged. A first facet mirror has a plurality of individual mirrors ...
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JP2017198759A |
To provide a lighting device capable of maintaining illumination uniformity on an illumination surface easily at high accuracy, and maintaining uniformity of a CD regardless of a type of an imaging system.A lighting device includes a lig...
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JP6223228B2 |
A display apparatus includes a spatial phase modulator that forms a display light beam, a transparent substrate in which the display light beam propagates by repeated internal reflection, a bifurcation that emits a portion of the display...
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JP6221159B2 |
A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first ...
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JP6221266B2 |
To provide a compact projection optical system which requires less projection space and projection distance and is capable of supporting a plurality of image sizes.A projection optical system comprises a dioptric system, a first mirror, ...
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JP6222594B2 |
The EUV projection exposure apparatus (10) has a projection light source and a heating light source that respectively generate projection light ray and heating light ray. The catoptric projection lenses (26) are equipped with imaging mir...
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JP6221160B2 |
A mirror for EUV radiation comprises a total reflection surface, which has a first EUV-radiation-reflecting region and at least one second EUV-radiation-reflecting region, wherein the EUV-radiation-reflecting regions are structurally del...
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JP2017191135A |
To prevent a lens from being dropped and slid even when subjected to an excessive shock in transportation and achieve a holding structure for continuing hold at a regular position.The lens holding structure comprises: a pedestal for hold...
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JP6214042B2 |
In this case, each of a plurality of the mirror elements generates an image of the monitor radiation source in an image plane assigned to the respective mirror elements, distances B between the image planes assigned to the mirror element...
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JP6206551B2 |
To provide a light source device and an image display device capable of achieving high luminance while suppressing increase in size of the device.A light source device includes one or more solid light sources, a first optical system, an ...
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JP6207530B2 |
An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multip...
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JP2017173717A |
To provide a projector capable of making gaps between plural lights emitted from light source units and plural mirrors narrower, and forming a parallel light by a structure comprising one mirror group.A projector comprises: a light sourc...
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JP6204922B2 |
An illumination and displacement device for a projection exposure apparatus comprises an illumination optical unit for illuminating an illumination field. An object holder serves for mounting an object in such a way that at least one par...
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JP6202654B2 |
A light source device includes a light source, a phosphor unit that includes a phosphor region and a reflection region and that is movable so that blue light from the light source is sequentially radiated to the phosphor region and the r...
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JP2017167415A |
To provide a small-sized light source device capable of obtaining synthetic light consisting of linearly polarized light, and further to provide a small-sized projector comprising the light source device and having high reliability.First...
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JP6200489B2 |
An optical element (21) with a substrate (30) and a reflective coating (31). The coating (31) has, in particular for the reflection of EUV radiation, a plurality of layer pairs having alternate layers (33a, 33b) composed of a high refrac...
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JP6194967B2 |
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JP2017156619A |
To provide a light source device that can suppress color unevenness and luminance unevenness of image light, and a projection device including the light source device and capable of projecting image light with suppressed color unevenness...
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JP6186779B2 |
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JP6187574B2 |
An exposure method and apparatus for simultaneously transferring patterns with various pitches with high resolution. On the pupil surface of an illumination system, nine areas are set. The nine areas are a first area (28) including the o...
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JP2017146552A |
To provide an illumination device and a projector that can provide high efficiency in use of light.There is provided an illumination device comprising: a light source device that emits light beams including a first light beam and a secon...
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JP2017146526A |
To provide a fluorescent wheel which can be used in both single-plate type and three-plate type projectors.A fluorescent wheel 108 includes a rotatable substrate 201, and color light generation units 200a and 200b including a fluorescent...
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JP6183635B2 |
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JP2017143061A |
To provide a light wavelength conversion device for providing a stable light source having high quality, and to provide a lighting system having a light wavelength conversion device.An light wavelength conversion device 5 includes a firs...
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