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WO/2023/189014A1 |
Provided is a semiconductor film comprising a solid-phase crystallized product of an indium oxide doped with tin and hydrogen.
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WO/2023/184668A1 |
The present invention relates to the technical field of micro- and nano-electronics, and provides a lattice matching-based compound-doped Ge-Sb-Te phase change material and a phase change memory. The chemical formula of the phase change ...
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WO/2023/179704A1 |
Provided are a copper plating additive composition, a copper plating solution, and a copper brush plating method using the same. The copper plating additive composition includes 1, 4-cyclohexanedione monoethylene acetal, potassium phthal...
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WO/2023/179997A1 |
The invention discloses a shutter system consisting of a shutter for shielding a coating source in a vacuum system, wherein the shutter is configured such that it can be slid in front of the coating source; and a method which is carried ...
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WO/2023/182313A1 |
The present invention pertains to a substrate with β-type gallium oxide nano rods that includes: a substrate having a pair of main surfaces; and a plurality of β-type gallium oxide nano rods which are formed on the substrate. The β-ty...
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WO/2023/182312A1 |
The present invention relates to a substrate with a β-gallium oxide film, said substrate comprising a Si monocrystal substrate and a β-gallium oxide film that is provided on the Si monocrystal substrate, wherein the β-gallium oxide fi...
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WO/2023/182126A1 |
A coated tool in which: a mean thickness At of a lower layer A is 0.3 to 6.0 μm, a mean thickness Bt of an upper layer B is 0.1 to 3.0 μm, and 2.0≤At/Bt≤5.0; the lower layer A comprises alternately stacked layers of an A1α layer h...
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WO/2023/182211A1 |
The present invention provides at least one of: a high gallium nitride sintered body in which an increase in oxygen content caused by reoxidation after sintering is suppressed, as compared to a conventional gallium nitride sintered body ...
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WO/2023/183571A1 |
Process kits for processing chambers and processing chambers having a lower shield and lower shield ring are described. The lower shield has a ring-shaped body with an inner wall and an outer wall, a top wall and a bottom wall with an ou...
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WO/2023/179998A1 |
The invention discloses a method and a device for protecting oxygen-sensitive target materials in a coating source. The problem of specifying a method and arrangement, by means of which reactive, in particular oxygen-sensitive target mat...
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WO/2023/183902A1 |
A method is disclosed for enhancing adhesion of a decorative metal layer to a polymeric primer that is a film on the surface of a substrate produced by a low-temperature cure. Substrates to which the polymeric primer is applied include m...
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WO/2023/181927A1 |
This coated member includes a substrate and a hard coating that is formed on the surface of the substrate and includes a nitride or carbide of a metal element. Of the total amount of metal elements and metalloid elements in the hard coat...
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WO/2023/180417A1 |
The invention relates to a microfluidic receiving element (110) for a microfluidic device (100) for processing fluids. The receiving element (110) has at least one recess (115) for receiving an aqueous solution, wherein the at least one ...
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WO/2023/182837A1 |
Disclosed is a method for manufacturing a fine metal mask, the method comprising the steps of: a) patterning a plated resist on a substrate; b) forming a metal plated layer on the substrate exposed through the patterned plated resist; c)...
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WO/2023/182311A1 |
Provided is a gallium oxide film manufacturing device with which gallium oxide is epitaxially grown to have excellent crystallinity and excellent flatness. A manufacturing device (1000) includes: a reaction chamber (1100); a substrate di...
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WO/2023/178948A1 |
Provided is a continuous ALD coating apparatus, belonging to the technical field of ALD. The continuous ALD coating apparatus includes a box assembly, a vacuum assembly, a driving assembly and a detection assembly, wherein the box assemb...
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WO/2023/174711A1 |
In various embodiments, a method (300) for processing a solar cell precursor (402), having a side coated with at least one dielectric, may comprise atomizing (303) a sputter target (404) into a coating region (401), where the sputter tar...
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WO/2023/174510A1 |
A vacuum deposition system (100, 200, 300) for coating a substrate in an essentially vertical orientation is described. The vacuum deposition system includes a vacuum transfer chamber (120), a first deposition branch (130) extending from...
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WO/2023/176757A1 |
[Problem] To provide a piezoelectric body having excellent hysteresis properties, a laminate structure including the piezoelectric body, an electronic device, an electronic apparatus, and manufacturing methods with which it is possible t...
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WO/2023/176808A1 |
According to the present invention, particles are inhibited from infiltrating a vacuum processing device. To achieve the abovementioned purpose, a vacuum processing device according to one mode of the present invention comprises a vacuum...
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WO/2023/177050A1 |
The objective of the present invention is to provide a hard film-coated cutting tool having excellent welding resistance and wear resistance. To achieve the objective as above, the hard film-coated cutting tool according to the present i...
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WO/2023/176756A1 |
[Problem] To provide a piezoelectric body that has excellent hysteresis properties, a laminated structure including the piezoelectric body, an electronic device, an electronic apparatus, and methods by which the foregoing can be obtained...
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WO/2023/174512A1 |
The invention relates to a source arrangement (10) for a TLE system (100) for providing a source element (12) comprising or consisting of a source material (14) to be evaporated and/or sublimated by a laser beam (112), comprising a suppo...
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WO/2023/174691A1 |
The invention relates to a method for coating a substrate. The method comprises the following steps: A) providing a first metal and a second metal in the form of a wire; B) introducing the wire, C) preparing the starting material that is...
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WO/2023/176758A1 |
[Problem] To provide: a piezoelectric body that has excellent hysteresis characteristics; a laminated structure, an electronic device, and an electronic apparatus that each comprise the piezoelectric body; and production methods which ma...
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WO/2023/174620A1 |
The present invention relates to a coating module for a coating facility and to a method for exchanging a coating target in a coating module.
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WO/2023/176591A1 |
A sintered body of an oxide containing an In element, a Ga element, and an Al element, wherein the atomic compositional ratio of the In element and the Al element satisfies formula (1) and formula (2). [In]/([In]+[Ga]+[Al])>0.70 … (1...
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WO/2023/176569A1 |
A sputtering apparatus (1) deposits a conductive film (22) by sputtering on one side of a base material (21) in the thickness direction while conveying the base material (21) in a roll-to-roll fashion. The sputtering apparatus (1) has a ...
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WO/2023/174781A1 |
The invention relates to a multi-layer body, comprising (I) a carrier layer made of a special thermoplastic polycarbonate molding compound and (II) a metal layer which has one or more recesses. The invention also relates to a lighting or...
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WO/2023/169135A1 |
An ion generation device for straight tube square electromagnetic ion implantation equipment, which belongs to the technical field of ion implantation. Said device comprises an ion sputtering housing (2) having a straight tube square-sha...
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WO/2023/172227A2 |
The invention relates to the boron nitride (BN) coating method in which the Inductively Coupled Plasma (ICP) method is used together with the Physical Vapor Deposition (PVD) method and the Magnetron Sputtering method. In the BN coating m...
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WO/2023/170304A1 |
The invention provides a method of forming a perovskite material from a plurality of evaporation sources comprising co-subliming from: (i) a first evaporation source comprising a mixture of co-sublimable organic halides, wherein the orga...
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WO/2023/172000A1 |
A display device comprises: a plurality of unit regions each having a hexagonal first edge including a first outer side and a second outer side parallel to the first outer side and having a length equal to the length of the first outer s...
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WO/2023/172545A1 |
Embodiments of heat shield assemblies for a processing chamber are provided herein. In some embodiments, a heat shield assembly for a processing chamber includes: a first shield comprising a circular plate; a second shield coupled to the...
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WO/2023/172213A1 |
The invention pertains to the technical field of renewable energy generation and relates to a flexible base material that can be used in photovoltaic cells or solar panels obtained from these, electricity generation charging stations or ...
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WO/2023/170215A1 |
Disclosed is the use of a composite of a transparent support further comprising at least one dichroic filter (DF) which composite exhibits, established in accordance with Industry Standard NEN-EN 410, a transmittance ratio of T_IR / T_ s...
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WO/2023/170429A1 |
The invention provides a method for producing a perovskite material which comprises: i. The deposition of a first metal halide precursor; and ii. The deposition of a second metal halide precursor, wherein the halide component in the seco...
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WO/2023/170214A1 |
Disclosed is a method for the production of a visual light transmitting and infra-red reflecting composite including, adhered to one side of a transparent support, at least one dichroic filter (DF) which filter comprises at least one met...
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WO/2023/171544A1 |
The present invention provides a mixed powder for vacuum deposition containing a first organic compound and a second organic compound, the mixed powder having a volume median diameter of 10-60 μm inclusive.
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WO/2023/169140A1 |
Provided in the present invention are a high-throughput thin film deposition apparatus, a high-throughput etching apparatus and an etching method. The high-throughput thin film deposition or the high-throughput etching apparatus comprise...
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WO/2023/165725A1 |
The invention relates to a method for producing an optical layer system and to an optical layer system which comprises a plurality of layers arranged on a substrate, some layers having a high refractive index nH and other layers having a...
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WO/2023/166387A1 |
The present invention relates to a method for manufacturing a barrier layer for a paper or paperboard based packaging laminate, said method comprising: a) providing a barrier substrate comprising at least 50 wt% highly refined cellulose ...
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WO/2023/167029A1 |
Provided are a sputtering target, a method for forming a chalcogenide film, and a memory device with which it is possible to form a highly heat-resistant chalcogenide film while inhibiting an increase in particles. The sputtering target ...
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WO/2023/166388A1 |
The present invention relates to A method for manufacturing a paper or paperboard based packaging laminate, said method comprising: a) providing a paper or paperboard substrate having a grammage of at least 80 g/m2, a density below 800 k...
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WO/2023/167774A1 |
The present disclosure provides a method to adjust asymmetric velocity of a scan in a scanning ion beam deposition or etch process to correct asymmetry of depositing or etching between the inboard side and the outboard side of device str...
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WO/2023/167347A1 |
A linear evaporation source comprises: a crucible having an open top; a heater for heating the crucible from outside the crucible; a nozzle plate covering the top of the crucible and having an upper nozzle hole formed therein; and a nozz...
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WO/2023/167854A1 |
A physical vapor deposition system may include an RF generator configured to transmit an AC process signal to a physical vapor deposition chamber via an RF matching network. A controller of the RF matching network receives the DC magnitu...
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WO/2023/161509A1 |
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (1...
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WO/2023/162682A1 |
This coated tool comprises a substrate and a coating layer disposed on the surface of the substrate. The coating layer contains a cubic crystal comprising: at least one element selected from among Group 4a, 5a, and 6a elements in the per...
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WO/2023/163593A1 |
The present disclosure relates to a method of manufacturing an electrode (In) comprising a current collector element (10) and a coating of a solid or semi-solid electrolyte (20) and the corresponding electrode part. The method comprises ...
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