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JP2002544464A5 |
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JP3333135B2 |
To provide a rapid and uniform heat treatment apparatus and its method for treating by heat the whole substrate without causing electrostatic breakdown. A plurality of minute protecting pins 93 are provided on the upper face of a heat-tr...
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JP2002532840A |
A carrier substrate for carrying objects subjected to elevated temperatures comprises at least a grid part and a border part. The grid part includes grid elements having end portions provided with holes. The end portions partly extend ou...
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JP3317711B2 |
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JP2002519613A |
A rotating vacuum kiln for heat treating solid particulate material under vacuum conditions uses a rotating refractory metal cylindrical vessel with a cool inlet zone, hot intermediate zone, and cool exit zone, with a first series of inn...
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JP2002510153A |
A substrate support, such as an edge ring, includes an inner portion, and an outer portion contiguous with the inner portion and extending radially outward therefrom. The inner portion has a raised annular extension forming a ridge for s...
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JP3267987B2 |
PURPOSE: To quickly attain specified work temp. and keep specified temp. during working by applying a coating for assisting the heat conduction between a work and platen on the surface of the platen, so that the coating has an emissivity...
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JP2002029857A |
To provide a tray for firing of small-sized ceramic parts, such as disk type ceramic capacitors, chip type resistors, ring varistors, semiconductor capacitors, piezoelectric material products, chip type laminated capacitors and chip type...
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JP2001324277A |
To provide a heating apparatus, which can heat many objects to be heated simultaneously and effectively, does not cause the unevenness of temperature and of which size is smaller than the conventional heating apparatus.The heating appara...
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JP2001304770A |
To provide a supporting plate for resting a plate-like article to be fired, e.g. a tile, at the time of firing in which cracking or damage due to concentration of stress is prevented, and a sintering support equipped with such a supporti...
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JP2001294476A |
To solve the problem that at least either a firing tool or a green boy is broken when they are conveyed and mounted. The loading device is constituted of a horizontally moving part which is freely reciprocatively movable between a convey...
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JP2001280855A |
To produce a high quality electronic, optical or superconducting material of conventionally unattainable large size by holding a large material of arbitrary shape in a space in noncontact state and then heat treating it at a high tempera...
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JP3215503B2 |
PURPOSE: To make thin a bed and to prevent carbonization and adhesion of wax by covering the bed that is made of a thermal structure compound material with a thermal decomposition carbon or a pyrocarbon layer on the surface of a workpiec...
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JP2001240423A |
To provide a method for manufacturing a silica-coated clad tube as a precursor of an optical fiber wherein processing accompanying a homogeneous gaseous reaction product and heating are promoted because concentration on a cold surface is...
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JP3197027B2 |
PURPOSE: To obtain a partitioning wall for a heating furnace, which is light in weight and sufficient in strength. CONSTITUTION: A plurality of beam members 7, 7,... are arranged between two pillar members 2a, 2b fixed to the floor of a ...
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JP2001196322A |
To provide an auxiliary heating plate which is capable of lessening a temperature difference between the peripheral part and center of a semiconductor wafer so as to uniformly heat the semiconductor wafer, holding it in a light irradiati...
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JP3176366B2 |
An enclosable vessel for containing a silicon nitride article during sintering in a furnace to protect the silicon nitride article from thermal decomposition and contamination reactions with furnace materials comprises a closeable walled...
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JP3175251B2 |
PURPOSE: To equally heat workpiece, even if they are placed at any place on trays, in the title furnace in which a number of the workpiece are placed on the trays provided in multistage form and are heated. CONSTITUTION: For trays 7 prov...
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JP2001151524A |
To provide a glass substrate supporting mechanism for a firing furnace which is capable of uniformly firing glass substrates.The glass substrate supporting mechanism 6 for the firing furnace which is kept at a specified temperature, cont...
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JP2001082880A |
To minimize heat dissipation loss at the terminal part of a tube by a method wherein a driving plate is attached to a graphite pipe indirectly while a flexible atmosphere seal assembly, a heating chamber and a heating body are provided o...
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JP3136747B2 |
PURPOSE: To improve a mechanical strength, facilitate manufacturing and reduce cost of a transporting roll set in a furnace in which a heated item is supported and transported within an industrial furnace such as a continuous vacuum furn...
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JP3133324B2 |
PCT No. PCT/GB91/00848 Sec. 371 Date Nov. 30, 1992 Sec. 102(e) Date Nov. 30, 1992 PCT Filed May 28, 1991 PCT Pub. No. WO91/19149 PCT Pub. Date Dec. 12, 1991.A setter (10) for supporting an article of ceramic ware. The setter (10) compris...
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JP3130009B2 |
To provide a single-wafer heat-treating device, with a simple structure, which can improve in-plane uniformity of the temperature of an object to be treated without making the structure complicated or increasing the cost. In a single waf...
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JP2000355751A |
To inexpensively and securely prevent the sticking of webs after sintering by thermally spraying alumina on a substrate such as a carbon sheet and a stainless sheet to form an alumina film of a specified thickness, interposing and lamina...
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JP3116437B2 |
PURPOSE: To prevent the breakage of grids and legs when the grids are expanded thermally by a method wherein the legs of at least three corners among four corners of the grids are supported through spherical bodies capable of being rolle...
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JP2000340501A |
To surely control the temperature of a substrate by adjusting the parameters of a heat-treatment gas, that is supplied to the substrate in accordance with a prescribed heat treatment period for adjusting the temperature of the substrate ...
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JP3086677B2 |
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JP2000510434A |
A process for the preparation of ceramic articles having a thickness of at least about 2.5 cm, which comprises: a) selecting the ceramic composition from the group consisting of silicate material, metal oxides, nitrides and carbides, and...
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JP2000150281A |
To provide a method for burning a ferrite core mold without deformations and color change, without requiring selection steps. This method includes the steps of obtaining a ferrite core molding 10 of a flattened cylinder shape, having a f...
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JP2000146455A |
To suppress fusion welding between ceramics and a support member by burning the ceramics in a burning furnace while the ceramics are placed on the support member made of a heat-resistant alloy. A number of tiles 12 being piled up in a st...
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JP3030240B2 |
To provide a device for holding a billet while maintaining the conditions required for the billet. This holding device is for induction heating of the billet of an alloy having thixotropic property and for holding and transferring this b...
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JP2000052461A |
To provide a kiln tool excellent in processability, which has good processability and processing precision, and has high durability in high temperature/strong oxidizing and corrosive environment. A kiln tool excellent in processability i...
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JP2999001B2 |
PURPOSE: To improve a graphite tubular furnace for atomic absorption spectroscopy with a specimen support. CONSTITUTION: The graphite tubular furnace 1 comprises zones 2, 3, 4, 5, 6, 5', 4', 3', 2' arranged almost at the center of the fu...
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JP2000009390A |
To prevent positional shift of a material to be treated when it is subjected to forced gas cooling after heating while being mounted on a tray by providing a retaining member for preventing or correcting positional shift of the material ...
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JP2984985B2 |
To obtain a diffusion tube supporting heat insulating material, improved in the workability of the same upon removing the same from a diffusion furnace as well as in the yield of semi-conductor products and not generating dust from the s...
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JP2985331B2 |
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JPH11314908A |
To provide a graphitization furnace capable of efficiently executing continuous production of graphite by suppressing the generation of a bridge or removing the generated bridge. This graphitization furnace continuously produces the grap...
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JP2967589B2 |
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JP2964299B2 |
PURPOSE: To exactly take out a heated work by reducing an installation area by a vertical furnace and efficiently heating a work while rotating a gear plate which places the work. CONSTITUTION: A work placing rotor 9 having a plurality o...
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JP2951479B2 |
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JP2599145Y2 |
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JP2923804B2 |
A suction adhesion-type holder used, for example, in a bonding machine including an air cooling device provided between a bonding stage and a vacuum pump that creates a vacuum suction in the bonding stage through the cooling device. Air ...
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JP2596221Y2 |
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JP2877681B2 |
A method for producing a ceramic long body has the steps of: hanging a ceramic non-sintered body having a long shape inside a sheath so that said ceramic non-sintered body does not touch the sheath; firing the ceramic body at a temperatu...
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JPH1160332A |
To provide a jig for firing without causing reation with a material to be fired such as a deflective yoke and without causing a dimensional change in the material to be fired. The jig used for firing a ferrite member such as a defective ...
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JPH113868A |
To prevent variations in the temperature of wafer side of a lamp anneal device during the process of annealing. The measured temperature of a wafer 16 at the time of annealing is monitored. The electrical power of a lamp heater 14 for he...
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JPH10339581A |
To enable a heat treatment to be carried out at a higher temperature than that attained where eutectic mixture material is formed between heat treated material and a floor material by a method wherein a contacting position between a bott...
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JPH10192304A |
To provide a fired matter supporting body which enables the simple and rapid adjustment of supplying pins with high exactness. This fired matter supporting body for dental technical working has one sheet of supporting plate 10 which has ...
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JPH10182243A |
To provide a method for producing a ceramic long sized body having an improved shape accuracy by reducing variation in the accuracy of shape and suppressing deformation of the ceramic long sized body in a firing process. This ceramic lon...
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JP2770439B2 |
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