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JP6846747B2 |
To provide a fluid control valve of a piezoelectric pump-type fluid control device capable of solving problems that it takes time for exhausting and reliability of an adhesion part of a valve element taking much manufacturing man-hours a...
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JP2021032222A |
To provide a relatively small and inexpensive fluid compression system capable of compressing fluid such as air.Two check valves 5, 6 are arranged in series in a fluid passage 4 to cause the displacement of a diaphragm 8 arranged in a br...
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JPWO2019208016A1 |
The valve is formed between the first plate forming the first vent and the valve chamber leading to the first vent between the first plate, and is connected to the valve chamber and does not face the first vent. A second plate that forms...
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JP6832888B2 |
To manufacture a diaphragm pump with higher reliability in which the mechanism of a main valve is simplified without a pilot chamber.A diaphragm pump 10 includes paired diaphragms 34 and 44 that define pump chambers 36, 46 and air chambe...
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JP6829676B2 |
A miniature pneumatic device (1) includes a miniature fluid control device (1A) and a miniature valve device (1B). The miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12), a piezoelectric actuator ...
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JP6821025B2 |
A valve device according to one aspect of the present invention comprises a valve seat, a valve member, and a securing tool. The valve seat has a bottom part in which a connecting hole is formed, and the valve seat is composed of a conic...
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JP2021004551A |
To provide a diaphragm-type compressor which is small in a size, and can effectively compress and send out fluid.In a diaphragm-type compressor 1 comprising two structures 12 each having a pressing part 22, a diaphragm 11, and a baseboar...
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JP6813764B2 |
To provide a technology effective for restricting occurrence of noise caused by a solenoid inexpensively at a pump for changing-over a flow passage of compression gas through utilization of the solenoid.An electromagnetic pump 1 comprise...
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JP6768339B2 |
To provide a blower module having a configuration of which small sized formation, in particular, a width of the device in an air feeding direction can be attained without reducing an air feeding amount.This invention comprises a driving ...
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JP6769568B2 |
A pump includes a first diaphragm, a second diaphragm, and a circumferential wall, which define a pump chamber, and a driver. The driver vibrates the first diaphragm and the second diaphragm in a flexural mode to cause pressure fluctuati...
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JP6765279B2 |
To provide a diaphragm pump that undergoes little wear and heat generation of contact portions between a driver and balls and has a long service life.A drive mechanism 25 comprises a rotor 26 rotating integrally with an output shaft 4 of...
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JP2020159233A |
To provide a small-sized diaphragm compressor capable of effectively compressing fluid.A diaphragm compressor 1 comprises: structures 10A and 10B comprising a diaphragm 11 and a substrate 13 partially separated from the diaphragm 11 and ...
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JP2020159227A |
To provide a diaphragm compressor capable of effectively compressing fluid.A diaphragm compressor 1 comprises: a diaphragm 3; and a substrate 4 that is connected to the diaphragm 3 and sandwiches the fluid which is compressed by pressing...
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JP6759334B2 |
A dual pumping fluid pump which significantly reduces vibration and noise generation. When a cam installed on a rotating shaft of a single electric motor is rotated, a pair of first and second diaphragms installed in connection to an ecc...
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JP6760377B2 |
A gas control device (100) includes a pump (10), a valve (101), a cuff (109), and a controller (115). The valve (101) includes a first plate (191) having a first vent hole (110) and a first vent hole (111), a channel forming portion (190...
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JP2020143622A |
To provide an improved compressor and a cryogenic refrigerator.A compressor 12 comprises: a first compression chamber 22a and a second compression chamber 22b for compressing gas by supplying working fluid to a first working fluid chambe...
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JP2020133440A |
To automatically supply oil into an oil chamber of a bellows pump when the oil in the oil chamber reduces, to suppress large reduction of the oil in the oil chamber.A bellows pump 1 includes a suction passage 2, a discharge passage 3, a ...
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JP6747183B2 |
To provide a pump and a robot hand that can be downsized.A pump comprises: a wall part; a first diaphragm connected to the wall part to constitute an internal space, and including a first diaphragm part; and a first piezoelectric element...
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JP6743994B2 |
A valve includes a first valve housing, a second valve housing, a diaphragm, a first fixing part, and a second fixing part. The diaphragm defines an upstream valve chamber together with the first valve housing. The diaphragm defines a do...
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JP6741176B2 |
A pump includes a first pump chamber formed by a first plate member and a second plate member, a second pump chamber formed by a first plate member and a third plate member, and a driving member. The driving member causes the first plate...
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JP6744427B2 |
At least one rib 9c, 21c extending in a direction of connecting with a valve cartridge 30 is provided to the inner sides of each of a second connection port 9 of a pump head 5 and a third connection port 21 of a first connecting adapter ...
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JPWO2019044234A1 |
When viewed from above vertically, the first spring (111) extends from the first position (121) in the first direction (D1) opposite to the side of the quadrangle S. The second spring (112) extends from the second position (122) in the s...
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JP6725419B2 |
A fluid pump includes a pump body having upper and lower parts, each comprising a substantially cylindrical side wall closed at one end by a substantially circular end wall and partially closed at the opposite end by an actuator disposed...
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JP6693923B2 |
A piezoelectric actuator (13) includes a square suspension plate (130), an outer frame (131), plural brackets (132) and a square piezoelectric ceramic plate (133). The outer frame (131) is arranged around the suspension plate (130). A se...
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JP6687170B2 |
A pump includes a housing, a first vibrating body, a second vibrating body, and a peripheral wall portion that define a pump chamber, and a driving body. The housing has a first wall portion opposed to the first vibrating body and a seco...
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JP6687346B2 |
A vibrational fluid mover assembly (56) having an active damping mechanism is disclosed. The vibrational fluid mover assembly includes a vibrational fluid mover (12) having a first plate (24), a second plate spaced (26) apart from the fi...
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JP6680415B2 |
A pump includes a pump housing, a vibrating plate, a driving element, and a power-feeding plate including a first conductive portion and a second conductive portion electrically insulated from the first conductive portion. The driving el...
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JP6677566B2 |
To provide a diaphragm pump 11 which can achieve low manufacturing costs and small noise.A diaphragm pump includes: a cylindrical housing body 16; a lid body 17 which closes an opening of the housing body 16; an engagement structure 21 p...
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JP6678649B2 |
An air-cooling system (10, 110, 210) utilizing a synthetic jet or airflow generator (20, 120, 220) and airflow generators utilizing piezoelectrics (26, 126, 226) to cool heat-emitting elements (12, 112, 212). Actuation of the piezoelectr...
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JP2020510158A |
What is described is a peristaltic micropump system. Disclosures include a pump body having a compartmentalized pump chamber, each with multiple non-occluded inlet and outlet ports, and a plurality of membranes disposed within the pump c...
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JP2020041500A |
To realize a higher flow rate and a higher pressure than those of a conventional structure while keeping quietness.A pump 10 comprises a flat plate 20, a flat plate 300 comprising a vibration region 30, and a piezoelectric element 40. Th...
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JP6667078B2 |
To provide an electromagnetic oscillation type diaphragm pump capable of preventing resonance at a drive frequency, and suppressing increase of noise.The hardening of a viscoelastic material is set to 60 so that a natural frequency deter...
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JP6658958B2 |
A fluid control device includes a piezoelectric pump that includes a piezoelectric element and whose discharge pressure output varies depending on a drive frequency of the piezoelectric element, a self oscillation circuit that self-oscil...
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JP2020029855A |
To provide a low noise product and a pump of high energy efficiency, in the pump in which a fluid is delivered through piping by compression and vacuum of a compression chamber by straight reciprocating motion of a driving portion.A pump...
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JP6649092B2 |
To inhibit strength of a fluid released by a fluid release unit from lowering by a cover which covers the rear side of the fluid release unit.On the back side (an opposite side to a pressurization chamber 3) of a fluid release unit 1, a ...
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JP6643845B2 |
To prevent leakage of discharge fluid from a pump to improve metering accuracy of discharge fluid.A leakage prevention valve 40 for pump is connected to a discharge side of a pump 10 including a suction valve and a discharge valve respec...
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JP6643697B2 |
An electromagnetic converter that converts kinetic energy to electric energy, or converts electric energy to kinetic energy, includes a core configured to have a coil disposed; a magnet configured to be magnetically coupled with the core...
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JP2020020283A |
To provide a diaphragm type compressor that can suppress rise in temperature of an actuator.A diaphragm type compressor 1 includes: a substrate 4; an actuator 2; a diaphragm 3 provided between the substrate 4 and the actuator 2 to partit...
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JP6617821B2 |
A fluid control device (111) includes a valve section (12) and a blower section (13). The valve section (12) allows fluid to flow in one direction. The valve section (12) has the shape of a cylindrical container with a valve chamber (40)...
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JP6620147B2 |
A vacuum linear feed-through (20), e.g., for an EUV lithography system, includes: a vacuum diaphragm bellows (21), which has a first end (21a) attaching a component and a second end (21b), opposite the first end, attaching to a vacuum ho...
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JP6617129B2 |
A driving system (10) includes a voltage conversion module (11), a frequency control module (12), a voltage switching module (13) and a detecting module (14). The voltage conversion module (11) is used for converting a first DC voltage (...
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JP6619615B2 |
In this pump for a gas, a transmission part that is linked to a diaphragm and that moves back and forth allows heat produced by friction with an eccentric cam part to be released to the periphery, deformation due to temperature increase ...
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JP2019194467A |
To provide an electricity accumulation structure having a settlement plate capable of quickly providing a function of converting and outputting a signal of air pressure, a flow rate, a flow velocity, etc., once a micropump is actuated.An...
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JP6602077B2 |
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JP6593579B2 |
In order to reduce noise without increasing the number of components, this compact pump is equipped with: a case; a diaphragm assembly provided in the upper portion of the interior of the case and including multiple diaphragm parts formi...
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JP6594959B2 |
Pulse tube coolers and Gifford-McMahon coolers are used to cool nuclear spin tomographs and cryopumps. To supply cooled working gas, gas compressors and in particular helium compressors are used with rotational or rotary valves. The rate...
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JP6594819B2 |
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JP6592333B2 |
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JP6585741B2 |
A fluid control device includes a piezoelectric actuator (2), a housing (1) and a glue body (5). The piezoelectric actuator (2) includes a suspension plate (21), an outer frame (23), a bracket (24) and a piezoelectric element (22). The h...
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JP6585640B2 |
A piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133). The suspension plate (130) is a square structure. The length of the suspension pla...
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