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JP6344887B2 |
A non-transitory computer readable medium, a system and a method. The method may include obtaining, by an image obtaining module, an image of a measurement site, the measurement site comprise the feature, the image of the measurement sit...
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JP6346277B2 |
A valve control device for a processing valve includes control electronics for controlling a drive and a measuring system for determining the position of an element movable within the valve control device along a straight direction of mo...
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JP6345937B2 |
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JP2018091727A |
To provide a technique for measuring a thickness of the bottom of a reactor pressure vessel in real time during severe accident.A thickness specifying method of a reactor pressure vessel includes: a step of creating first data showing a ...
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JP2018087699A |
To provide a system and a method of a silicon penetration via production management, a recording medium, and a program capable of performing a non-destructive inspection of a TSV.A silicon penetration via formation production management ...
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JP6335760B2 |
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JP6331133B2 |
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JP6326729B2 |
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JP6320387B2 |
Aspects of the present disclosure describe a target for use in measuring a relative position between two substantially coplanar layers of a device. The target includes periodic structures in first and second layers. Differences in relati...
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JP6305423B2 |
One embodiment relates to a method of measuring a relative critical dimension (RCD) during electron beam inspection of a target substrate. A reference image is obtained. A region of interest is defined in the reference image. A target im...
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JP6306352B2 |
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JP6299033B2 |
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JP6297258B2 |
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JP6294099B2 |
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JP6285813B2 |
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JP6278457B2 |
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JP6278330B2 |
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JP2018021908A |
To provide a component (10), a method (200) of making the component (10), and a method (100) of monitoring strain.The component (10) has an array of internal nodes (40) with a radiopacity distinct from the predominant radiopacity of the ...
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JP6276658B2 |
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JP6273094B2 |
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JP6265792B2 |
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JP6258845B2 |
A method including inspecting, using an X-ray transmission image, internal defects in a TSV formed in a semiconductor wafer, and detecting the X-rays, and processing an X-ray transmission image. Therein, the detection of X-rays is config...
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JP6258993B2 |
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JP6254856B2 |
To provide an image correction method and an image correction program for accurately measuring a length by correcting an error on a SEM image while using design data.The image correction method includes the steps of: condensing an electr...
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JP6255448B2 |
The purpose of the present invention is to provide a method for pattern measurement and a charged particle radiation device, whereby patterns formed by DSA techniques can be measured and inspected with high accuracy. According to an aspe...
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JP2017223554A |
To suppress deviation of a position at which a thickness is detected.A measurement device of one embodiment comprises a radiation source, a detection unit, a digital conversion unit, an interface, a control unit, and a conversion unit. T...
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JP6248960B2 |
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JP2017215173A |
To provide a thickness measuring device that determines if failure has occurred at a detector on the basis of the value of a dosage measured by the detector.A thickness measuring device 1 includes: a radiation source 10 for radiating rad...
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JP2017536790A |
Guided surface waves at various ground stations Various embodiments are disclosed in which guided surface waves emitted from waveguide probes are used to determine the navigation position. The navigation unit may determine its position b...
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JP6242282B2 |
A drift amount computing device capable of precisely computing an amount of drift is offered. The drift amount computing device (100) is used to compute an amount of drift between a first image and a second image, and comprises a correla...
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JP6244290B2 |
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JP2017211426A |
To provide a test pattern capable of improving an accuracy in analysing a frequency component of roughness, a test pattern evaluation method, a pattern transfer characteristic evaluation method, a photomask having the test pattern and an...
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JP6237048B2 |
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JP6227466B2 |
Provided is a charged particle beam device which can specify a position of an initial core with high accuracy even when fine line and space patterns are formed by an SADP in plural times. The charged particle beam device includes a detec...
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JP2017199453A |
To provide a charged particle beam apparatus capable of achieving both of setting of a scanning line direction to the proper direction and suppression of the beam irradiation amount.Proposed is a charged particle beam apparatus which inc...
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JP6224434B2 |
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JP6224467B2 |
To exactly recognize an upper layer portion and a lower layer portion about a pattern having a multilayer structure.In a pattern evaluation device for evaluating a pattern displayed in an image, selective filtering treatment is applied t...
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JP6220150B2 |
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JP6215282B2 |
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JP6215298B2 |
An object of the invention is to provide a charged particle beam apparatus capable of performing high-precision measurement even on a pattern in which a width of edges is narrow and inherent peaks of the edges cannot be easily detected. ...
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JP2017187302A |
To provide a fluid measurement system capable of measuring distribution of a substance under measurement in an exhaust gas processing device without having to modify the device for the measurement.A fluid measurement system 1 includes a ...
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JP6210841B2 |
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JP6212388B2 |
A method and device for measuring the thickness of a coating material layer of a running strip according to which, by means of an eddy current sensor for at least one area of the strip, a quantity is measured, representative of the thick...
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JP2017181262A |
To provide a measuring system which can extract particles from an electron microscope image of the particles in a liquid.The method includes: sampling means for dropping a liquid containing specific particles to a film-like filter with p...
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JP6207893B2 |
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JP6208958B2 |
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JP6194226B2 |
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JP2017150485A |
To provide a system and method for detecting distortion in a component of a gas turbine engine.The present disclosure is directed to a system 100 and method for detecting distortion in a component 102 of a gas turbine engine. The system ...
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JP2017151159A |
To inspect patterns with high accuracy, and to prevent throughput from being reduced.An inspection apparatus according to an embodiment comprises: an irradiation part for irradiating a substrate 110 with multiple beams including energy b...
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JP2017151053A |
To provide a thickness measurement device free from errors in thickness measurement of a measurement object.A thickness measurement device 1 comprises: a radiation source 10 which irradiates a measurement object 90 with radiation; a main...
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