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JP2024505941A |
Based on the X -ray scattrometry measurement, a method of estimating the value of a geometric parameter that features a distortion shape of a semiconductor structure of a high aspect ratio is presented in the present fine note. The param...
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JP7429722B2 |
A method for identifying a foil position in a power storage device (10) includes: analyzing (S1) the power storage device (10) by X-ray CT analysis to obtain an X-ray absorbed amount (AB(r, θ, z)) at each position; acquiring (S2) an on-...
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JP7425812B2 |
To provide a foil position specifying method of a power storage device capable of appropriately specifying a foil position of electrode foil included in an electrode plate of the power storage device.A method for evaluating a power stora...
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JP2024009260A |
The present invention provides a radiation-based thickness gauge. Embodiments of systems and methods for measuring the thickness of material layers using electromagnetic radiation are described. In some embodiments, the system moves the ...
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JP7411648B2 |
Method of operating a measuring device comprising a Terahertz, THz, transmitter configured to emit a THz signal to an object to be measured and a THz receiver configured to receive a reflected portion of said THz signal that has been ref...
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JP7410606B1 |
The present invention provides a non-destructive testing method and a non-destructive testing device that can measure the amount of thinning of a structure or the height of deposits deposited inside the structure with higher precision th...
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JP7411042B2 |
The present disclosure pertains to a method, a system, and a computer-readable medium for highly precisely measuring the depth of a recess formed in a sample even when, inter alia, the material or pattern density of the sample differs. I...
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JP7406195B2 |
To provide a laminar object thickness measurement method that can have a sufficient measurement speed and can be flexibly adaptive to change in measurement target film thickness etc.There is provided a method of measuring a thickness of ...
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JP7405092B2 |
A detecting system includes: a sensor (10) that includes an antenna unit (11) formed with a metal pattern, and a back surface reflector (13) that faces the antenna unit (11) via an isolation layer (12); and a reader (20) that transmits e...
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JP2023180954A |
To provide a method for easily determining the thickness of a tire from a tire cross-sectional image.A tire thickness measurement method of an embodiment measures the thickness of a tire from a tire cross-sectional image, and the tire th...
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JP7401131B2 |
A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a θ-axis extending in a horizontal direction from an origin w...
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JP2023178307A |
To provide techniques for characterizing dimensions and material properties of semiconductor devices by transmission small-angle x-ray scatterometry (TSAXS) systems.An x-ray beam is focused closer to a wafer surface for relatively small ...
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JP2023178358A |
PURPOSE: To provide an electron beam measurement device and an electron beam measurement method, which involve blocking an electron bream in real time after a predetermined period of time from real-time detection of an edge of a peak, th...
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JP2023552222A |
The present invention relates to a method for determining the temperature of at least one layer of a multilayer polymeric product, the method comprising: - positioning the product to be measured on a transfer table; - advancing the produ...
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JP2023173681A |
To shorten the time required for measuring a sample and make it possible to measure the sample with high throughput.A charged particle beam apparatus includes a storage device for storing a correction value table corresponding to a recip...
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JP7390630B1 |
An object of the present invention is to provide an inspection device capable of estimating its own position with high accuracy even within a waterway tunnel. [Solution] An inspection device 1 is an inspection device that inspects a wate...
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JP7382244B2 |
A method for inspecting a membrane electrode structure (1) which includes a first step in which detection medium capable of detecting elements of a first electrode catalyst layer (12) and a second electrode catalyst layer (22) and an ele...
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JP7368576B2 |
PURPOSE: To cut off an electron beam in real time a prescribed interval after an edge peak is detected in real time and suppress irradiation of a pattern to suppress the damage to or the shrinkage of the pattern pertaining to an electron...
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JP2023151121A |
To provide a technique capable of reducing the burden of setting measurement conditions for each circuit pattern when performing the same measurement procedure on multiple circuit patterns formed on a semiconductor member.A disclosed mea...
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JP2023149216A |
To provide a measurement device, a method for measurement, and a measurement program that can secure a measurement accuracy of a thick measurement target.A measurement device 10 includes: a measurement unit 20 having a radiation source 2...
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JP7358290B2 |
To estimate a thickness of deposits with high accurate, to extend a continuous operation time and increase an availability ratio.The present invention is configured to, when estimating a thickness of deposits adhering to the inner wall s...
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JP7358291B2 |
To estimate a thickness of deposits with high accurate, to extend a continuous operation time and increase an availability ratio.The present invention is configured to, when estimating a thickness t of a deposit 8 adhering to the inner w...
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JP2023143648A |
To provide a measuring device with which it is possible to reduce errors and secure the accuracy of thickness measurement, even when the internal measurement object of the thing to be measured has a large variation in thickness.The measu...
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JP2023140043A |
To provide an inspection device and an inspection method that can accurately reconstruct a processed shape of a cross section.According to one embodiment, an inspection device having a measuring unit and a controller is provided. The mea...
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JP7353955B2 |
To make it possible to calculate board thickness of an object to be measured even when abnormality occurs to an X-ray detector.An X-ray thickness measuring device 1 includes an X-ray generator 12, a plurality of X-ray detectors 14-1 to 1...
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JP2023541277A |
A method for determining at least one geometrical parameter of a strand-like or plate-like object (10) that has not yet completely solidified and still has a flowable component, comprising: a confirmation step of confirming the relations...
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JP2023137306A |
To provide an X-ray thickness meter which can predict an abnormality of a correction operation using a reference plate.The operation time when a reference plate is moved from a removal position to an insertion position and is returned fr...
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JP7350914B2 |
A method includes receiving an x-ray signal transmitted from an x-ray transmitter through a coated separator membrane. The method also includes obtaining infrared (IR) signals from the coated separator membrane. The IR signals include tw...
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JP2023133155A |
To provide a device and a method for surely and correctly determining dimensional data of a plate-like object or strand-like object at a low cost.A method for determining dimensional data of a plate-like object or strand-like object 18 i...
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JP2023130054A |
To provide a carriage with lock device which can be automatically fixed.A carriage 1 with lock device comprises: a carriage 10; a limit switch 50 which stops the carriage 10 when the carriage 10 arrives at a prescribed position; an air c...
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JP7346644B2 |
To correctly measure information to give feedback to an etching process, that is, the bottom dimension of a pattern being machined, the pattern tilt, and the pattern depth.In a charged particle beam device provided with an arithmetic dev...
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JP7345665B2 |
This invention carries out highly accurate fitting to a complex shape that can be generated by semiconductor processing. A shape model derives shape model parameter constraints on the basis of a machining dimension domain and a machining...
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JP2023538846A |
A system is provided for non-contact determining one or more characteristics of a layered coating. Such a system comprises a determination unit and a measurement unit including a coating scanner, a vibration searcher and an optical devic...
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JP7341241B2 |
The present invention proposes a technique for enabling the execution of measurement processing without referring to a design drawing for which it is difficult to adjust or obtain parameters for image processing that requires knowhow. Th...
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JP2023117780A |
To provide an X-ray thickness gauge that can extend the use life of an X-ray generator.An X-ray thickness gauge comprises: an X-ray generator; a detector that detects an X-ray generated from the X-ray generator and transmitting through a...
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JP2023112470A |
To provide a device for calculating the expansion/contraction amount, a program for calculating the expansion/contraction amount, an individual identification device, and an individual identification program that can identify characteris...
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JP7323517B2 |
A measurement method comprises acquiring, using image sensors (Cji) for each object during its displacement, at least three radiographic images of the region to be inspected. The images are obtained from at least three radiographic proje...
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JP2023533465A |
The overlay target has a grating-over-grating structure in which a lower grating structure is placed on the sample and an upper grating structure is placed on the lower grating structure. The overlay target further has a calibration scan...
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JP7317849B2 |
Methods and systems for improving a measurement recipe describing a sequence of measurements employed to characterize semiconductor structures are described herein. A measurement recipe is repeatedly updated before a queue of measurement...
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JP2023103539A |
To provide a technique capable of quantitatively grasping a change in a three-dimensional shape including a cross-sectional shape of a pattern in a wafer plane or between wafers non-destructively before performing cross-sectional observa...
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JP7312733B2 |
To provide a manufacturing apparatus that can improve the accuracy of misalignment inspection of packaged articles wrapped in an opaque packaging material.A manufacturing apparatus 10 for manufacturing a packaged body 1 through a process...
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JP7306092B2 |
To efficiently shield scattered radiation leaking from an inspection device, thereby suppress exposure dose of workers, and improve work efficiency.A first shielding shutter 32 formed of a material that shields an X-ray 26 covers a gap S...
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JP7306524B1 |
A measurement apparatus capable of improving safety against radiation by more reliably driving a blocking unit including a shutter is provided. A measuring apparatus 1 according to the present disclosure is a measuring apparatus 1 that m...
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JP7305585B2 |
According to one embodiment, an inspection device includes: a lens barrel that irradiates a substrate having a first main surface on which a pattern is formed with a charged particle; a terminal that comes into contact with the substrate...
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JP7305422B2 |
Provided is a technology for evaluating a property of a pattern formed inside a sample from two-dimensional information of the sample. A pattern evaluation system of the present disclosure includes a computer subsystem that executes a pr...
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JP2023095304A |
To dispense with prior highly accurate three-dimensional measurement of a calibration jig of an X-ray measurement apparatus.A calibration method comprises: a placement step of placing on a rotary table 120 a calibration jig 102 which inc...
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JP2023527297A |
A method, a non-transitory computer readable medium and a three-dimensional evaluation system for providing three-dimensional information about structural elements of a specimen. The method is to irradiate the structural elements with el...
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JP7299260B2 |
An inspection method of a membrane electrode assembly includes a first process of acquiring an X-ray transmission image of the membrane electrode assembly, a second process of identifying a luminance-reduced region having a luminance low...
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JP2023526920A |
A tire sensing system (126) operable to determine one or more physical characteristics of a tire (156) includes millimeter wave transmit and receive devices (128T; 128R). The processor (218) outputs millimeter waves (TXs;TXg,RXs;RXg) is ...
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JP2023087423A |
To provide a belongings inspection device capable of inspecting belongings of a person to be inspected regardless of whether the person is moving or stationary.A moving unit 14 is configured to move a movement sensor 1 under control of a...
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