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JP3277987B2 |
To enable the stable flow control of ozone by specifying the temp. of a N2-containing ozone gas passing through an ozone flow controller. In a state that air valves 2, 5 are opened and an ozonizer 1 is off before ozone gas flows, ozone g...
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JP2002511613A |
A chemical delivery system for a liquid chemical having predetermined chemical constituents employs an analyser for determining the proportion of one of the predetermined chemical constituents in the liquid chemical to be delivered. Prec...
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JP2002110570A |
To give a gas line system which realizes a low cost and a small foot print.The gas line system for use in a semiconductor manufacturing apparatus having at least two reactors is composed of a flow divider means composed of at least one g...
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JP3270587B2 |
PURPOSE: To provide a mixture containing an air/oxygen ratio by making a mixture of a plurality of fluids flow from an outlet by axially displacing a valve member having a cylindrical wall formed with a slot and setting and controlling a...
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JP3267529B2 |
To provide an apparatus and a method for mixing coating materials by which, when for example two-package coating material is applied in a large amount, the coating material can be mixed efficiently according to a schedule. This apparatus...
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JP3263983B2 |
PURPOSE: To provide the hot water/water mixer which can reduces the power of the driving means of a mixing valve element provided with a piston and to miniaturize the mixer. CONSTITUTION: This device is provided with a hot water side val...
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JP3262123B2 |
Process for the improvement of the sulphur yield of an assembly which produces sulphur from from H2S and which consists of a sulphur plant (1), an oxidation and hydrolysis unit (2) and a purification unit (3). Said sulphur plant (1) in p...
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JP2002059035A |
To prevent alteration of the mixing ratio of a liquid mixing and spraying apparatus attributed to a trouble that the discharge amount and discharge ratio controlled based on the rotation speed of a fixed displacement pump are distributed...
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JP3260800B2 |
PURPOSE: To prepare low concentration gas phase calibration standard with a small device and to generate concentration change of the calibration standard by controlling flow of standard gas and delusion gas with the use of two calibratio...
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JP3258747B2 |
PURPOSE: To obtain various solvent delivery systems for controlling the solvent composition in a supercritical liquid system. CONSTITUTION: A first pump 20 discharges a first solvent through a first duct 82 to a mixer 26, and a second pu...
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JP2001355508A |
To provide an improved method and device for supplying a control parameter to or in a control system.The control parameter is transmitted to a housing means inside of a control system by a transmitting means 850, and the transmitted cont...
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JP2001527664A |
(57) [Summary] Systems and methods for mixing and / or diluting ultra-pure fluids such as liquid acids for semiconductor processing. The system includes first and second drug distributors, the first and second drug distributors being ada...
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JP2001345296A |
To provide a chemical supply system in which chemical can be supplied stably to a processing unit and various problems in the production process of semiconductor device can be overcome.A chemical supply system 1 for supplying a processin...
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JP3224130B2 |
PCT No. PCT/US91/02512 Sec. 371 Date Dec. 11, 1991 Sec. 102(e) Date Dec. 11, 1991 PCT Filed Apr. 12, 1991 PCT Pub. No. WO91/16769 PCT Pub. Date Oct. 31, 1991.The invention relates in general to high-quality low bit-rate digital transform...
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JP3218807B2 |
PURPOSE: To always hold the residual chlorine concn. at an objective point to the optimum state. CONSTITUTION: Respective data of a pipe net model, estimated demand quantity, result demand quantity, an objective density time series value...
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JP3212958B2 |
To provide a control device for chemical liquid concentration which allows measurement of chemical-liquid composition and composition control at all times without sampling it. A stock solution supply part 1 for supplying a stock solution...
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JP2001259400A |
To provide a gas mixing device, inexpensive and of high control accuracy and also a gas mixing control method thereof.The flow rate control for a raw material gas is carried out by the control of the opening and closing time for shut-off...
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JP3210646B2 |
To provide a device for preparing a high purity chemical mixture with the min. storage quantity of the high purity chemical materials. These device and method are for preparing the high purity chemical mixture 68 by mixing the high purit...
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JP2001513421A |
The invention describes a machine for filling the edge joint of insulating glass panes with a semi-liquid to paste-like sealing compound, consisting of a main constituent and a secondary constituent, which are different in chemical terms...
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JP3205024B2 |
PURPOSE: To enable producing precisely mixable liquid at a specific ratio by a method, wherein a level of a liquid fed to a Teflon (registered trademark) vessel is sensitized, so as to discharge a specific amount of liquid into this vess...
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JP2001212442A |
To provide a batch controller which supplies main fluid and sub-fluid at a prescribed mixing ratio.This batch controller is constituted by connecting a main fluid supply route 10 for supplying the main fluid at a set flow rate to a main ...
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JP3191526B2 |
PURPOSE: To enable controlling gas flow rate while maintaining the constant flow rate ratio of two or more kinds of gas. CONSTITUTION: When SiH4 gas and N2 gas are introduced, while maintaining a constant flow rate ratio, into a treatmen...
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JP3192286B2 |
PURPOSE: To measure plurality of fluids and facilitate operation without losing measurement precision even if the flow speed is high by providing first and second flow rate meters, first and second control valves, a digital controller, a...
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JP2001188601A |
To obtain a service interruption stop display device for surely displaying there are traces of service interruption in batch processing operation. A storage part 12 for successively storing a set value at the time of service interruption...
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JP2001180914A |
To produce a high concentration of ozone gas with high efficiency by using an inefficient silent discharging ozonizer. A ozone gas storage tank 13, an air pump 2 and a silent discharging ozonizer 1 form a circulation circuit. By the air ...
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JP3181142B2 |
PURPOSE: To develop an air fuel ratio monitoring device in which a calculating accuracy of an air ratio in a combustion device such as a gas boiler and a gas absorbing cold or hot water machine is improved, this air ratio is monitored, t...
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JP3179543B2 |
PURPOSE: To keep the vol. or mass relation between two components even at intermittent operation by keeping the pressure of a liquid material passing through a dispenser when the flow of the material passing through the dispenser is stop...
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JP2001507832A |
(57) [Summary] The linear sheath valve (11) has a valve platform (33) and a corresponding cover (21). An elastic membrane (29) is tensioned between the cover (21) and the valve platform (33) to control the flow of liquid between the inle...
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JP3174656B2 |
PURPOSE: To improve the precision of quality control and to easily change the mixing ratios by strictly monitoring the flow rate, etc., in a continuous liquid mixing device. CONSTITUTION: The values measured by load cells 11a, 11b which ...
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JP3172414B2 |
To provide a duplex concentric poppet valve kept substantially constant over a allowable valve-opening range in a form independent of the geometry of a poppet where the discharge flow ratio of two types of fluids is different relative to...
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JP2001134324A |
To provide a temperature control system capable of quickly changing the set temperature of a work to be temperature-controlled. In this system 3 for controlling the temperature of a temperature control plate 2 provided with a plate 2A fo...
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JP2001505078A |
An oxygen concentrator having a motor (14)(25)(29) (38)(42)(59) and a compressor (67)(76) whereby oxygen is concentrated from an outside air flow characterized by having a feedback mechanism for the controlling the output of compressor (...
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JP2001062240A |
To provide a method and device for adjusting a concn. of mixed gas capable of coping with the preservation of recovery rate of readily permeable gas and the suppression of power cost. In a concn. adjusting device of the mixed gas provide...
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JP3133061B2 |
PCT No. PCT/FI90/00315 Sec. 371 Date Aug. 25, 1992 Sec. 102(e) Date Aug. 25, 1992 PCT Filed Dec. 28, 1990 PCT Pub. No. WO91/10177 PCT Pub. Date Jul. 11, 1991.The control method is directed to a quality characteristic of the process mater...
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JP3133320B2 |
A foam material dispensing system is provided with a control which measures the amount of high viscosity liquid material delivered to a mixer, determines the amount of pressurized gas required to be injected into the mixer in order to pr...
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JP2001501008A |
PCT No. PCT/FR97/02330 Sec. 371 Date Aug. 20, 1998 Sec. 102(e) Date Aug. 20, 1998 PCT Filed Dec. 17, 1997 PCT Pub. No. WO98/28102 PCT Pub. Date Jul. 2, 1998The invention relates to a process for supplying gas to a chamber which is suppli...
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JP2001009262A |
To provide a long-term, continuous method and a device for administering carbon dioxide in which carbon dioxide is continuously generated controllably for a long period of time and the size of equipment is small and there is no problem i...
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JP2000290028A |
To obtain glass having both of high transmissivity and high resistance to ultraviolet rays in the vacuum ultraviolet region by concentrically arranging plural pipes of hydrogen ejecting pipes and oxygen ejecting pipes around the pipe for...
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JP2000281358A |
To provide a method and an apparatus for producing synthetic quartz glass, in which an organosilicon compound is used as a raw material and which is capable of suppressing OH group concentration in the glass to a prescribed concentration...
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JP3093975B2 |
To automatically control resist peeling liquid to a specified water concentration and dissolution resist concentration by detecting water concentration of the resist peeling liquid in a resist peeling treatment vessel with an absorptiome...
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JP3093179B2 |
An encoder applies a digital filterbank such as a transform or subband filterbank to an input signal to generate frequency subband information, encodes the resultant subband information using adaptive bit allocation to generate fixed-len...
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JP3093107B2 |
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JP2000265945A |
To achieve drastic miniaturization and simplification of a cleaning fluid supplying system including a chemical tank, to easily and quickly prepare and supply cleaning fluid having the accurate chemical density, and to restrain particles...
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JP2000250634A |
To provide an in-line type flow rate mixer which can simplify and miniaturize its structure without using any flow rate controller. The air pumps 16A and 16B which can set the flow rates and the pulsation suppression valves 20A and 20B a...
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JP2000225334A |
To prevent the failures of synthesis owing to the shortage of a solvent or a reagent. A reaction block 1 in which reactors 2 are arranged and a liquid supply part 3 for supplying reagents and a solvent stored in reagent containers 6, 7 a...
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JP3050294B2 |
To provide a valve controller which can suppress pressure fluctuation at the time of valve switching, concn. non-stability and arrival time difference caused by the difference of a gas piping length. This valve controller is provided for...
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JP2000506425A |
An mixing assembly which transfers a number of nutritional fluids from individual source containers into a collection container while noninvasively sensing the type of fluid being transferred is provided. The mixing assembly utilizes a t...
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JP3030662B2 |
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JP3028795B2 |
To obtain an operation state of high efficiency by proportionally distributing the maximum conveyance amount of a conveying device at a set mixing rate and repeating redistribution on the basis of the maximum discharge amount of one of q...
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JP2000087847A |
To obtain long-period stable continuation of a seal function in a plunger pump part and eliminate a pulsation feed generated, when a piston is advanced/retracted, in a parallel feed pump device mounted in a two-liquid mixed feed line sim...
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