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JP2017019101A |
To provide a method for dressing a multi-thread grinding worm, capable of improving to increase a service life of a dressing tool, as well as, reducing the number of dressing tools to be maintained for an inventory.A method for dressing ...
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JP6068772B2 |
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JP6066192B2 |
The present invention relates to an apparatus for measuring surface properties of a polishing pad which measures surface properties such as surface topography or surface condition of a polishing pad used for polishing a substrate such as...
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JP6066704B2 |
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JP6065802B2 |
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JP6062834B2 |
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JP6059947B2 |
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JP2017001144A |
To re-form a molding tooth part of a desired shape and dimension to a honing grindstone.A tooth part re-forming device 20 for grindstone comprises: a grindstone holding mechanism 24 for holding a honing grindstone 10; a tooth part removi...
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JP6053895B2 |
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JP6049419B2 |
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JP6041967B2 |
A method of and an apparatus for conditioning a surface of a polishing pad 2 is used for conditioning a polishing pad on a polishing table 1 for polishing a thin film formed on a surface of a substrate W . The conditioning method include...
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JP6034717B2 |
The method includes: calculating an increment of a sliding distance of a dresser by multiplying a relative speed between the dresser and a polishing member by a contact time between them; correcting the increment of the sliding distance ...
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JP6030857B2 |
A tooth flank machining device includes a helical teeth grinding wheel, a position adjusting unit] capable of moving a relative position of a rotational axis of the helical teeth grinding wheel to a rotational axis of a work gear, and a ...
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JP6022477B2 |
The present disclosure provides a CMP pad conditioning tool with at least one integral abrasive protrusion. The present disclosure further provides a method for preparing this CMP pad conditioning tool, along with a method for using said...
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JP6022370B2 |
The machine has a grinding spindle (11) provided with a grinding wheel (12) for grinding a wave-shaped workpiece (4). A headstock (2), a tailstock (5) and the grinding spindle are movably arranged for controlling relative movement betwee...
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JP6023101B2 |
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JP6020973B2 |
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JP6014835B2 |
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JP6008220B2 |
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JP2016179513A |
To provide an adjustment method of a polishing pad for adjusting the polishing pad so that a workpiece can be polished in a uniform thickness.An adjustment method of a polishing pad (44) comprises an initialization step of processing an ...
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JP6004728B2 |
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JP5997424B2 |
A method includes a step of compacting an insulation-coated pure iron powder or an iron-based alloy powder mainly containing iron using a die to obtain a dust core, a step of heat-treating the obtained dust core, and a step of post-machi...
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JP5997028B2 |
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JP5995825B2 |
The method involves providing a disk (5) made of semiconductor material on both front and rear sides between upper and lower polishing plates (8) that are supported with hard and light compressible polishing cloth (1). Distance between t...
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JP5996382B2 |
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JP5996362B2 |
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JP2016527095A |
The present invention relates to an eye repair tool provided with a main part (2), and a work plane (6) of a main part (2) is covered by hard material particles (7) distributed on a main part (2). A crevice (8) for storing hard material ...
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JP5984615B2 |
This dressing device has: a gear grinding tool spindle (7) that rotatably supports a screw-shaped grindstone (10); and a dressing tool (30) that dresses the screw-shaped grindstone (10). The dressing device dresses the screw-shaped grind...
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JP2016159402A |
To provide a dress board which can be produced easily stably and is hard to break and tough.A dress board according to the present invention at least comprises an abrasive grain, an uncured thermosetting resin powder, and a cellulose fib...
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JPWO2014057894A1 |
The present invention relates to an elastic grindstone dressing method for dressing an elastic grindstone having a flat outer peripheral surface, which is a polishing surface, centered on the central axis of each of the elastic grindston...
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JP2016155197A |
To provide a wire saw capable of improving processing efficiency.In a wire saw 1 including a work tank 4 in which working liquid S is stored, and into which a workpiece W is immersed, and a wire 2 having abrasive grains 21 attached onto ...
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JP5974511B2 |
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JP5973805B2 |
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JP5969720B1 |
[Subject] Structure where grinding waste which arises during processing is efficiently removable is realized. [Means for Solution] Nozzle 38 for fluid injection which constitutes fluid fuel injection equipment 16 in a position which is o...
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JP5972032B2 |
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JP5972264B2 |
A cathodically-protected pad conditioner for chemical mechanical planarization includes: an abrasive member including a metallic substrate, a support carrier, and an anode affixed to the peripheral edge of the support carrier. A cathodic...
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JP5966524B2 |
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JP5967212B2 |
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JP5962242B2 |
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JP5964262B2 |
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JP5961050B2 |
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JP5957483B2 |
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JP5957317B2 |
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JP2016129927A |
To provide a method for compensating temperature-induced deviations in a grinding machine with a dressable grinding tool, and a machine corresponding to the method.A grinding machine (100) comprises: a tool spindle (11) with a grinding t...
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JP5953328B2 |
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JP5954293B2 |
A dressing apparatus for dressing a urethane foam pad, for use in polishing, by bringing diamond abrasive grains into sliding contact with the urethane foam pad, includes a support for holding the grains. The grains have multiple grit si...
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JP2016519852A |
The pad conditioner may include, for example, a plurality of independently installed adjusting elements configured to adjust the polishing pad used in a chemical mechanical polishing (CMP) process. In some embodiments, the pad conditione...
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JP2016119368A |
To provide a compact conditioning device capable of performing the conditioning of more than one type.A conditioning device for conditioning a buff pad for use in buff processing includes a base plate configured rotatably, a first condit...
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JP2016104508A |
To provide a compact design centerless grinder usable for plunge grinding and/or through-feed grinding.A grindstone spindle 28 and an adjusting axle 30 are connected to a machine bed 12 so as to be mutually movable. The grindstone spindl...
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JP5927083B2 |
A method of monitoring dressing of a polishing pad is provided. The method includes: rotating a polishing table that supports the polishing pad; dressing the polishing pad by pressing a dresser against the polishing pad while causing the...
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